JPS613493Y2 - - Google Patents
Info
- Publication number
- JPS613493Y2 JPS613493Y2 JP2097881U JP2097881U JPS613493Y2 JP S613493 Y2 JPS613493 Y2 JP S613493Y2 JP 2097881 U JP2097881 U JP 2097881U JP 2097881 U JP2097881 U JP 2097881U JP S613493 Y2 JPS613493 Y2 JP S613493Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2097881U JPS613493Y2 (ko) | 1981-02-16 | 1981-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2097881U JPS613493Y2 (ko) | 1981-02-16 | 1981-02-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57136467U JPS57136467U (ko) | 1982-08-25 |
| JPS613493Y2 true JPS613493Y2 (ko) | 1986-02-03 |
Family
ID=29818874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2097881U Expired JPS613493Y2 (ko) | 1981-02-16 | 1981-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS613493Y2 (ko) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2833762B2 (ja) * | 1988-09-21 | 1998-12-09 | 株式会社芝浦製作所 | ガラス基板の乾燥装置 |
-
1981
- 1981-02-16 JP JP2097881U patent/JPS613493Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57136467U (ko) | 1982-08-25 |