JPS61294325A - Detector for pressure for gas piping - Google Patents
Detector for pressure for gas pipingInfo
- Publication number
- JPS61294325A JPS61294325A JP60135517A JP13551785A JPS61294325A JP S61294325 A JPS61294325 A JP S61294325A JP 60135517 A JP60135517 A JP 60135517A JP 13551785 A JP13551785 A JP 13551785A JP S61294325 A JPS61294325 A JP S61294325A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gas
- impedance
- piping
- transmitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations
- G01M3/243—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations for pipes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体製造装置に用いる各種ガス配管の安全装
置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a safety device for various gas piping used in semiconductor manufacturing equipment.
従来技術について図を用いて説明する。第３図に従来技
術によるガス配管図を示す。８はガスボンベであシ、通
常使用状態において、ガスは緊急しゃ新井９、減圧弁１
０、三方弁１１を通して装置側配管１３に導かれる。減
圧弁１０が出流れ等を起こして減圧弁二次側のガス圧力
が急激に上昇した場合、圧力スイッチ１５から信号が１
報装置７へ行き、そこからしゃ新井９に信号を送９、電
磁弁゛を閉じ、かつ三方弁１１が配管を切シ換えてガス
は逆上弁１２を経由して排気系配管１４に導かれる。The conventional technology will be explained using figures. FIG. 3 shows a gas piping diagram according to the prior art. 8 is a gas cylinder, and in normal use, gas is supplied to Arai 9 and pressure reducing valve 1 in case of emergency.
0, is led to the device side piping 13 through the three-way valve 11. When the pressure reducing valve 10 causes an outflow or the like and the gas pressure on the secondary side of the pressure reducing valve suddenly increases, the signal from the pressure switch 15 is 1.
The gas is sent to the information device 7 and from there sends a signal to the Arai 9 to close the solenoid valve 9, and the three-way valve 11 switches the piping so that the gas is guided to the exhaust system piping 14 via the reverse valve 12. It will be destroyed.
従来技術による配管内のガス圧力変動に対する検出装置
は、圧力スイッチ１５のように配管内圧力が設定圧力よ
シ上か下かにより動作させるものであシ、圧力の設定値
に対して動作状態が変化するものである。この為減圧弁
１０の流れなどへの対応は可能であるが、例えばガスの
本バルブが閉のままで、かつ配管内にガス圧力が充填さ
れている場合、そのまま装置を稼動させると、配管内の
ガス圧力が徐々に低下していき、ガス圧力の低下を検知
した時にはすでに製品が不良となってしまう恐れがあっ
た。Conventional detection devices for detecting gas pressure fluctuations in pipes are operated depending on whether the pressure in the pipe is above or below the set pressure, such as the pressure switch 15, and the operating state varies with respect to the set pressure. It changes. For this reason, it is possible to deal with the flow of the pressure reducing valve 10, but for example, if the main gas valve remains closed and the piping is filled with gas pressure, if the device is operated as it is, the inside of the piping will be affected. The gas pressure gradually decreases, and by the time a decrease in gas pressure is detected, there is a risk that the product will already be defective.
本発明は振動子を媒質であるガスの密度によって変化さ
せ、そのインピーダンス変化を読み取ることによシ配管
内の圧力及び圧力変化を検出する装置を提供するもので
ある。The present invention provides an apparatus that detects pressure and pressure changes within a pipe by changing a vibrator depending on the density of a gas as a medium and reading the impedance change.
本発明は同一の超音波振動子をガス配管内の対向する位
置に設け、一方の振動子に発振器を接続し、他方の振動
子に音響インピーダンスを測定するインピーダンスメー
タを接続し九ことを特徴とするガス配管用圧力検出装置
である。The present invention is characterized in that identical ultrasonic vibrators are provided at opposite positions in a gas pipe, an oscillator is connected to one vibrator, and an impedance meter for measuring acoustic impedance is connected to the other vibrator. This is a pressure detection device for gas piping.
以下、本発明の一実施例を図によシ説明する。 Hereinafter, one embodiment of the present invention will be explained with reference to the drawings.
第１図は圧力変動検出部の概念図である。４は配管であ
シ、１が発振側振動子である。振動子ｌは発振器５に接
続されておシ、常に振動している。FIG. 1 is a conceptual diagram of the pressure fluctuation detection section. 4 is a pipe, and 1 is an oscillation side vibrator. The vibrator l is connected to the oscillator 5 and constantly vibrates.
２は共振側振動子であシ、この振動子２はインピーダン
スメータ６に接続されている。３は振動子をささえる支
持台である。Reference numeral 2 denotes a resonance side vibrator, and this vibrator 2 is connected to an impedance meter 6. 3 is a support base that supports the vibrator.
