JPS6138440B2 - - Google Patents

Info

Publication number
JPS6138440B2
JPS6138440B2 JP53111352A JP11135278A JPS6138440B2 JP S6138440 B2 JPS6138440 B2 JP S6138440B2 JP 53111352 A JP53111352 A JP 53111352A JP 11135278 A JP11135278 A JP 11135278A JP S6138440 B2 JPS6138440 B2 JP S6138440B2
Authority
JP
Japan
Prior art keywords
slit
gas
charge
gas cell
slits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53111352A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5537956A (en
Inventor
Satoru Sukenobu
Tooru Matoba
Toyoaki Kimura
Hiroshi Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP11135278A priority Critical patent/JPS5537956A/ja
Publication of JPS5537956A publication Critical patent/JPS5537956A/ja
Publication of JPS6138440B2 publication Critical patent/JPS6138440B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
JP11135278A 1978-09-12 1978-09-12 Charge exchanging reaction equipment Granted JPS5537956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11135278A JPS5537956A (en) 1978-09-12 1978-09-12 Charge exchanging reaction equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11135278A JPS5537956A (en) 1978-09-12 1978-09-12 Charge exchanging reaction equipment

Publications (2)

Publication Number Publication Date
JPS5537956A JPS5537956A (en) 1980-03-17
JPS6138440B2 true JPS6138440B2 (https=) 1986-08-29

Family

ID=14559011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11135278A Granted JPS5537956A (en) 1978-09-12 1978-09-12 Charge exchanging reaction equipment

Country Status (1)

Country Link
JP (1) JPS5537956A (https=)

Also Published As

Publication number Publication date
JPS5537956A (en) 1980-03-17

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