JPS6135585U - 超高真空用回転導入装置 - Google Patents

超高真空用回転導入装置

Info

Publication number
JPS6135585U
JPS6135585U JP12066284U JP12066284U JPS6135585U JP S6135585 U JPS6135585 U JP S6135585U JP 12066284 U JP12066284 U JP 12066284U JP 12066284 U JP12066284 U JP 12066284U JP S6135585 U JPS6135585 U JP S6135585U
Authority
JP
Japan
Prior art keywords
ultra
high vacuum
rotating body
introduction device
coupling element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12066284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH028548Y2 (cs
Inventor
洋幸 山川
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP12066284U priority Critical patent/JPS6135585U/ja
Publication of JPS6135585U publication Critical patent/JPS6135585U/ja
Application granted granted Critical
Publication of JPH028548Y2 publication Critical patent/JPH028548Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dynamo-Electric Clutches, Dynamo-Electric Brakes (AREA)
JP12066284U 1984-08-07 1984-08-07 超高真空用回転導入装置 Granted JPS6135585U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12066284U JPS6135585U (ja) 1984-08-07 1984-08-07 超高真空用回転導入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12066284U JPS6135585U (ja) 1984-08-07 1984-08-07 超高真空用回転導入装置

Publications (2)

Publication Number Publication Date
JPS6135585U true JPS6135585U (ja) 1986-03-05
JPH028548Y2 JPH028548Y2 (cs) 1990-02-28

Family

ID=30679476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12066284U Granted JPS6135585U (ja) 1984-08-07 1984-08-07 超高真空用回転導入装置

Country Status (1)

Country Link
JP (1) JPS6135585U (cs)

Also Published As

Publication number Publication date
JPH028548Y2 (cs) 1990-02-28

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