JPS6128926B2 - - Google Patents
Info
- Publication number
- JPS6128926B2 JPS6128926B2 JP55121555A JP12155580A JPS6128926B2 JP S6128926 B2 JPS6128926 B2 JP S6128926B2 JP 55121555 A JP55121555 A JP 55121555A JP 12155580 A JP12155580 A JP 12155580A JP S6128926 B2 JPS6128926 B2 JP S6128926B2
- Authority
- JP
- Japan
- Prior art keywords
- pellet
- infrared
- infrared rays
- window material
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 3
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000005083 Zinc sulfide Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- POIUWJQBRNEFGX-XAMSXPGMSA-N cathelicidin Chemical compound C([C@@H](C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CO)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H]([C@@H](C)CC)C(=O)NCC(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](CCC(N)=O)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)CC)C(=O)N[C@@H](CCCCN)C(=O)N[C@@H](CC(O)=O)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H](CC(N)=O)C(=O)N[C@@H](CC(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1[C@@H](CCC1)C(=O)N[C@@H](CCCNC(N)=N)C(=O)N[C@@H]([C@@H](C)O)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](CO)C(O)=O)NC(=O)[C@H](CC=1C=CC=CC=1)NC(=O)[C@H](CC(O)=O)NC(=O)CNC(=O)[C@H](CC(C)C)NC(=O)[C@@H](N)CC(C)C)C1=CC=CC=C1 POIUWJQBRNEFGX-XAMSXPGMSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0801—Means for wavelength selection or discrimination
- G01J5/0802—Optical filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0875—Windows; Arrangements for fastening thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
- G01J5/0025—Living bodies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Description
【発明の詳細な説明】
本発明は波長7〜16μmの赤外線、例えば人体
から放射れる波長7〜15μmの赤外線を検出する
赤外線検出器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an infrared detector that detects infrared rays with a wavelength of 7 to 16 μm, for example, infrared rays with a wavelength of 7 to 15 μm emitted from a human body.
第1図は従来のこの種検出器を示し、その構造
は表、裏面電極1,2を有し、入射赤外線変化量
に応じた電荷を発生する焦電体ペレツト3を金属
性支持台4上面に導電性接着剤5にて接着してい
る。そして、上記ペレツト3は支持台4と共に収
納体6内に収納され、且つ斯る収納体6において
上記ペレツト3の表面電極1上方には赤外線透過
用窓材7が設けられている。更に、斯る検出器で
は、その検出赤外線の波長領域が人体から放射さ
れる赤外線の波長領域7〜15μmを含む7〜16
μmの範囲となる様に、上記窓材7下面には波長
7〜16μmの赤外線を透過せしめる赤外線フイル
タ8が形成されている。従つて、例えば人体から
の赤外線を検出する場合において、自然光及び室
内照明光等に含まれる波長7μm以下の赤外線に
よる雑音を除去でき、信頼性の高い赤外線検出器
を提供できる。 FIG. 1 shows a conventional detector of this type, which has a structure having front and back electrodes 1 and 2, and a pyroelectric pellet 3 that generates a charge according to the amount of change in incident infrared rays is placed on the upper surface of a metal support 4. It is adhered to with a conductive adhesive 5. The pellet 3 is housed together with the support base 4 in a storage body 6, and in the storage body 6, an infrared transmitting window material 7 is provided above the surface electrode 1 of the pellet 3. Furthermore, in such a detector, the wavelength range of detected infrared rays is 7 to 16 μm, which includes the wavelength range of 7 to 15 μm of infrared rays emitted from the human body.
An infrared filter 8 is formed on the lower surface of the window material 7 to transmit infrared rays having a wavelength of 7 to 16 μm. Therefore, when detecting infrared rays from a human body, for example, noise caused by infrared rays with a wavelength of 7 μm or less contained in natural light, indoor lighting, etc. can be removed, and a highly reliable infrared detector can be provided.
