JPS6128547Y2 - - Google Patents
Info
- Publication number
- JPS6128547Y2 JPS6128547Y2 JP2427181U JP2427181U JPS6128547Y2 JP S6128547 Y2 JPS6128547 Y2 JP S6128547Y2 JP 2427181 U JP2427181 U JP 2427181U JP 2427181 U JP2427181 U JP 2427181U JP S6128547 Y2 JPS6128547 Y2 JP S6128547Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- shaft
- housing
- bellows
- movable core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003566 sealing material Substances 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 9
- 238000004891 communication Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000000696 magnetic material Substances 0.000 description 8
- 238000003825 pressing Methods 0.000 description 4
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 239000013013 elastic material Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
Landscapes
- Details Of Valves (AREA)
- Magnetically Actuated Valves (AREA)
Description
【考案の詳細な説明】
本考案は、比例流量制御弁に係り、特にハウジ
ング内に軸方向に移動自在に設けられて電磁コイ
ルへの通電により原位置から一方向へ移動する可
動コアと、この可動コアの軸心に設けたシヤフト
と、このシヤフトに取付けられた前記可動コアの
移動に従い常閉又は常開原位置から反対位置方向
へ移動めしめられる弁体と、前記弁体を少くとも
含む可動要素を常閉又は常開位置方向へ付勢する
スプリングを備えて前記電磁コイルへの電流付与
値に応じて前記弁体を通る流体の流量を制御する
ようにした比例式流量制御弁の改良に関する。[Detailed Description of the Invention] The present invention relates to a proportional flow rate control valve, and in particular includes a movable core that is provided in a housing so as to be movable in the axial direction and that moves in one direction from its original position when an electromagnetic coil is energized. a shaft provided on the axis of a movable core, a valve body that is moved from a normally closed or normally open original position to an opposite position in accordance with the movement of the movable core attached to the shaft, and a movable body that includes at least the valve body. The present invention relates to an improvement in a proportional flow rate control valve that includes a spring that biases an element toward a normally closed or normally open position and controls the flow rate of fluid passing through the valve body in accordance with the value of current applied to the electromagnetic coil. .
同一の出願人による出願に係る特願昭55−
043214号に開示された上記形式の流量制御弁にお
いては、電流値と流体流量のリニアリテイーを改
善するためにポペツト弁とハウジングの間にベロ
ーズを配置し、このベローズ内の流体室と、弁座
の他側とを連通孔により連通させている。この場
合ベローズ端のフランジは、第４図に示す如く、
一般的にシールパツキングとして常用されるＯリ
ング３８によりハウジング４０に気密的に固定さ
れていた。しかしながら内燃機関の吸気系の制御
弁特にEGR制御弁においては、ベローズはテフ
ロン等の耐熱性を有する弾性材料を用いる必要が
ある。しかしテフロンは比較的強度が弱く、クリ
ープ等の劣化が大きい材料であるため、ベローズ
の伸縮に伴ないハウジングに気密的に配置されて
いる。フランジ３５ｂの部分３５ｃが折曲される
ように付勢されてこの部分３５ｃに応力が集中し
長時間使用するとフランジ部が変形したり、破損
に至るという欠点があつた。 Patent applications filed in 1982 by the same applicant
In the above type of flow control valve disclosed in No. 043214, a bellows is disposed between the poppet valve and the housing in order to improve the linearity of the current value and the fluid flow rate, and the fluid chamber in the bellows is connected to the valve seat. It communicates with the other side through a communication hole. In this case, the flange at the end of the bellows is as shown in Figure 4.
It was hermetically fixed to the housing 40 by an O-ring 38, which is generally used as a seal packing. However, in control valves for intake systems of internal combustion engines, particularly EGR control valves, the bellows must be made of a heat-resistant elastic material such as Teflon. However, since Teflon is a material that has relatively low strength and is subject to significant deterioration such as creep, the bellows is disposed airtight in the housing as the bellows expands and contracts. The portion 35c of the flange 35b is biased to be bent, stress is concentrated on this portion 35c, and when used for a long period of time, the flange portion may be deformed or damaged.
