JPS61294267A - O ring - Google Patents

Abstract

PURPOSE:To permit use at a high temperature state, by covering a metal pipe provided with a cooling fluid entering port and a cooling fluid discharge port by a resin covering layer. CONSTITUTION:A metal pipe formed into a ring-shape has its circumference covered by a resin covering layer 2 composed of fluoro resin. The metal pipe 1 is also coupled with a cooling fluid entering port 3 and a cooling fluid dis charge port 4, which are introduced into an outside passing through the resin covering layer 2. Heat transferred to the resin covering layer is quickly absorbed by supplying cooling fluid such as water into the metal pipe in an O ring, where by heat resistance of the resin covering layer is greatly improved so that the O ring is used at a high temperature state.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to improvements in O-rings used under high-temperature conditions, and particularly to an O-ring with a cooling function.

[Technical background of the invention and its problems]

Conventionally, the sealing effect of an O-ring has been utilized for vacuum maintenance in vacuum equipment or as a sealing material for lubricating oil on a rotating shaft. The materials of O-rings that are used for these purposes are classified into metals, resins, synthetic resins, etc. No problems have been caused by conventional methods of use tailored to these materials.

Incidentally, the recent demand for expansion into various fields in the semiconductor industry shows no signs of stopping, and new materials and special technologies are required. Special vacuum equipment is widely used in the semiconductor industry, especially in semiconductor manufacturing equipment, and there are many O-ring seals for vacuum maintenance. Among them, 500 to 90
In a reduced-pressure vapor phase growth apparatus that forms a thin film by causing a reaction under a high ["C] atmosphere, the reactor is made of quartz glass, so using a metal O-ring is difficult due to the mechanical problems of quartz glass. This is difficult due to its strength.Therefore, resin-based or synthetic resin-based O-rings are used.

However, demands for larger diameter semiconductor substrates and automation are promoting the increase in the size of semiconductor manufacturing equipment, and with the increase in the size of these equipment, the thermal load applied to O-rings is also increasing.

The resistance of such an O-ring to heat load is low due to heat accumulation, which is a characteristic of resin-based O-rings. For example, in order to use an O-ring with a permanent compressive strain rate of 30[%] or less, a fluororesin O-ring must be used at 150['C].
Within 5 hours.

In a reduced pressure vapor phase growth apparatus as shown in FIG.
00 ['C] When the distance X from the heating element 11 to the O-ring 18 is about 50 [α], the temperature of the O-ring seal part of the quartz reaction 'rg13 with an outer diameter of 200 [aaφ] is 240 ['C].
This is because the reaction tube 13 is kept warm by the heat insulating material 12, which requires a soaking zone of 80 [13 or more] for the furnace body, so thermal energy is also transferred to the sealing part. Therefore, natural cooling is insufficient, and the resin O-ring 18 is thermally deformed and becomes permanently compressive strain due to the differential pressure caused by the vacuum, making it unsuitable for use as a vacuum seal. One metal support plate 14 or door 7 for the quartz reactor 13 which is the main part
By cooling the lunge 15 with water, etc., indirectly
The ring 18 was being cooled.

In addition, in FIG. 5, 16 is a door, 17 is a gas introduction pipe, and 19.
19' is a water cooling pipe, 20 is a vacuum pipe, and 28 is a resin O-ring.

However, even when using indirect cooling as described above,
The sealing effect between the quartz reactor 13 and the metal support plate 14 described above is continuous for about 50 hours. For this reason, the resin-based O-ring 18 cannot withstand the 150 to 200-hour cleaning cycle of the quartz reactor 13, and the O-ring 18 has problems such as damaging the vacuum seal when used for a long time. Ta.

[Purpose of the invention]

The present invention was made in consideration of the above circumstances, and its purpose is to improve the heat resistance of resin or synthetic resin O-ring materials and to create O-rings that can be used in high temperature conditions. It is about providing.

(Summary of the Invention) The gist of the present invention is that the O-ring itself is provided with a cooling mechanism so that it can withstand use at high temperatures.

That is, the present invention provides an O-ring used under high temperature conditions, which includes a ring-shaped metal pipe provided with an inlet and an outlet for cooling fluid, and a resin coating that covers this metal pipe and acts as a sealing part. It is arranged so that a layer is provided.

〔Effect of the invention〕

According to the present invention, by flowing a cooling fluid such as water through the metal pipe in the O-ring, the heat transmitted to the resin coating layer is quickly absorbed. Therefore, the heat resistance of the resin coating layer that functions as a sealing portion is significantly improved, and it becomes possible to use the resin coating layer satisfactorily even in high-temperature conditions.

[Embodiments of the invention]

Hereinafter, details of the present invention will be explained with reference to illustrated embodiments.

FIG. 1 is a perspective view showing a schematic structure of an O-ring according to an embodiment of the present invention, and FIG. 2 is a sectional view taken along arrow PP in FIG. In the figure, 1 is a metal pipe, and this metal pipe 1 is formed into a ring shape.

