JPS6140157B2 - - Google Patents

Info

Publication number
JPS6140157B2
JPS6140157B2 JP1908478A JP1908478A JPS6140157B2 JP S6140157 B2 JPS6140157 B2 JP S6140157B2 JP 1908478 A JP1908478 A JP 1908478A JP 1908478 A JP1908478 A JP 1908478A JP S6140157 B2 JPS6140157 B2 JP S6140157B2
Authority
JP
Japan
Prior art keywords
laser
excitation
excitation tube
output
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1908478A
Other languages
Japanese (ja)
Other versions
JPS54112193A (en
Inventor
Ken Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1908478A priority Critical patent/JPS54112193A/en
Publication of JPS54112193A publication Critical patent/JPS54112193A/en
Publication of JPS6140157B2 publication Critical patent/JPS6140157B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/092Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of flash lamp

Description

【発明の詳細な説明】 この発明はレーザ発振装置に係り、特にレーザ
発振出力の波形制御をする装置に関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser oscillation device, and more particularly to a device for controlling the waveform of laser oscillation output.

従来、溶接加工を行う固体レーザ発振装置にお
いて、レーザ発振出力の波形を形成するには、励
起管に放電させるコンデンサの蓄積電荷の放電回
路をLC回路で形成させるか、或いは複数の励起
ランプを時間的に重ね合わせて点灯し、そのタイ
ミングをずらせることなどが考えられている。前
者の場合はLC回路が複雑になり、得られる波形
にも制限があり、後者では各励起管にそれぞれ充
放電コンデンサが必要であり、充放電用のコンデ
ンサは大電流が流入、流出するので損失の少ない
比較的大形のコンデンサとなり、電源も大形化す
るなどの欠点があつた。
Conventionally, in solid-state laser oscillation devices that perform welding processing, in order to form the waveform of the laser oscillation output, an LC circuit is used to form a discharge circuit for the accumulated charge of a capacitor that is discharged into an excitation tube, or a plurality of excitation lamps are connected over time. Consideration is being given to lighting the lights overlapping each other and staggering the timing. In the former case, the LC circuit becomes complicated and there are limits to the waveforms that can be obtained.In the latter case, each excitation tube requires a charging/discharging capacitor, and large currents flow into and out of the charging/discharging capacitor, resulting in loss. This resulted in a relatively large capacitor with little resistance, and the power supply was also large.

レーザ溶接においては、レーザビームの出力波
形を連続発振させ、これに脈流を重畳させること
が行われているが、脈流発光させると励起管の寿
命が短かくなる。また、連続な低脈流レーザ出力
ではレーザ出力が大きくないと、金属は溶けな
い。パルス出力のレーザではパルスピーク値、パ
ルス幅およびパルス繰り返し速度を大きくするこ
とは、励起管の許容入力に限界があるため無理で
ある。一方、溶接などではピーク出力と照射時間
またはパルス幅は長い方が溶接物の深い部分にも
熱が伝わり、良好な溶接ができる。しかしこれら
のレーザ出力を得ることは前記したように装置の
制作上の制約があつて困難であつた。
In laser welding, the output waveform of the laser beam is continuously oscillated and a pulsating current is superimposed on it. However, when the pulsating current is emitted, the life of the excitation tube is shortened. Furthermore, continuous low pulsating laser output will not melt metal unless the laser output is large. In a pulse output laser, it is impossible to increase the pulse peak value, pulse width, and pulse repetition rate because there is a limit to the permissible input of the excitation tube. On the other hand, in welding, etc., the longer the peak output and irradiation time or pulse width, the better the heat will be transmitted to the deeper parts of the welding material, resulting in better welding. However, it has been difficult to obtain these laser outputs due to restrictions in the production of the device as described above.

本発明は、電圧と励起効率の異つた励起管を組
合せることにより、一定の直流電圧電源から規則
的に変動するレーザ出力を得るようにしたもので
ある。
According to the present invention, regularly varying laser output can be obtained from a constant DC voltage power source by combining excitation tubes with different voltages and excitation efficiencies.

以下、本発明を実施例を参照して説明する。 Hereinafter, the present invention will be explained with reference to Examples.