本考案は、ベローズの伸縮時にフランジの折曲
の程度を緩和して応力の集中を減少させることを
目的とする。 The object of the present invention is to reduce the concentration of stress by reducing the degree of bending of the flange when the bellows expands and contracts.
本考案は、ベローズの一端、例えば電磁コイル
側端部のフランジ外周を断面コの字形の弾性シー
ル材を介してハウジング内に気密に配置するもの
である。 In the present invention, one end of the bellows, for example, the outer periphery of the flange at the end on the side of the electromagnetic coil, is airtightly disposed within the housing via an elastic sealing material having a U-shaped cross section.
以下添付図面に示した実施例を参照して本考案
を説明する。第１図に示した比例式流量制御弁Ｖ
は、電磁モータ部Vaと、この電磁モータ部Vaの
作動に応答して作動する流量制御弁部Vbから成
る。 The present invention will be described below with reference to embodiments shown in the accompanying drawings. Proportional flow control valve V shown in Figure 1
consists of an electromagnetic motor section Va and a flow control valve section Vb that operates in response to the operation of the electromagnetic motor section Va.
電磁モータ部Vaは、磁性材料から成るカツプ
状のモータハウジング１０と、このモータハウジ
ング１０内に配設した電磁コイル１１、この電磁
コイル１１内に同心状に固定された筒状固定コア
１２と、電磁コイル１１の図中左側部に設けた段
付リング状ヨーク１３と、ヨーク１３および固定
コア１２と同軸状に延びるシヤフト１４と、シヤ
フト１４と軸方向一体的な可動コア１５とから成
る。ヨーク１３と固定コア１２との間には非磁性
材料から成るスリーブ１６が介装され、また固定
コア１２の右側には絶縁材料から成るプレート１
７が固着されている。 The electromagnetic motor section Va includes a cup-shaped motor housing 10 made of a magnetic material, an electromagnetic coil 11 disposed within the motor housing 10, a cylindrical fixed core 12 concentrically fixed within the electromagnetic coil 11, It consists of a stepped ring-shaped yoke 13 provided on the left side of the electromagnetic coil 11 in the figure, a shaft 14 extending coaxially with the yoke 13 and the fixed core 12, and a movable core 15 that is axially integral with the shaft 14. A sleeve 16 made of a non-magnetic material is interposed between the yoke 13 and the fixed core 12, and a plate 1 made of an insulating material is disposed on the right side of the fixed core 12.
7 is fixed.
電磁コイル１１は、ボビン１１Ａに巻回されて
固定コア１２およびスリーブ１６上に取付けられ
ている。固定コア１２は、磁性材料から成り、右
端内孔にはシヤフト１４を軸方向へ摺動自在に支
承する非磁性材料からなる軸受１８が同軸的に圧
入嵌入されている。また固定コア１２の左端部に
は、可動コア１５に向けて開口する環状の凹所１
２ｂが設けられている。ヨーク１６は、磁性材料
から成りモータハウジング１０とバルブハウジン
グ１９の間にネジ２９により気密的に固定されて
いる。またヨーク１３の左端内孔には、シヤフト
１４を軸方向へ摺動自在に支承する非磁性材料か
ら成る軸受２０が同軸状に圧入嵌合されている。
可動コア１５は、磁性材料から成り、その右端に
は、固定コア１２に向けて突出し固定コア１２の
凹所１２ｂ内に遊嵌する環状の凸部１５ｂが同軸
的に設けられている。この可動コア１５はシヤフ
ト１４とともに非磁性材料からなるリテーナ２１
を介して係止するスプリング２２により図示原位
置に向けて付勢されており、スプリング２２の弾
揆力は固定コア１２に螺着したプラグ２３により
調整し得る。なおモータハウジング１０の右端
は、カバー部材２５が取付けられ更にその右端
は、エポキシ樹脂２６により充填されており、カ
バー部材２５からはリード線２７が延出してい
る。 The electromagnetic coil 11 is wound around a bobbin 11A and mounted on the fixed core 12 and the sleeve 16. The fixed core 12 is made of a magnetic material, and a bearing 18 made of a non-magnetic material that supports the shaft 14 slidably in the axial direction is coaxially press-fitted into the right-end inner hole. Further, at the left end of the fixed core 12, there is an annular recess 1 that opens toward the movable core 15.
