JPS6130238U - パツシベ−シヨン用基板ホルダ− - Google Patents
パツシベ−シヨン用基板ホルダ−Info
- Publication number
- JPS6130238U JPS6130238U JP11405284U JP11405284U JPS6130238U JP S6130238 U JPS6130238 U JP S6130238U JP 11405284 U JP11405284 U JP 11405284U JP 11405284 U JP11405284 U JP 11405284U JP S6130238 U JPS6130238 U JP S6130238U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- passivation
- recorded
- coating
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11405284U JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11405284U JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6130238U true JPS6130238U (ja) | 1986-02-24 |
JPH0249710Y2 JPH0249710Y2 (enrdf_load_html_response) | 1990-12-27 |
Family
ID=30673080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11405284U Granted JPS6130238U (ja) | 1984-07-26 | 1984-07-26 | パツシベ−シヨン用基板ホルダ− |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6130238U (enrdf_load_html_response) |
-
1984
- 1984-07-26 JP JP11405284U patent/JPS6130238U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0249710Y2 (enrdf_load_html_response) | 1990-12-27 |
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