第1図において、2重楕円筒状の集光鏡1の共
通焦点に設置されたレーザ物質2を励起する一対
の励起管3,4が上記集光鏡1の他の二つの焦点
にそれぞれ配置されている。またレーザ物質2の
両端側には一対のレーザ共振器5,6が配置され
ている。励起管3,4を点灯する主電源である直
流電源7は2組のスイツチング回路8,9と並列
接続されていて、一方のスイツチング回路8を経
たプラス側はコイル10が配され、励起管3の一
端側に接続されている。同様に他方のスイツチン
グ回路9を通つたプラス側と励起管4の一端側に
コイル11が配されている。この場合、励起管
3,4の放電を安定するために、直流補助電源1
2のプラス側に並列接続された直流放電安化抵抗
13,14が、コイル10,11通過後の回路に
それぞれ接続される。そして励起管3,4の各地
端側および直流補助電源12のマイナス側は一つ
の回路線にまとめられ、上記回路線は分岐してス
イツチング回路8,9を経て直流電源7に負帰還
されている。更に、一方のスイツチング回路8に
はその導通時間を制御する制御回路15が、また
他方のスイツチング回路9には上記制御作用をも
つ別の制御回路16とがそれぞれ係合している。
In FIG. 1, a pair of excitation tubes 3 and 4 for exciting a laser substance 2 installed at a common focal point of a double elliptical condensing mirror 1 are respectively arranged at the other two focal points of the condensing mirror 1. has been done. Further, a pair of laser resonators 5 and 6 are arranged at both ends of the laser material 2. A DC power supply 7, which is the main power source for lighting the excitation tubes 3 and 4, is connected in parallel with two sets of switching circuits 8 and 9, and a coil 10 is arranged on the positive side after passing through one of the switching circuits 8. is connected to one end of the Similarly, a coil 11 is arranged on the positive side passing through the other switching circuit 9 and on one end side of the excitation tube 4. In this case, in order to stabilize the discharge of the excitation tubes 3 and 4, the DC auxiliary power supply 1
Direct current discharge stabilizing resistors 13 and 14 connected in parallel to the positive side of 2 are connected to the circuits after passing through the coils 10 and 11, respectively. Each terminal side of the excitation tubes 3 and 4 and the negative side of the DC auxiliary power supply 12 are combined into one circuit line, and the circuit line is branched and negative feedback is sent to the DC power supply 7 via switching circuits 8 and 9. . Further, one switching circuit 8 is engaged with a control circuit 15 for controlling its conduction time, and the other switching circuit 9 is engaged with another control circuit 16 having the above-mentioned control function.

