JPS61278334A - Method and apparatus for irradiating electron beam to exhaust gas - Google Patents

Method and apparatus for irradiating electron beam to exhaust gas

Info

Publication number
JPS61278334A
JPS61278334A JP60119963A JP11996385A JPS61278334A JP S61278334 A JPS61278334 A JP S61278334A JP 60119963 A JP60119963 A JP 60119963A JP 11996385 A JP11996385 A JP 11996385A JP S61278334 A JPS61278334 A JP S61278334A
Authority
JP
Japan
Prior art keywords
electron beam
exhaust gas
duct
small hole
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60119963A
Other languages
Japanese (ja)
Inventor
Kanichi Ito
寛一 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP60119963A priority Critical patent/JPS61278334A/en
Publication of JPS61278334A publication Critical patent/JPS61278334A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

Abstract

PURPOSE:To perform the continuous dry treatment of an exhaust gas due to the irradiation of an electron beam without the loss of energy by irradiating the electron beam which is irradiated through a small hole provided to a pipe wall of a duct for transporting the exhaust gas to the exhaust gas while scanning it in the inside of the duct. CONSTITUTION:In a purifying apparatus for an exhaust gas generated by the combustion of fuel in a power plant or the like, after the electron beam irradiated from an electron beam accelerator 1' is irradiated in the specified direction through a small hole 6 provided to a duct 3' of the exhaust gas, it is scanned within a range of necessary scanning angle theta with a scanner 7 provided to the inside of the duct and irradiated to the exhaust gas. SO2 and NOX incorporated in the exhaust gas are made to dust or a mist with the irradiation of the electron beam and recovered with a dust collector or the like. Still more the inner pressure may be regulated with a suction pipe 9. Since a window foil is not necessarily stretched on an incident window by irradiating the electron beam through the small hole, the loss of energy is not caused and this apparatus is favorable in the industrial practice.

Description

【発明の詳細な説明】 環境汚染ことに大気汚染が世界的に深刻な社会問題とな
ってから久しい。多くの関係者の努力によつ、て、種々
の新しい排気浄化技術が開発され試みられてきたが、今
日面、完全に納得できる解決は得られていない。だが研
究は今も絶え間なく続けられており、着々と成果があが
っている。本発明もそのような努力の一環をなす研究の
成果として達成されたものである。
DETAILED DESCRIPTION OF THE INVENTION It has been a long time since environmental pollution, especially air pollution, became a serious social problem worldwide. Through the efforts of many people concerned, various new exhaust purification techniques have been developed and attempted, but to date, no completely satisfactory solution has been obtained. However, research continues unabated and results are steadily being produced. The present invention was achieved as a result of research that is part of such efforts.

大気汚染物質の発生源は、産業などの固定発生源と自動
車、飛行機などの移動発生源に分類され、また汚染物質
発生の原因となるものは燃料の燃焼、原材料の処理、化
学反応などである。本発明は主として工場や発電所で燃
料の燃焼によって発生する排ガスの浄化を目的としてい
る。排ガス中に含まれる汚染物質は、硫黄酸化物(SO
2,SO3人ばいじん、窒素酸化物(NOx)、有害物
質(C:a、Pb、(J2HCl 、 F  HF 、
S iF 、i その他)、ふんじんなどで2+ あるが、本発明では就中S02とNOxの除去?主眼と
している。これらはほとんど丁べての燃焼排ガス中に有
毒ガス成分として比較的多く含まれており、それぞれ、
除去が最も困難な汚染物質の一つである。SO2の除去
についてに比較的良い方法が多数開発されてはいるが、
水や特定の化学物質を多量に使う湿式法が多く、ために
多量の排水や大量の副生物を発生し、 それらの処理がまた困難な問題7生じるので、よりよい
方法の出現が待望されている。特に昨今、西独暑中心と
する欧州諸国で深刻な社会問題となっている酸性雨の原
因は、大気中に放出される多量のSO□であると考えら
れている。ま74NOxの除去はSO2の除去よりもさ
らに困難であり、これ乞除去する1こめの有利な工業的
方法は未だ確立されていない。
Sources of air pollutants are classified into fixed sources such as industry and mobile sources such as automobiles and airplanes, and sources of pollutants include fuel combustion, processing of raw materials, chemical reactions, etc. . The present invention is primarily aimed at purifying exhaust gas generated by combustion of fuel in factories and power plants. The pollutants contained in exhaust gas are sulfur oxides (SO
2, SO3 Human dust, nitrogen oxides (NOx), harmful substances (C: a, Pb, (J2HCl, F HF,
S iF , i and others), dung, etc. are 2+, but in the present invention, in particular, S02 and NOx are removed. The main focus is These are contained in relatively large amounts as toxic gas components in almost all combustion exhaust gas, and each
It is one of the most difficult pollutants to remove. Although many relatively good methods have been developed for removing SO2,
Many wet methods use large amounts of water and specific chemicals, which generate a large amount of wastewater and large amounts of byproducts, making their treatment difficult7, so the emergence of a better method is eagerly awaited. There is. It is thought that the cause of acid rain, which has become a serious social problem in European countries especially in recent years due to the heatwave in West Germany, is the large amount of SO□ released into the atmosphere. Removal of NOx is even more difficult than removal of SO2, and no advantageous industrial method for its removal has yet been established.

