JPS6140646U - 試料導入治具 - Google Patents

試料導入治具

Info

Publication number
JPS6140646U
JPS6140646U JP12544484U JP12544484U JPS6140646U JP S6140646 U JPS6140646 U JP S6140646U JP 12544484 U JP12544484 U JP 12544484U JP 12544484 U JP12544484 U JP 12544484U JP S6140646 U JPS6140646 U JP S6140646U
Authority
JP
Japan
Prior art keywords
sample
jig
sample introduction
introduction jig
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12544484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0442910Y2 (enrdf_load_stackoverflow
Inventor
和明 瀬川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP12544484U priority Critical patent/JPS6140646U/ja
Publication of JPS6140646U publication Critical patent/JPS6140646U/ja
Application granted granted Critical
Publication of JPH0442910Y2 publication Critical patent/JPH0442910Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Sampling And Sample Adjustment (AREA)
JP12544484U 1984-08-17 1984-08-17 試料導入治具 Granted JPS6140646U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12544484U JPS6140646U (ja) 1984-08-17 1984-08-17 試料導入治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12544484U JPS6140646U (ja) 1984-08-17 1984-08-17 試料導入治具

Publications (2)

Publication Number Publication Date
JPS6140646U true JPS6140646U (ja) 1986-03-14
JPH0442910Y2 JPH0442910Y2 (enrdf_load_stackoverflow) 1992-10-12

Family

ID=30684133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12544484U Granted JPS6140646U (ja) 1984-08-17 1984-08-17 試料導入治具

Country Status (1)

Country Link
JP (1) JPS6140646U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0442910Y2 (enrdf_load_stackoverflow) 1992-10-12

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