処で、従来では、上記フイルタ8を形成する
に、硫化亜鉛及びテルル等の屈折率の異なる材料
を多層に蒸着しなければならず、高度な膜厚制御
技術と多くの工数を要するためコスト高などを招
いていた。 Conventionally, in order to form the filter 8, materials with different refractive indexes such as zinc sulfide and tellurium must be deposited in multiple layers, which requires advanced film thickness control technology and a large number of man-hours, resulting in high costs. etc. were invited.
本発明は斯る点に鑑みてなされたもので、以下
本発明実施例赤外線検出器を第2図に基づいて詳
述する。 The present invention has been made in view of these points, and an infrared detector according to an embodiment of the present invention will be described in detail below with reference to FIG.
9はタンタル酸リチウム(LiTaO3)結晶等の焦
電材料から成り入射赤外線変化量に応じた信号を
出力する焦電体ペレツトで、該ペレツトの表裏面
にはニクロム(Ni―Cr)から成る表、裏面電極
10,11が形成されている。12は銅、アルミ
ニウム又は燐青銅等の金属から成り上記ペレツト
9を支持する支持台で、該支持台と上記ペレツト
9の裏面電極11との間には銀ペーストから成る
導電性接着剤13が介在されている。14は上記
支持台12を固定する金属性基台、15及び16
は夫々該基台に絶縁された状態及び直接に植設さ
れた第1、第2外部端子で、第1外部端子15は
金線17を介して表面電極10に電気的に連なる
と共に、第2外部端子16は支持台12及び導電
性接着剤13を介して裏面電極11に電気的に連
なり、従つて第1、第2外部端子15,16から
上記ペレツト9で発生した電荷による信号が外部
へ導出される。18は上記基台14と共に上記ペ
レツト9を収納するための収納体19を構成する
金属性キヤツプ、20は上記ペレツト9の表面電
極10側に赤外線を入射せるめるべく上記ペレツ
ト9上方のキヤツプ18に穿設された開口、21
は該開口を閉塞する赤外線透過用窓材で、該窓材
は不純物をドープしないシリコン単結晶板で形成
されている。 9 is a pyroelectric pellet made of a pyroelectric material such as lithium tantalate (LiTaO 3 ) crystal, which outputs a signal according to the amount of change in incident infrared rays; the front and back surfaces of the pellet are made of nichrome (Ni-Cr). , back electrodes 10 and 11 are formed. Reference numeral 12 denotes a support base made of a metal such as copper, aluminum, or phosphor bronze, and supporting the pellet 9. A conductive adhesive 13 made of silver paste is interposed between the support base and the back electrode 11 of the pellet 9. has been done. 14 is a metal base for fixing the support 12, 15 and 16
are first and second external terminals that are insulated and directly implanted in the base, respectively, and the first external terminal 15 is electrically connected to the surface electrode 10 via the gold wire 17, and the second The external terminal 16 is electrically connected to the back electrode 11 via the support base 12 and the conductive adhesive 13, so that signals from the charges generated in the pellet 9 are transmitted from the first and second external terminals 15 and 16 to the outside. derived. Reference numeral 18 denotes a metal cap that constitutes a container 19 for storing the pellet 9 together with the base 14, and 20 a metal cap 18 above the pellet 9 to allow infrared rays to enter the surface electrode 10 side of the pellet 9. an opening drilled in, 21
is an infrared transmitting window material that closes the opening, and the window material is formed of a silicon single crystal plate that is not doped with impurities.
22は上記窓材21下面に形成された赤外線フ
イルタで、本発明の特徴は斯るフイルタ22を厚
さ0.1μm以上、実用上0.5〜3μmのインジウ
ム・アンチモン(InSb)から成る単層蒸着膜と
したことにある。斯るフイルタ22は、電子ビー
ム蒸着法にて、約250℃に加熱された上記窓材2
1のシリコン板上にインジウム・アンチモンを速
度200Å/分で蒸着することにより形成される。
上記フイルタ22は人体から放射される波長7〜
15μmの赤外線を含む波長7〜16μmの赤外線を
透過せしめる半面、波長7μm以下の赤外線の透
過率を5%以下とし、従つて例えば人体からの赤
外線を検出する場合において、自然光及び室内照
明光等に含まれる波長7μm以下の赤外線による
雑音が除去できる。 Reference numeral 22 denotes an infrared filter formed on the lower surface of the window material 21, and the feature of the present invention is that the filter 22 is made of a single-layer vapor-deposited film made of indium antimony (InSb) with a thickness of 0.1 μm or more, practically 0.5 to 3 μm. It's what I did. The filter 22 is made of the window material 2 heated to about 250°C by electron beam evaporation.