2b is provided. The yoke 16 is made of a magnetic material and is airtightly fixed between the motor housing 10 and the valve housing 19 by screws 29. Further, a bearing 20 made of a non-magnetic material is coaxially press-fitted into the left end inner hole of the yoke 13 and supports the shaft 14 so as to be slidable in the axial direction.
The movable core 15 is made of a magnetic material, and is coaxially provided at its right end with an annular convex portion 15b that protrudes toward the fixed core 12 and fits loosely into the recess 12b of the fixed core 12. This movable core 15 is connected to the shaft 14 as well as a retainer 21 made of a non-magnetic material.
The elastic force of the spring 22 can be adjusted by a plug 23 screwed onto the fixed core 12. A cover member 25 is attached to the right end of the motor housing 10, and the right end is filled with epoxy resin 26, and a lead wire 27 extends from the cover member 25.
流量制御弁部Vbは、シール２８、およびヨー
ク１３を介してモータハウジング１０に固定され
るバルブハウジング１９と、このハウジング１９
の吸気ポート１９ｂと排気ポート１９ａとの間に
設けた弁座３０とシヤフト１４の先端に取付けら
れたデイスク弁３１と、このデイスク弁３１とヨ
ーク１３との間にシヤフト１４と同軸状に配置さ
れたベローズ３５とから主としてなる。弁座３１
は、バルブハウジング１９内に固定されている。
デイスク弁３１の外周部分には、弾性状のゴム３
２が被覆されており、弁座３０とデイスク弁３１
との当接は弾性的に受承される。デイスク弁３１
は、シヤフト１４上にフランジ３４ａを有するス
リーブ３４とともに嵌合されかつシヤフト１４の
左端をカシメることにより組付けられており、図
示原位置においては弁座３０に着座し、また可動
コア１５が右方へ移動したとき弁座３０から離れ
る。ポート１９ａは負圧源に接続されており、ま
たポート１９ｂは大気に連通している。 The flow control valve section Vb includes a valve housing 19 fixed to the motor housing 10 via a seal 28 and a yoke 13, and a valve housing 19 that is fixed to the motor housing 10 via a seal 28 and a yoke 13.
A valve seat 30 provided between the intake port 19b and the exhaust port 19a of It mainly consists of a bellows 35. Valve seat 31
is fixed within the valve housing 19.
An elastic rubber 3 is attached to the outer circumference of the disc valve 31.
2 is coated, the valve seat 30 and the disc valve 31
The contact with is accepted elastically. Disc valve 31
is fitted together with a sleeve 34 having a flange 34a on the shaft 14, and is assembled by caulking the left end of the shaft 14, and is seated on the valve seat 30 in the original position shown, and the movable core 15 is seated on the right side. When it moves toward the valve seat 30, it leaves the valve seat 30. Port 19a is connected to a negative pressure source, and port 19b communicates with the atmosphere.