本発明は以上のようになつていて、その作用を
次に説明する。励起管の印加電圧とレーザ出力の
関係を示す第2図において、曲線30は低いガス
圧例えば1気圧のクリプトンガス封入の励起管
3、同じく曲線31は1.5気圧のクリプトンガス
封入の励起管4の場合のYAGレーザロツド励起
時の入出力特性である。ガス圧の高い励起管4は
放電時のインピーダンスがより大きいので、高い
電圧を印加しないと放電電流が十分流れないた
め、入力電力が入らず十分な発光が起らない。し
たがつて同一印加電圧条件下では低いガス圧の励
起管3よりレーザ出力は低くなる。このような2
種類の特性の異なる励起管3,4を用いて、レー
ザ共振器5,6内にあるレーザ物質2を交互に励
起するとピーク出力とパルス幅の異なる波形を組
にした一群のパルス列を交互に形成することがで
きる。すなわち、制御回路15をしてスイツチン
グ回路8の動作時間t1〜t2を短かくすることによ
つて第3図aに示す出力波形40を、また制御回
路16をしてスイツチング回路9の動作時間t2
t3を長くすることで、同図の出力波形41をそれ
ぞれ得る。この場合、上記出力波形40,41の
各ピーク出力は次のようにして得られる。直流電
源7の電圧を第2図の破線で示す180Vに選ぶ。
励起管3,4は直流補助電源12から直流安定化
抵抗13,14を通してレーザ発振の生じない程
度の十分低い放電電流で予め放電させておく。こ
のとき、励起管3,4の電圧降下が180V以下に
なるように直流放電電流を選ぶ。スイツチング回
路8を閉じると、直流電源7から上記回路8を経
て、コイル10を通り、励起管3に大電流が流れ
る。そして上記したように励起管3の特性は曲線
30であるから、出力波形40は破線32との交
点33に相当するピーク出力となる。また、同様
に励起管4の特性は曲線31であるから出力波形
41は破線32との交点34に相当するピーク出
力となる。
The present invention is constructed as described above, and its operation will be explained next. In FIG. 2, which shows the relationship between the applied voltage to the excitation tube and the laser output, a curve 30 indicates an excitation tube 3 filled with krypton gas at a low gas pressure, for example, 1 atm, and a curve 31 indicates an excitation tube 4 filled with krypton gas at a low gas pressure of 1.5 atm. This is the input/output characteristics during YAG laser rod excitation. Since the excitation tube 4 with a high gas pressure has a larger impedance during discharge, a sufficient discharge current will not flow unless a high voltage is applied, and therefore no input power will be applied and sufficient light emission will not occur. Therefore, under the same applied voltage conditions, the laser output will be lower than in the excitation tube 3 with a lower gas pressure. 2 like this
When the laser substances 2 in the laser resonators 5 and 6 are alternately excited using excitation tubes 3 and 4 with different types of characteristics, a group of pulse trains with waveforms having different peak outputs and pulse widths are alternately formed. can do. That is, by using the control circuit 15 to shorten the operating time t1 to t2 of the switching circuit 8, the output waveform 40 shown in FIG. Time t 2 ~
By increasing t3 , the output waveform 41 shown in the figure is obtained. In this case, each peak output of the output waveforms 40 and 41 is obtained as follows. The voltage of the DC power supply 7 is selected to be 180V as shown by the broken line in FIG.
The excitation tubes 3 and 4 are discharged in advance from the DC auxiliary power supply 12 through the DC stabilizing resistors 13 and 14 with a sufficiently low discharge current that no laser oscillation occurs. At this time, the DC discharge current is selected so that the voltage drop across the excitation tubes 3 and 4 is 180V or less. When the switching circuit 8 is closed, a large current flows from the DC power source 7 through the circuit 8, through the coil 10, and into the excitation tube 3. Since the characteristic of the excitation tube 3 is the curve 30 as described above, the output waveform 40 has a peak output corresponding to the intersection 33 with the broken line 32. Similarly, since the characteristic of the excitation tube 4 is the curve 31, the output waveform 41 has a peak output corresponding to the intersection 34 with the broken line 32.

なお、励起管3の特性を曲線31、励起管4の
特性を曲線30に入れ換え、さらにスイツチング
回路8および9の動作タイミングを制御すること
で、第3図aとは全く逆の同図bに示す波形4
2,43にすることも容易である。
By replacing the characteristics of the excitation tube 3 with the curve 31 and the characteristics of the excitation tube 4 with the curve 30, and further controlling the operation timings of the switching circuits 8 and 9, the result shown in FIG. Waveform 4 shown
It is also easy to set it to 2.43.

このように電圧と励起効率の異なる励起管を2
種以上同一共振器内に配置して制御された時間だ
け放電させることにより、ピーク出力が大きくパ
ルス幅の小さい波形と、その逆の波形とを組にし
たパルスレーザ出力を得ることができる。したが
つて、これらピーク値の異なる一群の出力を順次
連続に発生させて、溶接などに応用すれば、溶融
した部分が十分混合され良好な溶接加工ができ
る。また、ピーク値の大きい状態ではパルス幅を
小さくするので、励起管の入力電力を制限するこ
とにより、励起管寿命が大幅に延びる効果も得
る。
In this way, two excitation tubes with different voltages and excitation efficiencies are used.
By arranging two or more types of lasers in the same resonator and discharging them for a controlled period of time, it is possible to obtain a pulsed laser output that combines a waveform with a large peak output and a small pulse width and its opposite waveform. Therefore, if a group of outputs having different peak values are sequentially generated and applied to welding, the molten parts will be sufficiently mixed and a good welding process can be performed. Furthermore, since the pulse width is reduced in a state where the peak value is large, by limiting the input power to the excitation tube, the life of the excitation tube can be significantly extended.

