JPS614521Y2 - - Google Patents

Info

Publication number
JPS614521Y2
JPS614521Y2 JP17021381U JP17021381U JPS614521Y2 JP S614521 Y2 JPS614521 Y2 JP S614521Y2 JP 17021381 U JP17021381 U JP 17021381U JP 17021381 U JP17021381 U JP 17021381U JP S614521 Y2 JPS614521 Y2 JP S614521Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17021381U
Other languages
Japanese (ja)
Other versions
JPS5875759U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17021381U priority Critical patent/JPS5875759U/ja
Publication of JPS5875759U publication Critical patent/JPS5875759U/ja
Application granted granted Critical
Publication of JPS614521Y2 publication Critical patent/JPS614521Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17021381U 1981-11-17 1981-11-17 連続真空蒸着メツキ設備のシ−ル装置 Granted JPS5875759U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17021381U JPS5875759U (ja) 1981-11-17 1981-11-17 連続真空蒸着メツキ設備のシ−ル装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17021381U JPS5875759U (ja) 1981-11-17 1981-11-17 連続真空蒸着メツキ設備のシ−ル装置

Publications (2)

Publication Number Publication Date
JPS5875759U JPS5875759U (ja) 1983-05-21
JPS614521Y2 true JPS614521Y2 (enrdf_load_html_response) 1986-02-12

Family

ID=29962175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17021381U Granted JPS5875759U (ja) 1981-11-17 1981-11-17 連続真空蒸着メツキ設備のシ−ル装置

Country Status (1)

Country Link
JP (1) JPS5875759U (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784660B2 (ja) * 1985-06-29 1995-09-13 石川島播磨重工業株式会社 真空処理装置のシ−ル装置

Also Published As

Publication number Publication date
JPS5875759U (ja) 1983-05-21

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