JPS6142478U - 半導体装置のバ−ンイン装置 - Google Patents

半導体装置のバ−ンイン装置

Info

Publication number
JPS6142478U
JPS6142478U JP12747284U JP12747284U JPS6142478U JP S6142478 U JPS6142478 U JP S6142478U JP 12747284 U JP12747284 U JP 12747284U JP 12747284 U JP12747284 U JP 12747284U JP S6142478 U JPS6142478 U JP S6142478U
Authority
JP
Japan
Prior art keywords
burn
semiconductor devices
equipment
rack
door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12747284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0119105Y2 (enrdf_load_stackoverflow
Inventor
武 宮崎
憲一 植木
敏雄 伊佐山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP12747284U priority Critical patent/JPS6142478U/ja
Publication of JPS6142478U publication Critical patent/JPS6142478U/ja
Application granted granted Critical
Publication of JPH0119105Y2 publication Critical patent/JPH0119105Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP12747284U 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置 Granted JPS6142478U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12747284U JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12747284U JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Publications (2)

Publication Number Publication Date
JPS6142478U true JPS6142478U (ja) 1986-03-19
JPH0119105Y2 JPH0119105Y2 (enrdf_load_stackoverflow) 1989-06-02

Family

ID=30686116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12747284U Granted JPS6142478U (ja) 1984-08-24 1984-08-24 半導体装置のバ−ンイン装置

Country Status (1)

Country Link
JP (1) JPS6142478U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09275130A (ja) * 1996-04-04 1997-10-21 Samsung Electron Co Ltd 化学気相蒸着設備のウェーハローディング室の空気流案内装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56131476U (enrdf_load_stackoverflow) * 1980-03-06 1981-10-06
JPS59970U (ja) * 1982-06-24 1984-01-06 日本電気株式会社 半導体素子試験用恒温槽

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56131476U (enrdf_load_stackoverflow) * 1980-03-06 1981-10-06
JPS59970U (ja) * 1982-06-24 1984-01-06 日本電気株式会社 半導体素子試験用恒温槽

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09275130A (ja) * 1996-04-04 1997-10-21 Samsung Electron Co Ltd 化学気相蒸着設備のウェーハローディング室の空気流案内装置

Also Published As

Publication number Publication date
JPH0119105Y2 (enrdf_load_stackoverflow) 1989-06-02

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