JPS6134734U - glass crystal dish - Google Patents

glass crystal dish

Info

Publication number
JPS6134734U
JPS6134734U JP11854784U JP11854784U JPS6134734U JP S6134734 U JPS6134734 U JP S6134734U JP 11854784 U JP11854784 U JP 11854784U JP 11854784 U JP11854784 U JP 11854784U JP S6134734 U JPS6134734 U JP S6134734U
Authority
JP
Japan
Prior art keywords
crystal dish
glass crystal
dish
glass
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11854784U
Other languages
Japanese (ja)
Inventor
善春 高橋
Original Assignee
株式会社日立ホームテック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立ホームテック filed Critical 株式会社日立ホームテック
Priority to JP11854784U priority Critical patent/JPS6134734U/en
Publication of JPS6134734U publication Critical patent/JPS6134734U/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の硝子結晶皿の一実施例の外観を示す斜
視図、第２図は第１図の八枠内の拡大断面図である。 １・・・硝子結晶皿、２・・・突起部。FIG. 1 is a perspective view showing the appearance of an embodiment of the glass crystal dish of the present invention, and FIG. 2 is an enlarged sectional view within the 8th frame of FIG. 1. 1... Glass crystal dish, 2... Protrusion.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体基板をその内部に入れて洗浄する碍子結晶皿にお
いて、その内壁に突起部が設けられたものであることを
特徴とする硝子結晶皿。An insulator crystal dish for cleaning a semiconductor substrate by placing it inside the glass crystal dish, characterized in that a protrusion is provided on the inner wall of the insulator crystal dish.
JP11854784U 1984-07-31 1984-07-31 glass crystal dish Pending JPS6134734U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11854784U JPS6134734U (en) 1984-07-31 1984-07-31 glass crystal dish

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11854784U JPS6134734U (en) 1984-07-31 1984-07-31 glass crystal dish

Publications (1)

Publication Number Publication Date
JPS6134734U true JPS6134734U (en) 1986-03-03

Family

ID=30677438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11854784U Pending JPS6134734U (en) 1984-07-31 1984-07-31 glass crystal dish

Country Status (1)

Country Link
JP (1) JPS6134734U (en)

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