JPS613058B2 - - Google Patents

Info

Publication number
JPS613058B2
JPS613058B2 JP16210979A JP16210979A JPS613058B2 JP S613058 B2 JPS613058 B2 JP S613058B2 JP 16210979 A JP16210979 A JP 16210979A JP 16210979 A JP16210979 A JP 16210979A JP S613058 B2 JPS613058 B2 JP S613058B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16210979A
Other languages
Japanese (ja)
Other versions
JPS5684841A (en
Inventor
Hirotoshi Hagiwara
Hideo Hiraoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Denki Kagaku Kogyo KK
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK, Shingijutsu Kaihatsu Jigyodan filed Critical Denki Kagaku Kogyo KK
Priority to JP16210979A priority Critical patent/JPS5684841A/en
Publication of JPS5684841A publication Critical patent/JPS5684841A/en
Publication of JPS613058B2 publication Critical patent/JPS613058B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
JP16210979A 1979-12-13 1979-12-13 Electron gun Granted JPS5684841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16210979A JPS5684841A (en) 1979-12-13 1979-12-13 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16210979A JPS5684841A (en) 1979-12-13 1979-12-13 Electron gun

Publications (2)

Publication Number Publication Date
JPS5684841A JPS5684841A (en) 1981-07-10
JPS613058B2 true JPS613058B2 (en) 1986-01-29

Family

ID=15748209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16210979A Granted JPS5684841A (en) 1979-12-13 1979-12-13 Electron gun

Country Status (1)

Country Link
JP (1) JPS5684841A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216852A (en) * 1986-03-17 1987-09-24 Nippon Denso Co Ltd Brake device for vehicle
USRE48001E1 (en) 2001-05-31 2020-05-19 Qualcomm Incorporated Safe application distribution and execution in a wireless environment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840729A (en) * 1981-09-02 1983-03-09 Denki Kagaku Kogyo Kk High brightness utilizing method from single crystal lanthanum boride cathode
DE3325826A1 (en) * 1983-07-18 1985-01-31 Dr. Werner Freyberg Chemische Fabrik Delitia Nachf., 6941 Laudenbach BAG FOR INCLUDING OUTGASSING PEST CONTROL
JPH10106926A (en) * 1996-10-01 1998-04-24 Nikon Corp Charged particle radiation lithography device, its evaluation method and pattern forming method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216852A (en) * 1986-03-17 1987-09-24 Nippon Denso Co Ltd Brake device for vehicle
USRE48001E1 (en) 2001-05-31 2020-05-19 Qualcomm Incorporated Safe application distribution and execution in a wireless environment

Also Published As

Publication number Publication date
JPS5684841A (en) 1981-07-10

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