JPS614072Y2 - - Google Patents

Info

Publication number
JPS614072Y2
JPS614072Y2 JP1976020132U JP2013276U JPS614072Y2 JP S614072 Y2 JPS614072 Y2 JP S614072Y2 JP 1976020132 U JP1976020132 U JP 1976020132U JP 2013276 U JP2013276 U JP 2013276U JP S614072 Y2 JPS614072 Y2 JP S614072Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976020132U
Other languages
Japanese (ja)
Other versions
JPS52111909U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976020132U priority Critical patent/JPS614072Y2/ja
Publication of JPS52111909U publication Critical patent/JPS52111909U/ja
Application granted granted Critical
Publication of JPS614072Y2 publication Critical patent/JPS614072Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1976020132U 1976-02-24 1976-02-24 Expired JPS614072Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976020132U JPS614072Y2 (en) 1976-02-24 1976-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976020132U JPS614072Y2 (en) 1976-02-24 1976-02-24

Publications (2)

Publication Number Publication Date
JPS52111909U JPS52111909U (en) 1977-08-25
JPS614072Y2 true JPS614072Y2 (en) 1986-02-07

Family

ID=28480166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976020132U Expired JPS614072Y2 (en) 1976-02-24 1976-02-24

Country Status (1)

Country Link
JP (1) JPS614072Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111542698A (en) * 2017-11-17 2020-08-14 爱德华兹真空泵有限责任公司 Cryopump with enhanced frontal array

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4714520U (en) * 1971-03-17 1972-10-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4714520U (en) * 1971-03-17 1972-10-20

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111542698A (en) * 2017-11-17 2020-08-14 爱德华兹真空泵有限责任公司 Cryopump with enhanced frontal array
US11421670B2 (en) 2017-11-17 2022-08-23 Edwards Vacuum Llc Cryopump with enhanced frontal array

Also Published As

Publication number Publication date
JPS52111909U (en) 1977-08-25

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