JPS614180B2 - - Google Patents
Info
- Publication number
- JPS614180B2 JPS614180B2 JP11472376A JP11472376A JPS614180B2 JP S614180 B2 JPS614180 B2 JP S614180B2 JP 11472376 A JP11472376 A JP 11472376A JP 11472376 A JP11472376 A JP 11472376A JP S614180 B2 JPS614180 B2 JP S614180B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11472376A JPS5340278A (en) | 1976-09-27 | 1976-09-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11472376A JPS5340278A (en) | 1976-09-27 | 1976-09-27 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5340278A JPS5340278A (en) | 1978-04-12 |
| JPS614180B2 true JPS614180B2 (OSRAM) | 1986-02-07 |
Family
ID=14645000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11472376A Granted JPS5340278A (en) | 1976-09-27 | 1976-09-27 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5340278A (OSRAM) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58119651A (ja) * | 1982-01-11 | 1983-07-16 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
| DE10200741A1 (de) | 2002-01-11 | 2003-07-24 | Infineon Technologies Ag | Verfahren zur Herstellung einer topologieoptimierten Elektrode für einen Resonator in Dünnfilmtechnologie |
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1976
- 1976-09-27 JP JP11472376A patent/JPS5340278A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5340278A (en) | 1978-04-12 |