本発明者等は、線量率の高い電子線ヲSO2およヒN0
xyl含む排ガスに照射することによって、排ガス中に
有毒ガス成分として含まれているSO□およびN0xY
同時に固形物であるダストあるいはミストの形態に変化
させた後、集塵機などでこれらのダストあるいはミス)
Y回収する排ガスの浄化法を開発し、その技術について
の基本特許を含めた多(の特許を既に得ている。この方
法は乾式であり、副生物の量も少ないので、主として固
定発生源から発生する燃焼排ガスの浄化法として、将来
広く世界中に普及する可能性ンもつ最も有望な方法であ
る。この方法tより高度に改良して、世界に普及させる
ことが我々の目的であり、本発明もその一翼を担うもの
である。
The present inventors have discovered that electron beams with high dose rates can be used with SO2 and N0.
By irradiating the exhaust gas containing xyl, SO□ and NOxY contained in the exhaust gas as toxic gas components
At the same time, after changing the form to solid dust or mist, this dust or mist is removed using a dust collector, etc.
We have developed a method for purifying exhaust gas to be recovered, and have already obtained numerous patents, including basic patents for the technology.This method is dry and produces only a small amount of by-products, so it is mainly used to remove waste gas from stationary sources. This is the most promising method for purifying the combustion exhaust gas that is generated, and has the potential to be widely disseminated throughout the world in the future.Our purpose is to improve this method to a higher level and disseminate it worldwide. Inventions also play a role.

排ガスに電子線?照射して有毒ガス成分を除去する方法
において、従来採用されてきた電子線の照射方法は第2
図に示すような方法であった。すなわち、電子線加速機
1とスキャニング(走査)装置2とが同一真空で連通し
ている一体構造の電子線発生装置乞反応室の外部近傍に
配置し、該発生装置の照射窓Aからスキャニングされた
状態で放射される電子線5馨反応器の入射窓47通して
反応器内の排ガスに照射していた。排ガスは入射窓の近
傍乞通過する極く短時間だけしか電子線の照射7受ける
ことができないから、このように一定の広がりを持って
スキャニングされた電子線を照射する必要があるからで
ある。しかしながらこの方法では、ある程度の広さ?持
った入射窓7設けることが必要であるから、この入射窓
乞開放状態にしたま匁で長時間操業を続けることは困゛
難である。即ち反応器内部が負圧であれば入射窓から大
量の外気が流入してガス処理7妨げるし、正圧であれば
排ガスがダクトの外部に噴出し、不都合7生じるからで
ある。このため、従来の方法では、反応器の入射窓に薄
い金属製の箔が張られており、電子線はこの入射窓箔を
通して照射されていた。
Electron beam in exhaust gas? In the method of removing toxic gas components by irradiation, the conventionally adopted electron beam irradiation method is the second method.
The method was as shown in the figure. That is, an electron beam generator of an integrated structure in which an electron beam accelerator 1 and a scanning device 2 communicate with each other in the same vacuum is placed near the outside of a reaction chamber, and the electron beam is scanned from the irradiation window A of the generator. The exhaust gas inside the reactor was irradiated with the electron beam 5 through the entrance window 47 of the reactor. This is because the exhaust gas can only be irradiated with the electron beam 7 for a very short period of time when it passes near the entrance window, so it is necessary to irradiate the electron beam scanned with a constant spread. However, with this method, is there a certain amount of space? Since it is necessary to provide the entrance window 7 with the entrance window 7 open, it is difficult to continue operation for a long time with the entrance window open. That is, if the pressure inside the reactor is negative, a large amount of outside air will flow in through the entrance window, interfering with the gas treatment 7, and if the pressure is positive, the exhaust gas will blow out to the outside of the duct, causing problems 7. For this reason, in the conventional method, a thin metal foil was placed over the entrance window of the reactor, and the electron beam was irradiated through the entrance window foil.

