JPS6145923A - Manufacture of rotary disk for reflection type rotary encoder - Google Patents
Manufacture of rotary disk for reflection type rotary encoderInfo
- Publication number
- JPS6145923A JPS6145923A JP16656584A JP16656584A JPS6145923A JP S6145923 A JPS6145923 A JP S6145923A JP 16656584 A JP16656584 A JP 16656584A JP 16656584 A JP16656584 A JP 16656584A JP S6145923 A JPS6145923 A JP S6145923A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive agent
- layer
- pigment
- pattern
- black
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 19
- 239000000049 pigment Substances 0.000 claims abstract description 12
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 claims abstract description 3
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 229910052782 aluminium Inorganic materials 0.000 abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
- 230000031700 light absorption Effects 0.000 abstract description 3
- 239000003504 photosensitizing agent Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000004922 lacquer Substances 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は反射式ロータリーエンコーダー用回転ディスク
を製作する方法に関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a rotating disk for a reflective rotary encoder.
「従来の技術」
従来、エンコーダー用回転ディスクはエツチング加工、
プレ子加工等によりスリット全数いて形成させた光透壷
穴のものが主として利用されていたが、最近では種々の
利点から反射式のものが研究、開発され、今後はこれが
広く利用されていくのではないかと考えられている。そ
の−例として上記のようにしてスリットＩＯが抜かれた
回転ディスク１１に第２図に示すように反射率の高い金
属板１２ヲ貼り付けたものがある。"Conventional technology" Conventionally, rotary disks for encoders were etched,
A type with a light-transparent pot hole formed with all the slits by plastic processing etc. was mainly used, but recently a reflective type has been researched and developed due to its various advantages, and it is expected that this type will be widely used in the future. It is thought that this may be the case. As an example, a metal plate 12 having a high reflectance is attached to a rotary disk 11 from which the slits IO have been removed as described above, as shown in FIG.
「発明が解決しようとする問題点」
上記例の反射式のものは貼り合わせた互いの金属板の反
射率の差が少なく実用的なものとは成ｐ難く、かつ金属
板を貼り合わせるという繁雑な作業を要するものであっ
た。そこでこのような方法全敗らないで反射率の高い金
属板に例えば黒色塗料等全塗布することによって光を吸
収するパターン全直接形成する方法が考えられ、かつ試
作されているが、この場合この吸光パターンはきわめて
高い精度が要求されるものであるが、現状ではこの要求
を満たすことはきわめて困難で満足されるようなものは
未だないのが実情である。"Problems to be Solved by the Invention" The reflective type in the above example has a small difference in reflectance between the metal plates bonded together, making it difficult to create a practical product, and the process of bonding the metal plates is complicated. This required a lot of work. Therefore, a method has been considered and prototyped in which a pattern that absorbs light is completely directly formed by coating a highly reflective metal plate with black paint, without completely defeating this method, but in this case, this light absorption Although patterns are required to have extremely high accuracy, it is currently extremely difficult to meet this requirement, and the reality is that there is still no one that can satisfy this requirement.
本発明は金属板に精密な吸光パターンケ比較的簡単な方
法で形成し、これにより精度の高い反射式ロータリーエ
ンコーダー用回転ディスクを得ることを課題とするもの
である。An object of the present invention is to form a precise light absorption pattern on a metal plate using a relatively simple method, thereby obtaining a highly accurate rotating disk for a reflective rotary encoder.
「問題点會解決するための手段」
本発明は反射率の高い金属板に光を吸収する黒色顔料を
混入した感光剤を塗布し、その後肢感光剤の塗布面に所
定のマスク全密着して露光し、現像し、感光しなかった
部分の感光剤を剥離剤により剥離すれば金属板上に所定
のパターンが形成される。``Means for Solving Problems'' The present invention involves applying a photosensitizer mixed with a black pigment that absorbs light to a metal plate with high reflectivity, and placing a predetermined mask in close contact with the surface of the hindlimb photosensitizer. A predetermined pattern is formed on the metal plate by exposing, developing, and peeling off the unexposed portions of the photosensitive agent using a release agent.
