JPS614178B2 - - Google Patents
Info
- Publication number
- JPS614178B2 JPS614178B2 JP15118176A JP15118176A JPS614178B2 JP S614178 B2 JPS614178 B2 JP S614178B2 JP 15118176 A JP15118176 A JP 15118176A JP 15118176 A JP15118176 A JP 15118176A JP S614178 B2 JPS614178 B2 JP S614178B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15118176A JPS5374376A (en) | 1976-12-15 | 1976-12-15 | Formation method of micropattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15118176A JPS5374376A (en) | 1976-12-15 | 1976-12-15 | Formation method of micropattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5374376A JPS5374376A (en) | 1978-07-01 |
JPS614178B2 true JPS614178B2 (fr) | 1986-02-07 |
Family
ID=15513057
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15118176A Granted JPS5374376A (en) | 1976-12-15 | 1976-12-15 | Formation method of micropattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374376A (fr) |
-
1976
- 1976-12-15 JP JP15118176A patent/JPS5374376A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5374376A (en) | 1978-07-01 |