JPS6130238U - パツシベ−シヨン用基板ホルダ− - Google Patents

パツシベ−シヨン用基板ホルダ−

Info

Publication number
JPS6130238U
JPS6130238U JP11405284U JP11405284U JPS6130238U JP S6130238 U JPS6130238 U JP S6130238U JP 11405284 U JP11405284 U JP 11405284U JP 11405284 U JP11405284 U JP 11405284U JP S6130238 U JPS6130238 U JP S6130238U
Authority
JP
Japan
Prior art keywords
substrate holder
passivation
recorded
coating
face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11405284U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249710Y2 (enrdf_load_stackoverflow
Inventor
博 藤崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP11405284U priority Critical patent/JPS6130238U/ja
Publication of JPS6130238U publication Critical patent/JPS6130238U/ja
Application granted granted Critical
Publication of JPH0249710Y2 publication Critical patent/JPH0249710Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11405284U 1984-07-26 1984-07-26 パツシベ−シヨン用基板ホルダ− Granted JPS6130238U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11405284U JPS6130238U (ja) 1984-07-26 1984-07-26 パツシベ−シヨン用基板ホルダ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11405284U JPS6130238U (ja) 1984-07-26 1984-07-26 パツシベ−シヨン用基板ホルダ−

Publications (2)

Publication Number Publication Date
JPS6130238U true JPS6130238U (ja) 1986-02-24
JPH0249710Y2 JPH0249710Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=30673080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11405284U Granted JPS6130238U (ja) 1984-07-26 1984-07-26 パツシベ−シヨン用基板ホルダ−

Country Status (1)

Country Link
JP (1) JPS6130238U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0249710Y2 (enrdf_load_stackoverflow) 1990-12-27

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