第4図は電圧と励起効率とが同一特性を示す励
起管群を利用した場合の他の実施例を示すもの
で、第1図と同一符号のものは同一物を示す。
FIG. 4 shows another embodiment in which a group of excitation tubes having the same voltage and excitation efficiency characteristics is used, and the same reference numerals as in FIG. 1 indicate the same components.

二重楕円筒状の集光鏡1の共通焦点にレーザ物
質2、他の二つの焦点には励起管50、51が設
置されている。また52は一重楕円筒状の集光鏡
でこの焦点には別のレーザ物質53と励起管54
が配置されている。レーザ物質2と53および励
起管50と54とはそれぞれ同軸の位置になつて
いる。また、上記三つの励起管50,51,54
の電圧と励起効率とは何れも同一特性になつてい
る。5,6はレーザ共振器で、レーザ物質2,5
3を間にしかつこれらと同軸に配置されている。
そして励起管50,54とが直列接続されて同時
点灯するのと励起管51が単独で点灯することと
を動作させるために、それらの端子55,56お
よび57,58とはそれぞれ前記実施例と同様に
直流電源に並列接続されている。そして図示せぬ
が、それら2組の励起管群は上記実施例と同様の
動作を行う制御回路に係合される2組のスイツチ
ング回路に接続されて、2組の点灯回路を構成し
ている。
A laser substance 2 is installed at a common focal point of a double elliptical condensing mirror 1, and excitation tubes 50 and 51 are installed at the other two focal points. Reference numeral 52 denotes a single elliptical condensing mirror, and at its focal point there is another laser material 53 and an excitation tube 54.
is located. The laser materials 2 and 53 and the excitation tubes 50 and 54 are coaxial, respectively. In addition, the three excitation tubes 50, 51, 54
Both the voltage and excitation efficiency have the same characteristics. 5 and 6 are laser resonators, and laser materials 2 and 5
3 between them and coaxially with them.
The terminals 55, 56 and 57, 58 are connected to the terminals 55, 56 and 57, 58, respectively, in order to operate the excitation tubes 50, 54 connected in series to simultaneously light up and the excitation tube 51 to light up independently. Similarly, it is connected in parallel to the DC power supply. Although not shown, these two sets of excitation tube groups are connected to two sets of switching circuits that are engaged with a control circuit that performs the same operation as in the above embodiment, thereby configuring two sets of lighting circuits. .

上記装置では2組の点灯回路にインピーダンス
に差が生じ、放電によつて生ずる発光量にも相違
が生じる。したがつて上記2組の点灯回路を交互
に動作させ、またその動作時間を制御すれば、第
2図aまたはbと同様の出力波形を形成でき、前
記実施例と同様の効果が得られる。
In the above device, there is a difference in impedance between the two sets of lighting circuits, and a difference also occurs in the amount of light emitted by discharge. Therefore, by operating the two sets of lighting circuits alternately and controlling their operating times, it is possible to form an output waveform similar to that shown in FIG.

