JPS614072Y2 - - Google Patents
Info
- Publication number
- JPS614072Y2 JPS614072Y2 JP1976020132U JP2013276U JPS614072Y2 JP S614072 Y2 JPS614072 Y2 JP S614072Y2 JP 1976020132 U JP1976020132 U JP 1976020132U JP 2013276 U JP2013276 U JP 2013276U JP S614072 Y2 JPS614072 Y2 JP S614072Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976020132U JPS614072Y2 (en) | 1976-02-24 | 1976-02-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976020132U JPS614072Y2 (en) | 1976-02-24 | 1976-02-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52111909U JPS52111909U (en) | 1977-08-25 |
JPS614072Y2 true JPS614072Y2 (en) | 1986-02-07 |
Family
ID=28480166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976020132U Expired JPS614072Y2 (en) | 1976-02-24 | 1976-02-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS614072Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111542698A (en) * | 2017-11-17 | 2020-08-14 | 爱德华兹真空泵有限责任公司 | Cryopump with enhanced frontal array |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4714520U (en) * | 1971-03-17 | 1972-10-20 |
-
1976
- 1976-02-24 JP JP1976020132U patent/JPS614072Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4714520U (en) * | 1971-03-17 | 1972-10-20 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111542698A (en) * | 2017-11-17 | 2020-08-14 | 爱德华兹真空泵有限责任公司 | Cryopump with enhanced frontal array |
US11421670B2 (en) | 2017-11-17 | 2022-08-23 | Edwards Vacuum Llc | Cryopump with enhanced frontal array |
Also Published As
Publication number | Publication date |
---|---|
JPS52111909U (en) | 1977-08-25 |