JPS614187B2 - - Google Patents
Info
- Publication number
- JPS614187B2 JPS614187B2 JP7113678A JP7113678A JPS614187B2 JP S614187 B2 JPS614187 B2 JP S614187B2 JP 7113678 A JP7113678 A JP 7113678A JP 7113678 A JP7113678 A JP 7113678A JP S614187 B2 JPS614187 B2 JP S614187B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7113678A JPS54161881A (en) | 1978-06-12 | 1978-06-12 | Shifting tool of semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7113678A JPS54161881A (en) | 1978-06-12 | 1978-06-12 | Shifting tool of semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54161881A JPS54161881A (en) | 1979-12-21 |
| JPS614187B2 true JPS614187B2 (es) | 1986-02-07 |
Family
ID=13451854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7113678A Granted JPS54161881A (en) | 1978-06-12 | 1978-06-12 | Shifting tool of semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54161881A (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126780U (es) * | 1987-02-05 | 1988-08-18 |
-
1978
- 1978-06-12 JP JP7113678A patent/JPS54161881A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63126780U (es) * | 1987-02-05 | 1988-08-18 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54161881A (en) | 1979-12-21 |