JPS61431B2 - - Google Patents

Info

Publication number
JPS61431B2
JPS61431B2 JP21122581A JP21122581A JPS61431B2 JP S61431 B2 JPS61431 B2 JP S61431B2 JP 21122581 A JP21122581 A JP 21122581A JP 21122581 A JP21122581 A JP 21122581A JP S61431 B2 JPS61431 B2 JP S61431B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21122581A
Other versions
JPS58113377A (ja
Inventor
Hiroshi Yano
Hideki Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21122581A priority Critical patent/JPS58113377A/ja
Publication of JPS58113377A publication Critical patent/JPS58113377A/ja
Publication of JPS61431B2 publication Critical patent/JPS61431B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP21122581A 1981-12-28 1981-12-28 マイクロ波プラズマ処理装置 Granted JPS58113377A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21122581A JPS58113377A (ja) 1981-12-28 1981-12-28 マイクロ波プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21122581A JPS58113377A (ja) 1981-12-28 1981-12-28 マイクロ波プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS58113377A JPS58113377A (ja) 1983-07-06
JPS61431B2 true JPS61431B2 (ja) 1986-01-08

Family

ID=16602352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21122581A Granted JPS58113377A (ja) 1981-12-28 1981-12-28 マイクロ波プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS58113377A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167053U (ja) * 1987-04-17 1988-10-31
JPH01120739U (ja) * 1988-02-09 1989-08-16
JPH02139435U (ja) * 1989-04-21 1990-11-21

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62213126A (ja) * 1986-03-13 1987-09-19 Fujitsu Ltd マイクロ波プラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167053U (ja) * 1987-04-17 1988-10-31
JPH01120739U (ja) * 1988-02-09 1989-08-16
JPH02139435U (ja) * 1989-04-21 1990-11-21

Also Published As

Publication number Publication date
JPS58113377A (ja) 1983-07-06

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