JPS6136565U - probe card - Google Patents

probe card

Info

Publication number
JPS6136565U
JPS6136565U JP12031884U JP12031884U JPS6136565U JP S6136565 U JPS6136565 U JP S6136565U JP 12031884 U JP12031884 U JP 12031884U JP 12031884 U JP12031884 U JP 12031884U JP S6136565 U JPS6136565 U JP S6136565U
Authority
JP
Japan
Prior art keywords
probe card
fixing ring
hole
circuit board
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12031884U
Other languages
Japanese (ja)
Other versions
JPH0131966Y2 (en
Inventor
玄一 若田
Original Assignee
日本電子材料株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子材料株式会社 filed Critical 日本電子材料株式会社
Priority to JP12031884U priority Critical patent/JPS6136565U/en
Publication of JPS6136565U publication Critical patent/JPS6136565U/en
Application granted granted Critical
Publication of JPH0131966Y2 publication Critical patent/JPH0131966Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案実施例の中央端面図である。 １・・・・・・プリント基板、２・・・・・・透視窓、
３・・・・・・固定リング、４・・・・・・流体通路、
５，６・・・・・・入口、出口、７・・・・・・探針。The drawing is a central end view of an embodiment of the present invention. 1...Printed circuit board, 2...See-through window,
3...Fixing ring, 4...Fluid passage,
5, 6... Entrance, exit, 7... Probe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] プリント基板上に設けられた固定リングに、多数の探針
を放射状に接着してなるブローブカードにおいて、上記
固定リング内に円周方向の貫通孔を設け、この貫通孔の
一端を冷媒の供給源に連通したことを特徴とするブロー
ブカード。In a probe card in which a large number of probes are bonded radially to a fixing ring provided on a printed circuit board, a through hole in the circumferential direction is provided in the fixing ring, and one end of this through hole is connected to a refrigerant supply source. A blow card characterized by being connected to.
JP12031884U 1984-08-03 1984-08-03 probe card Granted JPS6136565U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12031884U JPS6136565U (en) 1984-08-03 1984-08-03 probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12031884U JPS6136565U (en) 1984-08-03 1984-08-03 probe card

Publications (2)

Publication Number Publication Date
JPS6136565U true JPS6136565U (en) 1986-03-06
JPH0131966Y2 JPH0131966Y2 (en) 1989-10-02

Family

ID=30679141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12031884U Granted JPS6136565U (en) 1984-08-03 1984-08-03 probe card

Country Status (1)

Country Link
JP (1) JPS6136565U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005514627A (en) * 2001-12-27 2005-05-19 フォームファクター，インコーポレイテッド Cooling assembly with direct cooling of active electronic components
JP2009503543A (en) * 2005-08-03 2009-01-29 クウォリタウ・インコーポレーテッド Vertical probe card and air-cooled probe head system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005514627A (en) * 2001-12-27 2005-05-19 フォームファクター，インコーポレイテッド Cooling assembly with direct cooling of active electronic components
JP2009503543A (en) * 2005-08-03 2009-01-29 クウォリタウ・インコーポレーテッド Vertical probe card and air-cooled probe head system

Also Published As

Publication number Publication date
JPH0131966Y2 (en) 1989-10-02

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