JPS6140131U - Trace moisture supply device - Google Patents

Trace moisture supply device

Info

Publication number
JPS6140131U
JPS6140131U JP12391884U JP12391884U JPS6140131U JP S6140131 U JPS6140131 U JP S6140131U JP 12391884 U JP12391884 U JP 12391884U JP 12391884 U JP12391884 U JP 12391884U JP S6140131 U JPS6140131 U JP S6140131U
Authority
JP
Japan
Prior art keywords
moisture supply
supply device
container
supply nozzle
trace moisture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12391884U
Other languages
Japanese (ja)
Inventor
一弘 竹田
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP12391884U priority Critical patent/JPS6140131U/en
Publication of JPS6140131U publication Critical patent/JPS6140131U/en
Pending legal-status Critical Current

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  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】 第1図は本考案の一実施例を示す微量水分供給装置の断
面図、第2図は従来の水分供給装置の断面図、第3図は
水分供給量の変化を示す線図である。 1・・・・・・容器、2・・・・・・N2ガス供給ノズ
ル、3・・・・・・水分供給ノズル、4・・・・・・混
合気体排出ノズル、5・・・・・・蓋体、9・・・・・
・ヒータ、11・!・・・・多孔性材、−12・・・・
・・のぞき窓。
[Brief Description of the Drawings] Fig. 1 is a sectional view of a trace moisture supply device showing an embodiment of the present invention, Fig. 2 is a sectional view of a conventional moisture supply device, and Fig. 3 shows changes in the amount of water supplied. FIG. 1...Container, 2...N2 gas supply nozzle, 3...Moisture supply nozzle, 4...Mixed gas discharge nozzle, 5...・Lid body, 9...
・Heater, 11・! ...Porous material, -12...
...Peephole.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 下部側壁にのぞき窓を有する竪型容器と、この容器の下
底部および上部側壁に配設されたヒータと、前記容器の
上端開口部に締着され窒素ガス供給ノズル、水分供給ノ
ズル、および混合気体排出ノズルが挿通された蓋体と、
前記水分供給ノズルの先端に装着された多孔性材とを具
備したことを特徴とする微量水分供給装置。
A vertical container having a peephole in a lower side wall, a heater disposed on a lower bottom and an upper side wall of the container, a nitrogen gas supply nozzle, a moisture supply nozzle, and a mixed gas fixed to an upper opening of the container. a lid body into which a discharge nozzle is inserted;
A micro-moisture supply device comprising: a porous material attached to the tip of the moisture supply nozzle.
JP12391884U 1984-08-13 1984-08-13 Trace moisture supply device Pending JPS6140131U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12391884U JPS6140131U (en) 1984-08-13 1984-08-13 Trace moisture supply device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12391884U JPS6140131U (en) 1984-08-13 1984-08-13 Trace moisture supply device

Publications (1)

Publication Number Publication Date
JPS6140131U true JPS6140131U (en) 1986-03-13

Family

ID=30682649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12391884U Pending JPS6140131U (en) 1984-08-13 1984-08-13 Trace moisture supply device

Country Status (1)

Country Link
JP (1) JPS6140131U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142162U (en) * 1989-04-26 1990-11-30
JPH0650467U (en) * 1991-05-10 1994-07-12 株式会社小野金属工業所 Untwisting for fishing line

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02142162U (en) * 1989-04-26 1990-11-30
JPH0650467U (en) * 1991-05-10 1994-07-12 株式会社小野金属工業所 Untwisting for fishing line

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