The outer periphery of the metal pipe 1 is coated with a resin coating H made of fluororesin.
2 is coated. Further, an inlet 03 and an outlet 4 for cooling fluid are connected to the metal pipe 1, and these inlet 3 and outlet 4 are coated with resin. ! 2 and is led out to the outside.

Note that the O-ring having the above structure can be formed in the following manner. First, a stainless steel pipe 1 having an outer diameter of 6 [s+] and an inner diameter of 5 L+m and equipped with an inlet 3 and an outlet 4 for cooling fluid is installed in the center of a 9 [Mφ] O-ring forming mold. After that, a fluororesin may be injected into the mold and the resin may be dried.

The heat resistance of the O-ring thus formed was tested and the results shown in Figure 3 below were obtained. Here, as for the test conditions, the example O-ring formed as shown in Fig. 1 (curve A in the figure) and the conventional fluororesin O-ring (curved opening in the figure) were tested at a temperature of 200["C] It was installed in a temperature atmosphere, and the compression set rate was measured at this time.In addition, cooling water was flowed through the pipe 1 of the example O-ring 10 at a rate of 50 [] per minute to cool the resin coating 12. It can be seen from FIG. 3 that the O-ring 10 of this embodiment has a higher compression set than the conventional O-ring 18.

Further, as a result of using the O-ring 10 according to this embodiment for vacuum sealing between the quartz reaction tube 13 and the door 7 flange 15 of the reduced pressure vapor phase growth apparatus shown in FIG. It withstood more than 300 hours of cleaning cycles, no increase in compression set, and was able to be vacuum-sealed again. This means that even though point A, which is the O-ring seal part of the quartz reaction tube 13, reaches a high temperature of 240 ["C] due to heat conduction or radiation from the quartz furnace heater 11, the O-ring 10 Cooling water in cooling pipe 1 is O
This is the result of actively removing heat from the resin coating layer 2 by water cooling from inside the ring. Furthermore, since the door flange 15 and the support flange 14 are cooled by the water-cooled pipe 19, the energy that was conventionally stored in the O-ring is transferred to the O-ring 10.
Inside cooling stainless steel pipe 1 and support flange 14
This is because it is actively absorbed from point B where it contacts the door 7 flange 15.

In this way, according to this embodiment, when manufacturing a fluororesin O-ring, the metal pipe 1 is replaced with the fluororesin 2 which is the base material.
By embedding the heating element in the heating element, the heat energy generated from the heating element is removed by heat conduction to the cooling pipe 1 of the O-ring 10 without accumulating heat. For this reason, it becomes possible to reduce the increase in thermal energy due to compression set, which is a characteristic of resin systems, and it can be sufficiently used in reduced pressure vapor phase growth apparatuses and the like.

Note that the present invention is not limited to the embodiments described above. In the above example, for an O-ring with an inner diameter of 9 [m],
．． The ratio of the cross-sectional area of 44 is the outer diameter 6 [asm] and the inner diameter 5 [jw
I mentioned an example in which a cooling metal pipe was embedded.
The ratio of the cross-sectional area of the pipe to the cross-sectional area of the O-ring can be changed within a range that does not impair the elasticity, which is a property of the resin-based O-ring, and is preferably approximately 90% or less. In addition, it is also possible to use silicone resin or other resin in place of the fluororesin that is the base material. In addition, the metal to be embedded in the base material is not limited to stainless steel, but any material with excellent thermal conductivity can be used.
It goes without saying that the pipe may be made of gold or silver, but may also be made of copper, aluminum, or an alloy. Furthermore, in order to increase the mechanical strength, it is also possible to change the metal pipe from a circular shape to a square or ellipse shape. In addition, various modifications can be made without departing from the gist of the present invention.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a schematic structure of an O-ring according to an embodiment of the present invention, and FIG. 2 is a view taken in the direction of arrow P in FIG. - A diagram showing the P cross section, Figure 3 shows the 0 ring at 200['C]
Figure 4 is a characteristic diagram showing the compression set when tested in a temperature atmosphere of The cross-sectional view shown in FIG. 5 is a cross-sectional view showing the structure of a reduced pressure vapor phase growth apparatus, and is for explaining the conventional problems. DESCRIPTION OF SYMBOLS 1... Metal pipe, 2... Resin coating layer, 3... Inflow port, 4... Outlet port, 10... O-ring with metal pipe (Example 0-ring), 11... Heater , 12...
Heat insulation cover, 13...Quartz reaction tube, 14...Support flange, 15...Door 7 lange, 16...Door, 17...Gas introduction tube, 18.28...Conventional O-ring , 19... Water cooling pipe, 20... Cooling pipe for 0 ring, Applicant's representative Patent attorney Takehiko Suzue Figure 3 Figure 4

Claims (3)

[Claims] (1) In an O-ring used under high temperature conditions, a metal pipe formed in a ring shape and provided with an inlet and an outlet for cooling fluid, and a resin coating layer provided to cover this metal pipe. O characterized by comprising:
ring. (2) The O-ring according to claim 1, wherein a fluororesin or a silicone resin is used as the resin coating layer. (3) The O-ring according to claim 1, wherein the cross-sectional area of the metal pipe is 90% or less of the entire cross-sectional area including the resin coating layer.