「作用」
感光剤の本来の使用目的は塗布、露光、現像することに
より精密なパターン全皮膜状に作り、エツチング時にマ
スクとしての役目を果し、エツチング終了後は剥離して
取り除くものである。``Function'' The original purpose of photosensitizers is to create a precise pattern in the form of a complete film by coating, exposing, and developing, to serve as a mask during etching, and to be peeled off and removed after etching is complete.
本発明においては塗布、露光、現像までは上記のエツチ
ングの場合と同じで、これによって金属板上に精ｑｊ！
なパターンが形成されるが、同時に感光剤は露光した時
、Ｎ＆光剤に含まれている黒色顔料を金属板に接着させ
る役目金する。In the present invention, the coating, exposure, and development steps are the same as in the case of etching described above, thereby allowing fine qj! to be printed on the metal plate.
At the same time, when the photosensitive agent is exposed to light, it serves to cause the black pigment contained in the N&photo agent to adhere to the metal plate.
「実施例」 本発明の実施例を第１図に従って説明する。"Example" An embodiment of the present invention will be described with reference to FIG.
（１）まずアルミ板１の表面全鏡面仕上して反射率を高
くシ、その面に空気による酸化全防止するためにアルマ
イト処理して厚さ３μ程度のアルマイトＮｌ１ｚを形成
する（第１図（１））。(1) First, the entire surface of the aluminum plate 1 is mirror-finished to have a high reflectance, and the surface is alumite-treated to completely prevent oxidation by air to form an alumite Nl1z with a thickness of about 3 μm (see Fig. 1). 1)).
（２）一方、ジアゾ系感光剤に黒色顔料を添加して混合
した顔料含有感光剤を上記アルマイト層２上に約２〜３
μの厚さにスピンナーで塗布して顔料含有感光剤１１３
’を形成する（第１図（２））。(2) On the other hand, about 2 to 3 times of a pigment-containing photosensitizer, which is a mixture of a diazo photosensitizer and a black pigment, is placed on the alumite layer 2.
Pigment-containing photosensitizer 113 is coated with a spinner to a thickness of μ.
' (Figure 1 (2)).
（３）次に上記顔料含有感光剤層３上に所定のマスク４
を密接した後、露光する（第１図（３））。(3) Next, a predetermined mask 4 is placed on the pigment-containing photosensitive agent layer 3.
are exposed to light (Fig. 1 (3)).
（４）続いてこれ全現像し剥離剤によって露光しなかっ
た部分の感光剤層３を剥離するとアルミ板１に黒色のパ
ターン５が形成される（第１図（４））。(4) Subsequently, this is completely developed and the unexposed portions of the photosensitive layer 3 are peeled off using a release agent, thereby forming a black pattern 5 on the aluminum plate 1 (FIG. 1 (4)).
（５）、上記の黒色のパターン會保護するために低温焼
付ラッカー６を塗布し、乾燥炉で焼付ける（第１図（５
））。(5) To protect the above black pattern, apply a low-temperature baking lacquer 6 and bake it in a drying oven (see Figure 1 (5).
)).
（６） 最後にプレス等により所定の寸法に内径、外
径を加工して終了する。(6) Finally, the inner and outer diameters are machined to predetermined dimensions using a press or the like.
このようにして製作された回転ディスクは下記の性能を
得ることができた。The rotating disk manufactured in this manner was able to obtain the following performance.
アルミの反射率 ・・・８５％以上
黒色パターン部の反射率・・・５％以下使 用 元
・・・波長０．９４ミクロンメータの赤外線「
発明の効果」
本発明は反射率の高い金属板に光を吸収する黒色顔料を
混入した感光剤を塗布し、露光、現像全行なって金属板
上にパターンを形成させるようにしたものであり、感光
剤のもっている優れた解像力とシャープなエツジ形成力
を利用しているので上記のパターンはきわめて精密に形
成することができると共に従来のエツチング設備をその
′！ま利用して製作できる利点もあり、従って量産も比
較的容易にでき、コストも低減化させる効果もある。Reflectance of aluminum: 85% or more Reflectance of black pattern: 5% or less
...Infrared rays with a wavelength of 0.94 micrometers.
