JPS614136A - High output cathode unit for producing multilayer made of various target materials on substrate - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Industrial field of application: The present invention uses a magnetic field generator for the magnetic field whose magnetic field lines partition a closed discharge space on the target material, and has a transport device for the substrate. The present invention relates to a high power cathode device for producing multiple layers of various target materials on top.

Prior Art: High-power cathodes of the above-mentioned type are known to have flat and curved targets, and are also called magnetrons.

A magnetron of this type with a planar target is described in DE 30 47 113 A1.

In the case of such magnetrons, a small number (at least one) magnetic field generator is arranged behind the target plate, which can be designed as an electromagnet or consist of a group of permanent magnets. Closed rings, arranged so that the poles of one polarity are on the outside and the poles of the other polarity are on the inside, forming a rectangular or circular shape, thereby closing the arcuate magnetic field lines into a circular, rectangular or circular shape. [
A three-dimensional tunnel is also formed, the leg points on either side of which are at the target surface. As a result, the probability of collision between electrons and ions is significantly increased, thereby concentrating the glow discharge in the region inside the tunnel, thereby reducing the snow-driving rate of the target material and thus the condensation rate on the substrate by 10~
Increases to 20 times the value.

For this reason, such magnetrons are also called high power cathodes.

To date, such cathodes have been used to produce multilayers of various target materials by arranging a number of magnetrons in series, each consisting of a magnetron substrate, a magnetic field generator, and a target plate, and passing the substrate sequentially under all the magnetrons. Already manufactured.

Problem that the invention seeks to solve: Although this method produced successive layers of individual target materials, these layers were significantly separated from each other. A particularly known field of application is the production of infrared-reflecting window panels having an adhesion improver as a first layer, an actual infrared-reflecting layer as a second layer and a protective and interference layer as a third layer. Since the individual layers do not have transition zones in this case, the adhesion forces between the individual layers are insufficient for certain industrial applications where high mechanical forces act on the layer system.

It is therefore an object of the invention to obtain a high-power cathode device of the type mentioned above, which allows the production of multiple layers that gradually transition into one another.

In order to increase the adhesion forces, so-called interlocking of the individual layer materials must be produced in this case. Such measures have hitherto not been possible with known magnetrons due to the significantly separated magnetic fields and target materials.

Technical means for solving the problem: The object is to butt-bond at least two target materials with at least one border in the region of at least one magnetic field generator forming at least one closed discharge space. and a high-power cathode device of the type described above, in which the substrate transport device runs perpendicular to at least one boundary line.

The tunnels formed by the magnetic field lines by means of the invention extend over at least two target materials directly butt-connected to each other. By this means, the glow discharge does not escape, so that a high snot-driving speed is maintained. The sputtered particles of the target material leave the target surface not only in the normal direction, but also at almost any spatial angle due to scattering effects, so that in the area of the boundary line, with increasing distance from the boundary line, there is an increase or The individual target material particles are reduced and mixed thoroughly. The transport direction of the substrate perpendicular to this boundary line creates a continuous transition zone between the different target materials on the substrate, within which the individual target materials interlock.

As a result, the adhesion force increases significantly. 1. According to West German Published Patent Application No. 2243708, a magnetron device consisting of a disk and a ring surrounding it apart from it, or similarly consisting of two semicircular plates leaving a gap in the middle, is proposed. It is publicly known. In this case only one closed magnetic field line tunnel extends over the two cathode elements to which an alternating voltage (high frequency) is applied. In this case, since the cathode members always have different potentials, a gap between them is absolutely necessary for insulation. Furthermore, since the two cathode members are made of the same material,
There is no possibility of creating a so-called mixed layer in the transition region and no problems associated therewith.

Furthermore, it is particularly advantageous according to the invention if the target material forms at least two plane-parallel plates of rectangular or square shape, and the plates are butt-connected directly to one another in the at least one discharge space.

Example: Next, embodiments of the present invention will be described with reference to the drawings.

The drawing shows a high-power cathode device 1 fixed to the upper partition wall of a vacuum chamber (not shown) by means of an insulating bushing 2 formed as a support tube. The high-power cathode device 1 has a cathode base body 3, which is formed in a known manner as a rectangular parallelepiped vessel, in which the above-mentioned magnetic field generator is located. Furthermore, a cooling liquid flows through the cathode body in order to keep the working temperature low.

On the flat lower interface of the cathode substrate 3, two mutually different target materials 4 and 5 are fixed in the form of two plane-parallel plates in a rectangular ring so as to have a good thermally conductive bond with the cathode substrate. .

The known formation of the magnetic field generator generates a closed discharge space 6 which extends over both target materials 4 and 5. Some of the magnetic field lines are shown as arcs. Its course also determines the position of the pole or pole piece behind the target material.

The closed lines that connect all the outer leg points of the magnetic field lines to each other are 1
The position of the pole or pole piece of one polarity is determined, and the closure line joining all medial leg points determines the position of each other pole or pole piece. The magnetic field lines shown are shown as representative of stepless magnetic field lines, and it is clear that the foot points of all the magnetic field lines are not just on the two closed lines, but are distributed over the visible target surface. During equipment work, the target material is locally strongly consumed due to the concentrated discharge space 6, and pit-like holes are generated at the positions of the magnetic field lines shown in the figure.
The two target materials 4 and 5 butt connect to each other at a common border line 7.

A transportation device 8 for the substrate 9 is arranged below the high-power cathode device 1 . The transport device can be designed as an endless conveyor or a roller conveyor, which guides the substrates individually or onto a plate-like support. The transport direction of the transport device 8 is indicated by an arrow 10. This direction of transport runs perpendicular to the boundary line 7 which extends laterally over the entire width of the cathode body 3, so that the individual substrates successively enter the snootling region of the target material 4 or 5. The fact that the ratio of the individual layer thicknesses approximately corresponds to the length extension in the transport direction of the target materials 4 and 5 is
This is clear assuming that the snow ξ tipping speeds of both materials are of approximately equal magnitude. The case-specific differences in snow ξ tipping speed can be compensated for by suitably shifting the boundary line 7. In all cases a transition layer or a mixing layer between the two target materials occurs when the respective substrate 9 passes through the boundary line 7.

It is of course also possible to use more than two, for example three or four, different target materials, as long as there are multiple boundaries between the individual target materials, each in the area of the discharge space.

More than one magnetic field generator or one inside the entire cathode substrate
It is also possible to provide more than one discharge space, the only thing to be taken care of is that the discharge spaces are not interrupted in the area of the border.

[Brief explanation of the drawing] The drawing is a perspective view of the device of the invention.

Claims (1)

[Claims] 1. Using a magnetic field generator for the magnetic field whose magnetic field lines partition a closed discharge space on the target material, and having a transport device for the substrate, consisting of various target materials onto the substrate. In a high-power cathode arrangement for producing multilayers, at least two target materials (4, 5) are arranged in the region of at least one magnetic field generator forming at least one closed discharge space (6). Two boundaries (7)
high-power cathodes for producing multilayers of different target materials on a substrate, characterized in that they are butt-connected to each other at , and that the transport device of the substrate (9) runs perpendicular to at least one boundary line. Device. 2. The target material (4, 5) forms at least two parallel planar plates of rectangular or square shape, which plates are butt-connected to each other inside at least one discharge space (6). Apparatus described in section.