It is formed by depositing indium and antimony on a silicon plate of No. 1 at a rate of 200 Å/min.
The filter 22 has wavelengths 7 to 7 emitted from the human body.
While it transmits infrared rays with a wavelength of 7 to 16 µm, including infrared rays of 15 µm, the transmittance of infrared rays with a wavelength of 7 µm or less is 5% or less. Noise caused by infrared rays with a wavelength of 7 μm or less can be removed.
以上の説明から明らかな如く、本発明によれば
例えば人体からの赤外線を精度よく検出すべく、
即ち自然光などに含まれる雑音となる赤外線を除
去すべく、赤外線透過用窓材の少なくとも片面に
おいて、インジウム・アンチモンから成る厚さ
0.1μm以上の単層構造の赤外線フイルタを用い
たから、従来の如き高度な膜厚制御技術を不要に
でき且つ上記フイルタの形成工数を著しく減少で
き、よつて安価な赤外線検出器を提供できる。 As is clear from the above description, according to the present invention, for example, in order to accurately detect infrared rays from a human body,
In other words, in order to eliminate infrared rays that become noise contained in natural light, at least one side of the infrared transmitting window material is made of indium and antimony.
Since an infrared filter having a single layer structure of 0.1 .mu.m or more is used, it is possible to eliminate the need for conventional advanced film thickness control techniques, and to significantly reduce the number of steps required to form the filter, thereby providing an inexpensive infrared detector.
第1図は従来の赤外線検出器の断面図、第2図
は本発明実施例赤外線検出器の断面図である。
9……焦電体ペレツト、19……収納体、20
……開口、21……赤外線透過用窓材、22…赤
外線フイルタ。
FIG. 1 is a sectional view of a conventional infrared detector, and FIG. 2 is a sectional view of an infrared detector according to an embodiment of the present invention. 9...Pyroelectric pellet, 19...Storage body, 20
...Opening, 21...Window material for infrared transmission, 22...Infrared filter.
Claims (1)
電体ペレツト、該ペレツトを収納する収納体、赤
外線を上記ペレツトへ入射せしめるべく上記収納
体に穿設された開口、該開口を閉塞する赤外線透
過用窓材、該窓材の少なくとも片面に積層された
フイルタを備え、 上記フイルタは上記窓材に蒸着形成された厚さ
0.1μm以上のインジウム・アンチモンからなる
単層であることを特徴とする赤外線検出器。[Scope of Claims] 1. A pyroelectric pellet that generates a charge according to the amount of change in incident infrared rays, a storage body that stores the pellet, an opening formed in the storage body to allow infrared rays to enter the pellet, and A window material for infrared transmission that closes an opening, and a filter laminated on at least one side of the window material, the filter having a thickness formed by vapor deposition on the window material.
An infrared detector characterized by a single layer made of indium and antimony with a thickness of 0.1 μm or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55121555A JPS5745421A (en) | 1980-09-01 | 1980-09-01 | Infrared ray detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55121555A JPS5745421A (en) | 1980-09-01 | 1980-09-01 | Infrared ray detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5745421A JPS5745421A (en) | 1982-03-15 |
JPS6128926B2 true JPS6128926B2 (en) | 1986-07-03 |
Family
ID=14814134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55121555A Granted JPS5745421A (en) | 1980-09-01 | 1980-09-01 | Infrared ray detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5745421A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0422277Y2 (en) * | 1985-07-22 | 1992-05-21 | ||
JPS62119633U (en) * | 1986-01-22 | 1987-07-29 | ||
JPH0617820B2 (en) * | 1986-02-25 | 1994-03-09 | 松下電工株式会社 | Heat ray detector |
-
1980
- 1980-09-01 JP JP55121555A patent/JPS5745421A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5745421A (en) | 1982-03-15 |
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