Effects of the Invention The present invention is a method in which a photosensitive agent mixed with a light-absorbing black pigment is applied to a metal plate with high reflectance, and a pattern is formed on the metal plate by performing both exposure and development. By utilizing the excellent resolution and sharp edge-forming power of the photosensitive agent, the above pattern can be formed with great precision, and can be easily etched using conventional etching equipment. It also has the advantage of being able to be manufactured by using it, making mass production relatively easy and reducing costs.
第１図は本発明の実施例を示す説明図、第２図ハ従来の
エンコーター−用回転ディスクの例を示す断面図である
。
第１図
第２図FIG. 1 is an explanatory diagram showing an embodiment of the present invention, and FIG. 2 is a sectional view showing an example of a conventional rotary disk for an encoder. Figure 1 Figure 2
Claims (1)
感光剤を塗布した後、該感光剤の塗布面に所定のマスク
を密着させて露光し、現像し、その後感光しなかった部
分の感光剤を剥離剤により剥離してなる反射式ロータリ
ーエンコーダー用回転ディスクの製作方法。 ２、上記感光剤はジアゾ系感光剤である特許請求の範囲
第１項記載の反射式ロータリーエンコーダー用回転ディ
スクの製作方法。[Claims] 1. After applying a photosensitive agent mixed with a light-absorbing pigment to a metal plate with high reflectance, a prescribed mask is brought into close contact with the coated surface of the photosensitive agent, and the sheet is exposed to light and developed; A method for manufacturing a rotating disk for a reflective rotary encoder, in which the photosensitive agent in the unexposed areas is then removed using a release agent. 2. The method of manufacturing a rotating disk for a reflective rotary encoder according to claim 1, wherein the photosensitive agent is a diazo photosensitive agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16656584A JPS6145923A (en) | 1984-08-10 | 1984-08-10 | Manufacture of rotary disk for reflection type rotary encoder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16656584A JPS6145923A (en) | 1984-08-10 | 1984-08-10 | Manufacture of rotary disk for reflection type rotary encoder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6145923A true JPS6145923A (en) | 1986-03-06 |
Family
ID=15833619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16656584A Pending JPS6145923A (en) | 1984-08-10 | 1984-08-10 | Manufacture of rotary disk for reflection type rotary encoder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6145923A (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03202319A (en) * | 1989-12-28 | 1991-09-04 | Nippon Shokubai Kagaku Kogyo Co Ltd | Centrifugal molding method of composition pipe having resin concrete layer |
| KR980003872A (en) * | 1996-06-24 | 1998-03-30 | 김주용 | 3-layer photosensitive film shading method |
| EP1132719A1 (en) * | 2000-03-10 | 2001-09-12 | Dr. Johannes Heidenhain GmbH | Reflective measuring scale and method for producing the same |
| JP2005241248A (en) * | 2004-01-30 | 2005-09-08 | Aronshiya:Kk | Reflection plate used for optical encoder, and its manufacturing method |
| JP2009008457A (en) * | 2007-06-26 | 2009-01-15 | Nikon Corp | Reflection type encoder and motor |
| WO2009031608A1 (en) * | 2007-09-05 | 2009-03-12 | Nikon Corporation | Reflector plate for optical encoder, method for producing the same, and optical encoder |
| EP2551646A3 (en) * | 2011-07-26 | 2013-06-26 | Canon Kabushiki Kaisha | Scale and manufacturing method thereof, and absolute encoder |
| US20130271945A1 (en) | 2004-02-06 | 2013-10-17 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US8854601B2 (en) | 2005-05-12 | 2014-10-07 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US9341954B2 (en) | 2007-10-24 | 2016-05-17 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9423698B2 (en) | 2003-10-28 | 2016-08-23 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9678332B2 (en) | 2007-11-06 | 2017-06-13 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| US9678437B2 (en) | 2003-04-09 | 2017-06-13 | Nikon Corporation | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction |
| US9885872B2 (en) | 2003-11-20 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light |
