JPS6128234B2 - - Google Patents
Info
- Publication number
- JPS6128234B2 JPS6128234B2 JP51003494A JP349476A JPS6128234B2 JP S6128234 B2 JPS6128234 B2 JP S6128234B2 JP 51003494 A JP51003494 A JP 51003494A JP 349476 A JP349476 A JP 349476A JP S6128234 B2 JPS6128234 B2 JP S6128234B2
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- oxide film
- thickness
- surface acoustic
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 100
- 238000010897 surface acoustic wave method Methods 0.000 claims description 56
- 239000011787 zinc oxide Substances 0.000 claims description 50
- 239000010408 film Substances 0.000 claims description 46
- 239000000758 substrate Substances 0.000 claims description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 37
- 229910052710 silicon Inorganic materials 0.000 claims description 37
- 239000010703 silicon Substances 0.000 claims description 37
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 34
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 description 26
- 230000008878 coupling Effects 0.000 description 19
- 238000010168 coupling process Methods 0.000 description 19
- 238000005859 coupling reaction Methods 0.000 description 19
- 239000010453 quartz Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Pressure Sensors (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP349476A JPS5286784A (en) | 1976-01-13 | 1976-01-13 | Element for multilayer structure surface elastic waves |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP349476A JPS5286784A (en) | 1976-01-13 | 1976-01-13 | Element for multilayer structure surface elastic waves |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5286784A JPS5286784A (en) | 1977-07-19 |
| JPS6128234B2 true JPS6128234B2 (US06252093-20010626-C00008.png) | 1986-06-28 |
Family
ID=11558880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP349476A Granted JPS5286784A (en) | 1976-01-13 | 1976-01-13 | Element for multilayer structure surface elastic waves |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5286784A (US06252093-20010626-C00008.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0242292U (US06252093-20010626-C00008.png) * | 1988-09-19 | 1990-03-23 | ||
| JPH0592932U (ja) * | 1992-05-15 | 1993-12-17 | 株式会社田村電機製作所 | キーボードスイッチの支持構造 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3117747A1 (de) * | 1981-05-05 | 1982-11-25 | Kollsman System-Technik GmbH, 8000 München | Piezoelektrisches element |
-
1976
- 1976-01-13 JP JP349476A patent/JPS5286784A/ja active Granted
Non-Patent Citations (3)
| Title |
|---|
| APPLIED PHYSICS LETTERS=1974 * |
| APPLIED PHYSICS LETTERS=1975 * |
| JOURNAL OF APPLIED PHYSICS=1973 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0242292U (US06252093-20010626-C00008.png) * | 1988-09-19 | 1990-03-23 | ||
| JPH0592932U (ja) * | 1992-05-15 | 1993-12-17 | 株式会社田村電機製作所 | キーボードスイッチの支持構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5286784A (en) | 1977-07-19 |
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