デイスク弁３１の右側にはベローズ３５が配設
されている。ベローズ３５のヨーク１３側端部
は、フランジ３５ｂになつており、このフランジ
３５ｂの外周部は、バルブハウジング１９の内周
面に設けた凹溝３６内に嵌合された環状弾性シー
ル材３７によつて気密的に固定されている。従つ
て、フランジの伸縮時、フランジの伸縮が弾性シ
ール材３７をたわませるのでフランジの折曲は緩
和される。この環状弾性シール材３７は、第２図
に示すように断面が略コの字形の環状体であり、
両側面に設けられた突起３７ａによつて凹溝３６
内のリング３８およびヨーク１３を気密的に押圧
する。ベローズ３５の内部に形成された流体室
R0は、デイスク弁３１およびスリーブ３４の連
通孔３１ａを介して弁座３０の左側の排気ポート
１９ａへ連通するので、流体室R0には常に排気
ポート１９ａ内室R1の圧力が付与される。 A bellows 35 is arranged on the right side of the disc valve 31. The end of the bellows 35 on the yoke 13 side is a flange 35b, and the outer circumference of the flange 35b is connected to an annular elastic sealing material 37 fitted in a groove 36 provided on the inner circumferential surface of the valve housing 19. It is fixed airtight. Therefore, when the flange expands and contracts, the elastic sealing material 37 is bent by the expansion and contraction of the flange, so that the bending of the flange is relaxed. The annular elastic sealing material 37 is an annular body having a substantially U-shaped cross section as shown in FIG.
The groove 36 is formed by the projections 37a provided on both sides.
The inner ring 38 and yoke 13 are pressed airtight. Fluid chamber formed inside bellows 35
R0 communicates with the exhaust port 19a on the left side of the valve seat 30 through the communication hole 31a of the disc valve 31 and the sleeve 34, so the pressure of the internal chamber R1 of the exhaust port 19a is always applied to the fluid chamber R0. Ru.
次に本実施例の作動を説明する。本実施例にお
いて、電磁コイル１１が非励磁状態にあるときに
は、スプリング２２の弾揆力によりシヤフト１４
及び可動コア１５が図示原位置に付勢されてい
て、デイスク弁３１は弁座３０に着座している。
このため、ポート１９ａに連通する室R1とポー
ト１９ｂに連通する室R2との連通は遮断され、
室R2から室R1にエアは流れない。ところで、こ
のときには、室R1内の負圧が流体室R0にも付与
されていて、デイスク弁３１に作用する両室
R1，R2間の差圧による左方への押圧力はベロー
ズ３５に作用する両室R0，R2間の差圧による右
方への押圧力によつて略相殺されている。このた
め、デイスク弁３１が弁座３０に過度に押し付け
られることはなく、デイスク弁３１の耐久性は損
なわれない。 Next, the operation of this embodiment will be explained. In this embodiment, when the electromagnetic coil 11 is in a non-excited state, the shaft 14 is
The movable core 15 is biased to the original position shown, and the disk valve 31 is seated on the valve seat 30.
Therefore, communication between chamber R 1 communicating with port 19a and chamber R 2 communicating with port 19b is cut off.
Air does not flow from room R2 to room R1 . By the way, at this time, the negative pressure in the chamber R1 is also applied to the fluid chamber R0 , and both chambers acting on the disc valve 31
The leftward pressing force due to the pressure difference between R 1 and R 2 is substantially canceled out by the rightward pressing force due to the pressure difference between both chambers R 0 and R 2 acting on the bellows 35. Therefore, the disc valve 31 is not excessively pressed against the valve seat 30, and the durability of the disc valve 31 is not impaired.
また、直流電源からの電流を電磁コイル１１に
付力すれば、この電磁コイル１１に流れる電流に
より生じる磁束が、モータハウジング１０、固定
コア１２、可動コア１５及びヨーク１３を通り、
ヨーク１３の内周面と可動コア１５の左端部外周
面間、及び固定コア１２の凹所１２ｂと可動コア
１５の凸部１５ｂ間に前記電流の値に応じた吸引
力がそれぞれ発生する。しかして、このときも、
室R1内の圧力が流体室R0にも付与されていて、
ポペツト弁３１に作用する両室R1，R2間の差圧
による左方への押圧力はベローズ３５に作用する
両室R0，R2間の差圧による右方への押圧力によ
つて略相殺されており、シヤフト１４及び可動コ
ア１５にはスプリング２２の弾撥力のみが作用す
るこのためシヤフトおよび可動コアは前記電流の
値に応じて発生する吸引力に応じて略比例して右
動する。 Furthermore, when a current from a DC power source is applied to the electromagnetic coil 11, the magnetic flux generated by the current flowing through the electromagnetic coil 11 passes through the motor housing 10, fixed core 12, movable core 15, and yoke 13,
Attractive forces are generated between the inner circumferential surface of the yoke 13 and the outer circumferential surface of the left end of the movable core 15, and between the recess 12b of the fixed core 12 and the convex portion 15b of the movable core 15, depending on the value of the current. However, even at this time,
The pressure in chamber R1 is also applied to fluid chamber R0 ,
The leftward pressing force due to the differential pressure between the two chambers R 1 and R 2 acting on the poppet valve 31 is due to the rightward pressing force due to the differential pressure between the two chambers R 0 and R 2 acting on the bellows 35. Therefore, only the repulsive force of the spring 22 acts on the shaft 14 and the movable core 15. Therefore, the shaft and the movable core are approximately proportional to the attractive force generated according to the value of the current. Move to the right.