| US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
-
1984
- 1984-08-10 JP JP16656584A patent/JPS6145923A/en active Pending
Cited By (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03202319A (en) * | 1989-12-28 | 1991-09-04 | Nippon Shokubai Kagaku Kogyo Co Ltd | Centrifugal molding method of composition pipe having resin concrete layer |
| KR980003872A (en) * | 1996-06-24 | 1998-03-30 | 김주용 | 3-layer photosensitive film shading method |
| EP1132719A1 (en) * | 2000-03-10 | 2001-09-12 | Dr. Johannes Heidenhain GmbH | Reflective measuring scale and method for producing the same |
| US6671092B2 (en) | 2000-03-10 | 2003-12-30 | Johannes Heidenhain Gmbh | Reflective measuring scale graduation and method for its manufacture |
| US9678437B2 (en) | 2003-04-09 | 2017-06-13 | Nikon Corporation | Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction |
| US9885959B2 (en) | 2003-04-09 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator |
| US9423698B2 (en) | 2003-10-28 | 2016-08-23 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9760014B2 (en) | 2003-10-28 | 2017-09-12 | Nikon Corporation | Illumination optical apparatus and projection exposure apparatus |
| US9885872B2 (en) | 2003-11-20 | 2018-02-06 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light |
| US10281632B2 (en) | 2003-11-20 | 2019-05-07 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and exposure method with optical member with optical rotatory power to rotate linear polarization direction |
| JP2005241248A (en) * | 2004-01-30 | 2005-09-08 | Aronshiya:Kk | Reflection plate used for optical encoder, and its manufacturing method |
| US10007194B2 (en) | 2004-02-06 | 2018-06-26 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US10234770B2 (en) | 2004-02-06 | 2019-03-19 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US10241417B2 (en) | 2004-02-06 | 2019-03-26 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US20130271945A1 (en) | 2004-02-06 | 2013-10-17 | Nikon Corporation | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method |
| US9310696B2 (en) | 2005-05-12 | 2016-04-12 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US9429851B2 (en) | 2005-05-12 | 2016-08-30 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US8854601B2 (en) | 2005-05-12 | 2014-10-07 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US9360763B2 (en) | 2005-05-12 | 2016-06-07 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| US9891539B2 (en) | 2005-05-12 | 2018-02-13 | Nikon Corporation | Projection optical system, exposure apparatus, and exposure method |
| JP2009008457A (en) * | 2007-06-26 | 2009-01-15 | Nikon Corp | Reflection type encoder and motor |
| WO2009031608A1 (en) * | 2007-09-05 | 2009-03-12 | Nikon Corporation | Reflector plate for optical encoder, method for producing the same, and optical encoder |
| JP5240198B2 (en) * | 2007-09-05 | 2013-07-17 | 株式会社ニコン | Reflector for optical encoder, method for manufacturing the same, and optical encoder |
| EP2187177A1 (en) * | 2007-09-05 | 2010-05-19 | Nikon Corporation | Reflector plate for optical encoder, method for producing the same, and optical encoder |
| US8368004B2 (en) | 2007-09-05 | 2013-02-05 | Nikon Corporation | Reflection plate for optical encoder and manufacturing method thereof, and optical encoder |
| EP2187177A4 (en) * | 2007-09-05 | 2012-12-26 | Nikon Corp | Reflector plate for optical encoder, method for producing the same, and optical encoder |
| US10101666B2 (en) | 2007-10-12 | 2018-10-16 | Nikon Corporation | Illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9857599B2 (en) | 2007-10-24 | 2018-01-02 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9341954B2 (en) | 2007-10-24 | 2016-05-17 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
| US9678332B2 (en) | 2007-11-06 | 2017-06-13 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
| EP2551646A3 (en) * | 2011-07-26 | 2013-06-26 | Canon Kabushiki Kaisha | Scale and manufacturing method thereof, and absolute encoder |
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