然し電子線が窓箔乞通過する際には電子線のエネルギー
が大巾に減殺されると共に、このエネルギー損失が熱と
なって窓箔乞加熱するので相応の冷却が必要となる。こ
のエネルギー損失の低減と冷却設備の軽減のため窓箔は
できるだけ薄くしなければならず、通常0.05mm以
下のものが使用されている。一方、排ガスの性質上排ガ
スに接する窓箔は耐蝕性であることが必要とされ、例え
ばチタン合金のような耐蝕性合金箔が使用されている。
However, when the electron beam passes through the window foil, the energy of the electron beam is greatly reduced, and this energy loss turns into heat and heats up the window foil, so appropriate cooling is required. In order to reduce this energy loss and reduce the need for cooling equipment, the window foil must be made as thin as possible, and typically a foil of 0.05 mm or less is used. On the other hand, due to the nature of exhaust gas, the window foil that comes into contact with the exhaust gas must be corrosion resistant, and for example, corrosion resistant alloy foil such as titanium alloy is used.

窓箔の腐蝕は単にガス成分によるものだけではない。Corrosion of window foil is not only caused by gas components.

ガス中の異物や電子線照射によって生じた固体またはミ
スト状の生成物が窓箔に付着すると、この付着部分が、
通過する電子線によって局部加熱され、相乗効果的に腐
蝕が促進され窓箔は著しい損傷7受ける。このように、
窓箔は、腐蝕性ガスとの接触下、高温にさらされるとい
う厳しい環境条件の下で使用され、しかも前述の理由で
その厚さを極めて薄(せざる7得ないという制約がある
ため、操業の途中で破損し易く、このことが従来、運転
管理上の重要な問題となっていた。したがって、そのよ
うな入射窓の窓箔を使用することな(反応器内の排ガス
に電子線加速機することができれば、電子線の吸収によ
るエネルギー損失や、それによる発熱の冷却などの問題
も生じないので、当該分野において技術上の大きな貢献
となることは明白である。本発明は、まさにそのような
照射7行なうための方法と装置と乞提供するものである
When foreign matter in the gas or solid or mist-like products generated by electron beam irradiation adheres to the window foil, this adhered area becomes
The window foil is locally heated by the passing electron beam, synergistically promoting corrosion and causing significant damage 7 to the window foil. in this way,
Window foil is used under harsh environmental conditions such as contact with corrosive gases and exposure to high temperatures, and for the reasons mentioned above, it has to be extremely thin (7), making it difficult to operate. This has traditionally been an important problem in operational management.Therefore, such a window foil for the entrance window should not be used (if the exhaust gas in the reactor is not exposed to the electron beam accelerator). If it were possible to do so, there would be no problems such as energy loss due to absorption of electron beams or cooling of heat generated thereby, and it is clear that this would be a major technical contribution in the field. The present invention provides a method and apparatus for performing such irradiation.

本発明者は、次のような従来無い方式で照射を行なうこ
とにより、入射窓に窓箔を使用することなく排ガスへの
電子線照射ン連続的に行ない得ることを知見して本発明
乞完成した。すなわち、本発明の照射方法では、排ガス
輸送用ダクト(導管)の管壁の一部に小孔ヲウがち、該
小孔を通してダクトの外部から内部に向けて電子線を一
定方向に照射し、該小孔乞通過せしめた後電子線を一定
範囲の角度内でスキャニング(走査)しながら流動する
排ガスに電子線を照射することを特徴とする。
The present inventor completed the present invention by discovering that exhaust gas can be continuously irradiated with electron beams without using a window foil for the entrance window by performing irradiation using the following non-conventional method. did. That is, in the irradiation method of the present invention, a small hole is formed in a part of the pipe wall of the exhaust gas transport duct (conduit), and an electron beam is irradiated in a fixed direction from the outside to the inside of the duct through the small hole. It is characterized by irradiating the flowing exhaust gas with the electron beam while scanning the electron beam within a certain range of angles after passing through a small hole.