なお、上記二つの実施例の他に電圧と励起効率
の異なる励起管を3つ以上用いて3種類の異なる
ピーク出力を有するレーザパルスを発生させ、そ
れらの組合せ順序を変えて各種の波形群を作つた
り、或いは、励起管の電圧と出力の特性はその励
起管の劣化と共に変化するので、新らしい劣化の
ない励起管とこれより劣化の進行した別の励起管
と組合せてもピーク出力の異なる波形を作ること
ができ、前記実施例と同様の効果が得られる。し
たがつて本発明は要旨を逸脱しない範囲で種々変
形できるものである。
In addition to the above two embodiments, three or more excitation tubes with different voltages and excitation efficiencies are used to generate laser pulses with three different peak outputs, and the order in which they are combined is changed to generate various waveform groups. The voltage and output characteristics of an excitation tube change as the excitation tube deteriorates, so even if a new excitation tube with no deterioration is combined with another excitation tube that has deteriorated further, the peak output will change. Different waveforms can be created and the same effects as in the previous embodiment can be obtained. Therefore, the present invention can be modified in various ways without departing from the spirit thereof.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す回路図、第2
図は上記実施例における励起管の出力特性図、第
3図aおよびbはそれぞれ上記実施例における出
力波形図、第4図は本発明の他の実施例を示す要
部構成図である。 1,52……集光鏡、2,53……レーザ物
質、3,4,50,51,54……励起管、5,
6……レーザ共振器、7……直流電源、8,9…
…スイツチング回路、15,16……制御回路。
Figure 1 is a circuit diagram showing one embodiment of the present invention, Figure 2 is a circuit diagram showing an embodiment of the present invention.
The figure is an output characteristic diagram of the excitation tube in the above embodiment, FIGS. 3a and 3b are output waveform diagrams in the above embodiment, respectively, and FIG. 4 is a main part configuration diagram showing another embodiment of the present invention. 1,52...Condensing mirror, 2,53...Laser material, 3,4,50,51,54...Excitation tube, 5,
6... Laser resonator, 7... DC power supply, 8, 9...
...Switching circuit, 15, 16...Control circuit.

Claims (1)

【特許請求の範囲】 1 二重楕円筒状の集光鏡と、上記集光鏡の焦点
に配置されるレーザ物質と、上記集光鏡の他の焦
点に配置されて上記レーザ物質を励起しかつ複数
の異なる発光電圧特性を有する励起管群と、上記
レーザ物質の両端側に配置されるレーザ共振器
と、上記励起管群にそれぞれ接続される直流電源
と、この直流電源と励起管群との間に設けられた
スイツチング回路群と、これらスイツチング回路
群を動作させ上記励起管群の点灯タイミングおよ
び開閉時間とを制御する制御回路群とを備えたこ
とを特徴とするパルスレーザ装置。 2 励起管群は同一電圧印加でピーク出力とパル
ス幅とがそれぞれ異なる組合せのパルスレーザ出
力を周期的に励起することを特徴とする特許請求
の範囲第1項記載のパルスレーザ装置。
[Claims] 1. A double elliptical condensing mirror, a laser substance placed at the focal point of the condensing mirror, and a laser substance placed at another focal point of the condensing mirror to excite the laser substance. and a plurality of excitation tube groups having different emission voltage characteristics, a laser resonator disposed at both ends of the laser material, a DC power supply connected to each of the excitation tube groups, and the DC power supply and the excitation tube group. 1. A pulse laser device comprising a switching circuit group provided between the switching circuits and a control circuit group for operating the switching circuit group and controlling the lighting timing and opening/closing time of the excitation tube group. 2. The pulsed laser device according to claim 1, wherein the excitation tube group periodically excites pulsed laser outputs having different combinations of peak output and pulse width by applying the same voltage.
JP1908478A 1978-02-23 1978-02-23 Pulse laser unit Granted JPS54112193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1908478A JPS54112193A (en) 1978-02-23 1978-02-23 Pulse laser unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1908478A JPS54112193A (en) 1978-02-23 1978-02-23 Pulse laser unit

Publications (2)

Publication Number Publication Date
JPS54112193A JPS54112193A (en) 1979-09-01
JPS6140157B2 true JPS6140157B2 (en) 1986-09-08

Family

ID=11989573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1908478A Granted JPS54112193A (en) 1978-02-23 1978-02-23 Pulse laser unit

Country Status (1)

Country Link
JP (1) JPS54112193A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013129108A1 (en) * 2012-02-29 2013-09-06 富士フイルム株式会社 Laser light source unit, control method therefor, and photoacoustic image generation device
WO2013129105A1 (en) * 2012-02-29 2013-09-06 富士フイルム株式会社 Laser light source unit, control method for same, and photoacoustic image generation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013129108A1 (en) * 2012-02-29 2013-09-06 富士フイルム株式会社 Laser light source unit, control method therefor, and photoacoustic image generation device
WO2013129105A1 (en) * 2012-02-29 2013-09-06 富士フイルム株式会社 Laser light source unit, control method for same, and photoacoustic image generation device

Also Published As

Publication number Publication date
JPS54112193A (en) 1979-09-01

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