JPS6149167U - - Google Patents

Info

Publication number
JPS6149167U
JPS6149167U JP13445984U JP13445984U JPS6149167U JP S6149167 U JPS6149167 U JP S6149167U JP 13445984 U JP13445984 U JP 13445984U JP 13445984 U JP13445984 U JP 13445984U JP S6149167 U JPS6149167 U JP S6149167U
Authority
JP
Japan
Prior art keywords
valve
exhaust
chamber
main
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13445984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13445984U priority Critical patent/JPS6149167U/ja
Publication of JPS6149167U publication Critical patent/JPS6149167U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Multiple-Way Valves (AREA)
JP13445984U 1984-09-03 1984-09-03 Pending JPS6149167U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13445984U JPS6149167U (enrdf_load_stackoverflow) 1984-09-03 1984-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13445984U JPS6149167U (enrdf_load_stackoverflow) 1984-09-03 1984-09-03

Publications (1)

Publication Number Publication Date
JPS6149167U true JPS6149167U (enrdf_load_stackoverflow) 1986-04-02

Family

ID=30692970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13445984U Pending JPS6149167U (enrdf_load_stackoverflow) 1984-09-03 1984-09-03

Country Status (1)

Country Link
JP (1) JPS6149167U (enrdf_load_stackoverflow)

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