第２図はガス変動検出部をガス配管に組み込んだ際の図
である。通常状態ではガスはボンベ８からしゃ新井９を
通シ圧力変動検出部（−次側）１６゜減圧弁１０、圧力
変動検出部（二次側）１６、三方弁１１を介して装置側
配管１３に導かれる。がンペ８を開は忘れ際、圧力変動
検出部（−次側）１６カラインピーダンスメータ６へ伝
わる音響インピーダンスが変化するので、インピーダン
スメータ６から警報装置７に信号が伝わシ、警報を発す
る。FIG. 2 is a diagram when the gas fluctuation detection section is installed in the gas piping. Under normal conditions, gas is passed from the cylinder 8 through the Arai 9, through the pressure fluctuation detection section (-outlet side) 16° pressure reducing valve 10, the pressure fluctuation detection section (secondary side) 16, and the three-way valve 11 to the equipment side piping 13. guided by. When forgetting to open the pump 8, the acoustic impedance transmitted to the pressure fluctuation detection section (-next side) 16 and impedance meter 6 changes, so a signal is transmitted from the impedance meter 6 to the alarm device 7, which issues an alarm.
この時点ではまだガス配管内にかなりガスが残っている
ので、すぐにボンベを開ければ、製品が不良となる危険
が減少する。At this point, there is still quite a bit of gas left in the gas pipe, so opening the cylinder immediately will reduce the risk of a defective product.
また減圧弁１０の出流れの際も二次側圧力検出部１６か
らインピーダンスメータ６へ伝わる音響インピーダンス
が変化するので、インピーダンスメータ６から警報装置
７に信号が伝わシ、警報装置７からの信号によシ三方弁
１１を切シ換えて、ガスを逆止弁１２を介して排気系１
４へ導くことができる。Also, when the flow is out from the pressure reducing valve 10, the acoustic impedance transmitted from the secondary side pressure detection unit 16 to the impedance meter 6 changes, so a signal is transmitted from the impedance meter 6 to the alarm device 7, and the signal from the alarm device 7 changes. The three-way valve 11 is then switched, and the gas is passed through the check valve 12 to the exhaust system 1.
It can lead to 4.
以上のような本発明の圧力検出装置をガス配管の減圧弁
の一次側と二次側に設け、警報装置と連動させることに
よシ、減圧弁の出流れ及びボンベの開は忘れを検出でき
、人身はもちろん製品をも安全に保てるという効果があ
る。By installing the pressure detection device of the present invention as described above on the primary and secondary sides of the pressure reducing valve of the gas pipe and linking it with an alarm device, it is possible to detect the outflow of the pressure reducing valve and the forgetting to open a cylinder. This has the effect of keeping not only people but also products safe.
第１図は本発明におけるガス圧力変動検出部の概念図、
第２図は本発明の安全装置を組み込んだがス配管図、第
３図は従来技術によるガス配管図である。
１・・・発振側振動子、２・・・共振側振動子、３・・
・振動子支持台、４・・・配管、５・・・発振器、６・
・・インピーダンスメータ、７・・・警報装置、８・・
・がスデンベ、９・・・緊急しゃ新井、１０・・・減圧
弁、１１・・・三方弁、１２・・・逆止弁、１３・・・
装置側配管系、１４・・・排気側配管系、１５・・・圧
力スイッチ、１６・・・ガス圧力変動検出部。FIG. 1 is a conceptual diagram of the gas pressure fluctuation detection section in the present invention,
FIG. 2 is a gas piping diagram incorporating the safety device of the present invention, and FIG. 3 is a gas piping diagram according to the prior art. 1... Oscillation side vibrator, 2... Resonance side vibrator, 3...
- Vibrator support stand, 4... Piping, 5... Oscillator, 6.
... Impedance meter, 7... Alarm device, 8...
- Sudenbe, 9... Emergency Arai, 10... Pressure reducing valve, 11... Three-way valve, 12... Check valve, 13...
Apparatus side piping system, 14... Exhaust side piping system, 15... Pressure switch, 16... Gas pressure fluctuation detection section.
Claims (1)
に設け、一方の振動子に発振器を接続し、他方の振動子
に音響インピーダンスを測定しうるインピーダンスメー
タを接続したことを特徴とするガス配管用圧力検出装置
。(1) The same ultrasonic vibrator is installed facing each other in the gas piping, an oscillator is connected to one vibrator, and an impedance meter capable of measuring acoustic impedance is connected to the other vibrator. Pressure detection device for gas piping.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60135517A JPS61294325A (en) | 1985-06-21 | 1985-06-21 | Detector for pressure for gas piping |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60135517A JPS61294325A (en) | 1985-06-21 | 1985-06-21 | Detector for pressure for gas piping |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61294325A true JPS61294325A (en) | 1986-12-25 |
Family
ID=15153613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60135517A Pending JPS61294325A (en) | 1985-06-21 | 1985-06-21 | Detector for pressure for gas piping |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61294325A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0566172A (en) * | 1991-06-25 | 1993-03-19 | Hitachi Ltd | Method and device for detecting leakage acoustically |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498438U (en) * | 1977-12-22 | 1979-07-11 | ||
| JPS56154358U (en) * | 1980-04-18 | 1981-11-18 | ||
| JPS5763049U (en) * | 1980-09-29 | 1982-04-14 |
-
1985
- 1985-06-21 JP JP60135517A patent/JPS61294325A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5498438U (en) * | 1977-12-22 | 1979-07-11 | ||
| JPS56154358U (en) * | 1980-04-18 | 1981-11-18 | ||
| JPS5763049U (en) * | 1980-09-29 | 1982-04-14 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0566172A (en) * | 1991-06-25 | 1993-03-19 | Hitachi Ltd | Method and device for detecting leakage acoustically |
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