JPS6139616B2 - - Google Patents
Info
- Publication number
- JPS6139616B2 JPS6139616B2 JP1180281A JP1180281A JPS6139616B2 JP S6139616 B2 JPS6139616 B2 JP S6139616B2 JP 1180281 A JP1180281 A JP 1180281A JP 1180281 A JP1180281 A JP 1180281A JP S6139616 B2 JPS6139616 B2 JP S6139616B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- holes
- plate
- substrate
- sensor block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 19
- 238000005259 measurement Methods 0.000 claims description 17
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1180281A JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1180281A JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57125838A JPS57125838A (en) | 1982-08-05 |
JPS6139616B2 true JPS6139616B2 (enrdf_load_stackoverflow) | 1986-09-04 |
Family
ID=11787983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1180281A Granted JPS57125838A (en) | 1981-01-29 | 1981-01-29 | Heat conductivity type detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57125838A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2797373B2 (ja) * | 1989-02-14 | 1998-09-17 | 株式会社島津製作所 | 熱伝導率式検出器 |
JPH04136367U (ja) * | 1991-06-12 | 1992-12-18 | 内山工業株式会社 | シールの嵌合構造 |
-
1981
- 1981-01-29 JP JP1180281A patent/JPS57125838A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57125838A (en) | 1982-08-05 |
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