JPS614611B2 - - Google Patents
Info
- Publication number
- JPS614611B2 JPS614611B2 JP21399481A JP21399481A JPS614611B2 JP S614611 B2 JPS614611 B2 JP S614611B2 JP 21399481 A JP21399481 A JP 21399481A JP 21399481 A JP21399481 A JP 21399481A JP S614611 B2 JPS614611 B2 JP S614611B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
- G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21399481A JPS58114437A (ja) | 1981-12-26 | 1981-12-26 | 静電吸着方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21399481A JPS58114437A (ja) | 1981-12-26 | 1981-12-26 | 静電吸着方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58114437A JPS58114437A (ja) | 1983-07-07 |
| JPS614611B2 true JPS614611B2 (ja) | 1986-02-12 |
Family
ID=16648493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21399481A Granted JPS58114437A (ja) | 1981-12-26 | 1981-12-26 | 静電吸着方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58114437A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10879050B2 (en) * | 2017-06-02 | 2020-12-29 | Tokyo Electron Limited | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3101954B2 (ja) * | 1990-12-27 | 2000-10-23 | 京セラ株式会社 | 静電チャックの制御装置 |
| JP6140624B2 (ja) * | 2014-02-27 | 2017-05-31 | 東京エレクトロン株式会社 | 基板保持方法、基板保持装置および接合装置 |
-
1981
- 1981-12-26 JP JP21399481A patent/JPS58114437A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10879050B2 (en) * | 2017-06-02 | 2020-12-29 | Tokyo Electron Limited | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program |
| US11764038B2 (en) | 2017-06-02 | 2023-09-19 | Tokyo Electron Limited | Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58114437A (ja) | 1983-07-07 |