上述のようなシヤフト１４の往復動に伴ないベ
ローズ３５は伸縮運動を繰り返す。ベローズ３５
のフランジ３５ｂ外周は、上記弾性シール材３７
により保持されているため、伸縮運動の際一点に
応力を受けることがなく、それによる破損も防止
される。 As the shaft 14 reciprocates as described above, the bellows 35 repeatedly expands and contracts. bellows 35
The outer periphery of the flange 35b is covered with the elastic sealing material 37.
Since it is held by the holder, no stress is applied to one point during the expansion and contraction movement, and damage caused by this is also prevented.
なお、上記実施例では、シヤフト１４を電磁力
およびスプリング力にて往復動させているが、本
考案はこのような電磁式の流量制御弁のみに限定
されず、シヤフトをさらに回転ドライブ制御機構
により軸方向移動させる弁にも、さらに流体圧駆
動による制御弁にも、同様に応力用可能である。 In the above embodiment, the shaft 14 is reciprocated by electromagnetic force and spring force, but the present invention is not limited to such an electromagnetic flow control valve, and the shaft can be further moved by a rotary drive control mechanism. It is likewise possible to stress both axially displaced valves and also hydraulically driven control valves.
以上詳述したごとく、本考案は断面が略コの字
形で両側面に突起を有する弾性シール材３７にて
ベローズ３５のフランジ３５ｂ部分を保持したた
め、繰り返し荷重によるベローズ３５の破損が減
少し、またベローズのフランジ部の両側をゴムな
どの弾性体で保持しているため比較的フランジ部
のシール材３７との当接部の応力が小さくクリー
プなどが起こりにくいのでシールが確実に行える
という効果がある。またフランジ３５ｂ径の小さ
なベローズ３５の使用が可能となつた。 As detailed above, in the present invention, the flange 35b of the bellows 35 is held by the elastic sealing material 37, which has a substantially U-shaped cross section and protrusions on both sides, thereby reducing damage to the bellows 35 due to repeated loads. Since both sides of the flange portion of the bellows are held by an elastic material such as rubber, the stress at the contact portion of the flange portion with the sealing material 37 is relatively small and creep is less likely to occur, resulting in a reliable seal. . Furthermore, it has become possible to use a bellows 35 with a small diameter of the flange 35b.
現在までテフロンベローズは、プレス成型不可
能であり切出し加工により製作されるので、本考
案によりベローズの製造コストも大巾に低減され
る。 Until now, Teflon bellows cannot be press-molded and have been manufactured by cutting, so the present invention can greatly reduce the manufacturing cost of bellows.
第１図は、本考案に係る比例式流量制御弁の一
実施例を示す縦断側面図、第２図は、ベローズの
フランジを固定するための環状弾性リングの断面
図、第３図は、第１図の要部拡大図、第４図は従
来のベローズのフランジ固定法を示す第３図と同
様な図。
１０……モータハウジング、１１……電磁コイ
ル、１４……シヤフト、１５……可能コア、２２
……スプリング、３０……弁座、３１……デイス
ク弁、３５……ベローズ、３５ｂ……フランジ、
３７……弾性シール材。
FIG. 1 is a longitudinal sectional side view showing an embodiment of the proportional flow control valve according to the present invention, FIG. 2 is a sectional view of an annular elastic ring for fixing a flange of a bellows, and FIG. FIG. 4 is an enlarged view of the main part of FIG. 1, and FIG. 4 is a diagram similar to FIG. 3 showing a conventional bellows flange fixing method. 10... Motor housing, 11... Electromagnetic coil, 14... Shaft, 15... Possible core, 22
... Spring, 30 ... Valve seat, 31 ... Disc valve, 35 ... Bellows, 35b ... Flange,
37...Elastic sealing material.
