JPS6138820B2 - - Google Patents
Info
- Publication number
- JPS6138820B2 JPS6138820B2 JP11632080A JP11632080A JPS6138820B2 JP S6138820 B2 JPS6138820 B2 JP S6138820B2 JP 11632080 A JP11632080 A JP 11632080A JP 11632080 A JP11632080 A JP 11632080A JP S6138820 B2 JPS6138820 B2 JP S6138820B2
- Authority
- JP
- Japan
- Prior art keywords
- humidity
- sensing element
- temperature
- resistance
- changes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000005245 sintering Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical class O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/045—Circuits
- G01N27/046—Circuits provided with temperature compensation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11632080A JPS5740640A (en) | 1980-08-22 | 1980-08-22 | Temperature compensating method in humidity measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11632080A JPS5740640A (en) | 1980-08-22 | 1980-08-22 | Temperature compensating method in humidity measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5740640A JPS5740640A (en) | 1982-03-06 |
| JPS6138820B2 true JPS6138820B2 (US20110009641A1-20110113-C00116.png) | 1986-09-01 |
Family
ID=14684060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11632080A Granted JPS5740640A (en) | 1980-08-22 | 1980-08-22 | Temperature compensating method in humidity measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5740640A (US20110009641A1-20110113-C00116.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127228U (US20110009641A1-20110113-C00116.png) * | 1987-02-06 | 1988-08-19 | ||
| JPS63149122U (US20110009641A1-20110113-C00116.png) * | 1987-03-18 | 1988-09-30 | ||
| JPS63149124U (US20110009641A1-20110113-C00116.png) * | 1987-03-18 | 1988-09-30 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106290487A (zh) * | 2016-08-18 | 2017-01-04 | 卢志旭 | 一种半导体气体传感器温度补偿方法 |
-
1980
- 1980-08-22 JP JP11632080A patent/JPS5740640A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63127228U (US20110009641A1-20110113-C00116.png) * | 1987-02-06 | 1988-08-19 | ||
| JPS63149122U (US20110009641A1-20110113-C00116.png) * | 1987-03-18 | 1988-09-30 | ||
| JPS63149124U (US20110009641A1-20110113-C00116.png) * | 1987-03-18 | 1988-09-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5740640A (en) | 1982-03-06 |