以下、第1図に言及しながら本発明の方法ビより具体的
に説明する。
Hereinafter, the method of the present invention will be explained in more detail with reference to FIG.

第1図は本発明の電子線照射方法の原理乞説明するだめ
の図であると共に、該方法ン実施するために使用できる
好ましい装置の一具体例の断面構造を示す図である。
FIG. 1 is a diagram which does not explain the principle of the electron beam irradiation method of the present invention, and also shows a cross-sectional structure of a specific example of a preferred apparatus that can be used to carry out the method.

本発明に従って電子線加速機1′から照射された電子線
5は、排ガスのダクト3′の一部に設けた小孔6(図示
例では直列に2ケ所)を通って一定方向に照射された後
、ダクト3′内に設けたスキャナー(走査器)7によシ
、”S”点を屈折点として、必要走査角θの範囲にスキ
ャニング(走査)される。この方法では、小孔6が反応
器の°入射窓に相当するが、従来の照射方法と違ってス
キャニングされる前の電子線?−一定方向通過させるだ
けでよいので、入射窓は通過する電子線束断面の直径よ
り幾分大きい直径を有する程度の極めて小さな孔であれ
ばよい。したがって、この入射窓に窓箔を張ることなく
開放状態で運転しても大きな支障乞来た丁ことにないが
、必要とあらば次のような構造とすることにより、予想
される不都合な問題?回避することかできる。すなわち
、ダクト3′内の排ガス圧力が外気圧よシ高い場合は、
図示のように小孔6の開口部に低圧室8を設け、該室か
ら吸気管9によって吸引し、吸引した排ガスはダクト3
′の上流側に戻すようにする。このように丁れば、低圧
室8内の圧力を外気圧より低(設定することができるの
で、排ガスの外気への漏洩?防ぐことができる。一方、
ダクト3′内の排ガス圧力が外気圧より低い場合ハ、・
小孔6よジ外気が排ガスダクト3′内に混入するが、排
ガスが外気に漏洩することはない。小孔の面積は一定方
向に進む電子線が通過できるだけの僅少な面積であれば
よいから、上記いずれの場合においても排ガスダクト3
′に混入する外気量は僅かであって、排ガス処理の効果
に及ぼす影響は無視できる。スキャナー7は、電子線が
小孔を通過する位置に極めて近い位置に屈折点Sが生じ
るように配置することが好ましい。スキャナーは装置の
主要部tダクトの外部に置き、電子線tスキャニングす
るため電子線に接近させることが必要な部分だけ?、耐
蝕性の部材で被覆してダクト内に挿入し、屈折点SYは
さんで図示のように配置することができる。ダクトの一
部tなし、走査角θをもって電子線の照射が行なわれる
部分は、反応器に相当する部分であり、完全にダクトと
一体化されたダクトそのものの一部であってもよいし、
図示のように、一部突出した外形を有するものとするこ
ともできる。突出した部分の外壁は図に示すように、屈
折点Si頂点とする中心角ヶの扇形の2本の直線部分に
それぞれ平行な断面形状を有するものとするのが合理的
であろう。
According to the present invention, the electron beam 5 irradiated from the electron beam accelerator 1' is irradiated in a fixed direction through small holes 6 (two in series in the illustrated example) provided in a part of the exhaust gas duct 3'. Thereafter, the light is scanned by a scanner 7 provided in the duct 3', using the "S" point as a refraction point, within the range of the required scanning angle θ. In this method, the small hole 6 corresponds to the entrance window of the reactor, but unlike the conventional irradiation method, the small hole 6 corresponds to the electron beam entrance window before being scanned. - Since it is only necessary to pass the electron beam in a certain direction, the entrance window may be an extremely small hole having a diameter somewhat larger than the diameter of the cross section of the electron beam beam passing through. Therefore, even if the entrance window is not covered with window foil and operated in an open state, there will not be any major hindrance, but if necessary, the following structure may be adopted to avoid the anticipated inconveniences. ? It is possible to avoid it. In other words, if the exhaust gas pressure inside the duct 3' is higher than the outside pressure,
As shown in the figure, a low pressure chamber 8 is provided at the opening of the small hole 6, and suction is carried out from the chamber through an intake pipe 9, and the sucked exhaust gas is passed through a duct 3.
′. By setting it in this way, the pressure inside the low pressure chamber 8 can be set lower than the outside pressure, so leakage of exhaust gas to the outside air can be prevented.On the other hand,
If the exhaust gas pressure inside the duct 3' is lower than the outside pressure, c.
Although outside air enters the exhaust gas duct 3' through the small hole 6, the exhaust gas does not leak into the outside air. The area of the small hole should be small enough to allow the electron beam traveling in a certain direction to pass through, so in any of the above cases, the exhaust gas duct 3
The amount of outside air mixed in with ' is so small that its influence on the effectiveness of exhaust gas treatment can be ignored. The scanner 7 is preferably arranged so that the refraction point S occurs very close to the position where the electron beam passes through the small hole. Is the scanner placed outside the duct of the main part of the device, and only the parts that need to be brought close to the electron beam for electron beam scanning? , it can be covered with a corrosion-resistant member, inserted into the duct, and placed across the bending point SY as shown in the figure. The part of the duct that is irradiated with the electron beam at the scanning angle θ is a part corresponding to the reactor, and may be a part of the duct itself that is completely integrated with the duct,
As shown in the figure, it may have a partially protruding outer shape. As shown in the figure, it would be reasonable to assume that the outer wall of the protruding portion has a cross-sectional shape that is parallel to two fan-shaped linear portions with a central angle that is the apex of the refraction point Si.

