JPS6132576U - Cryo pump orifice adjustment mechanism - Google Patents

Cryo pump orifice adjustment mechanism

Info

Publication number
JPS6132576U
JPS6132576U JP11731684U JP11731684U JPS6132576U JP S6132576 U JPS6132576 U JP S6132576U JP 11731684 U JP11731684 U JP 11731684U JP 11731684 U JP11731684 U JP 11731684U JP S6132576 U JPS6132576 U JP S6132576U
Authority
JP
Japan
Prior art keywords
adjustment mechanism
cryo pump
pump orifice
orifice adjustment
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11731684U
Other languages
Japanese (ja)
Inventor
泰彦 鈴木
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP11731684U priority Critical patent/JPS6132576U/en
Publication of JPS6132576U publication Critical patent/JPS6132576U/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例を示す平面図、第２図は従来
のクライオ・ポンプ・オリフイス調整機構を示す平面図
、第３図は第２因の断面品を示す平面図である。 １・・・真空槽、２・・・輻射板、３・・・固定板、４
・・・回転板、５・・・軸、６・・・連接棒、７・・・
操作杆、７ａ・・・フランジ、８・・・板、９・・・ネ
ジ、１０・・・ナット、１１・・・継ぎ手、１２・・・
マイクロメータ、１２ａ・・・マイクロメータ固定部、
１２ｂ・・・スピンドル、１２Ｃ・・・マイクロメータ
・ロック・ナット、１２ｄ・・・目盛、１２ｅ・・・基
準線、１３・・・支柱、１４・・・固定金具、１５・・
・ナット。FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a plan view showing a conventional cryo pump orifice adjustment mechanism, and FIG. 3 is a plan view showing a cross-sectional product of the second factor. 1... Vacuum chamber, 2... Radiation plate, 3... Fixed plate, 4
... Rotating plate, 5... Shaft, 6... Connecting rod, 7...
Operating rod, 7a...flange, 8...plate, 9...screw, 10...nut, 11...coupling, 12...
Micrometer, 12a... micrometer fixing part,
12b...Spindle, 12C...Micrometer lock nut, 12d...Scale, 12e...Reference line, 13...Strut, 14...Fixing metal fittings, 15...
·nut.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオ・ポンプに設けた、各々開口部を有する固定板
及び回転板を操作杆により相対回転させてその開口部の
相対的な開度を調整するクライオ・ポンプにおいて、前
記操作杆をマイクロメータに連結したことを特徴とする
クライオ・ポンプ・オリフイス調整機構。In a cryo pump, in which a fixed plate and a rotary plate each having an opening are relatively rotated by an operating rod to adjust the relative opening of the opening, the operating rod is connected to a micrometer. The cryo pump orifice adjustment mechanism is characterized by:
JP11731684U 1984-07-31 1984-07-31 Cryo pump orifice adjustment mechanism Pending JPS6132576U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11731684U JPS6132576U (en) 1984-07-31 1984-07-31 Cryo pump orifice adjustment mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11731684U JPS6132576U (en) 1984-07-31 1984-07-31 Cryo pump orifice adjustment mechanism

Publications (1)

Publication Number Publication Date
JPS6132576U true JPS6132576U (en) 1986-02-27

Family

ID=30676229

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11731684U Pending JPS6132576U (en) 1984-07-31 1984-07-31 Cryo pump orifice adjustment mechanism

Country Status (1)

Country Link
JP (1) JPS6132576U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230316A (en) * 1988-03-09 1989-09-13 Riken Light Metal Ind Co Ltd Pressurized cooker

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230316A (en) * 1988-03-09 1989-09-13 Riken Light Metal Ind Co Ltd Pressurized cooker
JPH0438407B2 (en) * 1988-03-09 1992-06-24

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