Claims (1)
磁コイルの通電により原位置から一方向へ移動
する可動コアと、この可動コアの軸心に取付け
たシヤフトと、このシヤフトと連動する前記可
動コアの移動に従い常閉又は常開原位置から反
対位置方向へ移動せしめられる弁体と、前記弁
体を少くとも含む可動要素を常閉又は常開位置
方向へ付勢するスプリングを備え、前記電磁コ
イルへの電流付与値に応じて弁座を通る流体流
量を制御するようにした比例流量制御弁におい
て、シヤフトに同心状に配置したペローズの一
端をシヤフトに固定し、かつ該ベローズの他端
をなすフランジをハウジング内周面環状凹溝に
嵌合する断面略コの字形のリング状弾性シール
材を介して前記弁室に対して気密的にハウジン
グに固定し、ベローズ内に形成された流体室を
連通孔を介して前記弁座の対向する他端への連
通させた比例流量制御弁。 (2) 前記断面略コ字形のリング状弾性シール材
は、コの字形外側面に、前記ハウジング内周面
環状凹溝の側面に当接する突起を有する実用新
案登録請求の範囲第１項記載の弁。[Scope of Claim for Utility Model Registration] (1) A movable core that is provided in a housing so as to be movable in the axial direction and that moves in one direction from its original position when energized by an electromagnetic coil, and a shaft that is attached to the axis of this movable core. , a valve body that is moved from a normally closed or normally open original position to an opposite position in accordance with movement of the movable core that is interlocked with the shaft; and a movable element that includes at least the valve body is biased toward the normally closed or normally open position. In the proportional flow control valve, the proportional flow control valve is provided with a spring that controls the flow rate of fluid passing through the valve seat in accordance with the value of current applied to the electromagnetic coil, and one end of a bellows arranged concentrically with the shaft is fixed to the shaft; The flange constituting the other end of the bellows is airtightly fixed to the housing with respect to the valve chamber via a ring-shaped elastic sealing material having a substantially U-shaped cross section that fits into an annular groove on the inner peripheral surface of the housing. A proportional flow rate control valve in which a fluid chamber formed therein is communicated with the opposite end of the valve seat through a communication hole. (2) The ring-shaped elastic sealing material having a substantially U-shaped cross section has a protrusion on its U-shaped outer surface that comes into contact with the side surface of the annular groove on the inner peripheral surface of the housing, as set forth in claim 1. valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2427181U JPS6128547Y2 (en) | 1981-02-23 | 1981-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2427181U JPS6128547Y2 (en) | 1981-02-23 | 1981-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57137878U JPS57137878U (en) | 1982-08-28 |
| JPS6128547Y2 true JPS6128547Y2 (en) | 1986-08-23 |
Family
ID=29821995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2427181U Expired JPS6128547Y2 (en) | 1981-02-23 | 1981-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6128547Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002035126A1 (en) * | 2000-10-16 | 2002-05-02 | Nok Corporation | Solenoid valve |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6505812B1 (en) * | 2000-11-17 | 2003-01-14 | Mks Instruments, Inc. | Solenoid valve |
| JP3672820B2 (en) * | 2000-12-28 | 2005-07-20 | Ｓｍｃ株式会社 | solenoid valve |
-
1981
- 1981-02-23 JP JP2427181U patent/JPS6128547Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002035126A1 (en) * | 2000-10-16 | 2002-05-02 | Nok Corporation | Solenoid valve |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57137878U (en) | 1982-08-28 |
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