本発明の方法によれば、反応器入射窓に窓箔を張ること
なく、開放状態で排ガスに電子線を照射できるので、窓
箔が電子線音吸収することによるエネルギーの損失は皆
無であシ、それによる発熱を冷却するための冷却装置も
もちろん不要である。
According to the method of the present invention, it is possible to irradiate the exhaust gas with an electron beam in an open state without placing a window foil on the reactor entrance window, so there is no energy loss due to the window foil absorbing the electron beam sound. Of course, there is no need for a cooling device to cool down the generated heat.

本発明の装置は種々の工夫によって上記本発明方法の工
業的実施を可能とするものである。これら本発明の方法
および装置によって、電子線照射による排ガスの乾式連
続大量処理の実用化と普及は、ま丁ま丁身近なものにな
ったと言ってよいであろう。
The apparatus of the present invention enables industrial implementation of the method of the present invention by various means. It can be said that the method and apparatus of the present invention have brought practical use and widespread use of dry continuous large-scale treatment of exhaust gas by electron beam irradiation.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の電子線照射方法を実施するために使用
できる好ましい照射装置の断面構造を示す図である。 第2図は従来の電子線照射方法で一般に用いられていた
照射装置の断面構造乞示す図である。 図中の記号は次のものを表わす。 第1図 第2図 1′、1  ・・・電子線加速機 2 ・・・スキャニング装置 3 ・・・排ガスダクト 4 ・・・窓箔(入射窓) 5 ・・・電子線 6     ・・・小 孔 7     ・・・スキャナー 第1図 第2図 8     ・・・低圧室 9     ・・・吸気管 A ・・・照射窓 特許出願人  株式会社 荏 原 製 作 所(外5名
FIG. 1 is a diagram showing a cross-sectional structure of a preferable irradiation device that can be used to carry out the electron beam irradiation method of the present invention. FIG. 2 is a diagram showing a cross-sectional structure of an irradiation device commonly used in a conventional electron beam irradiation method. The symbols in the figure represent the following: Figure 1 Figure 2 1', 1...Electron beam accelerator 2...Scanning device 3...Exhaust gas duct 4...Window foil (incidence window) 5...Electron beam 6...Small Hole 7 ... Scanner Figure 1 Figure 2 8 ... Low pressure chamber 9 ... Intake pipe A ... Irradiation window Patent applicant Ebara Corporation (5 others)

Claims (4)

【特許請求の範囲】[Claims] (1)排ガス輸送用ダクトの管壁の一部に小孔を設け、
該小孔を通してダクトの外部から内部に向けて電子線を
一定方向に照射し、小孔を通過せしめた電子線を一定範
囲の角度内でスキャニングしながら排ガスに照射するこ
とを特徴とする排ガスに電子線上照射する方法。
(1) A small hole is provided in a part of the pipe wall of the exhaust gas transport duct,
An exhaust gas characterized in that an electron beam is irradiated in a certain direction from the outside to the inside of the duct through the small hole, and the exhaust gas is irradiated with the electron beam that has passed through the small hole while scanning it within a certain range of angles. A method of irradiating with electron beams.
(2)管壁の一部に電子線を一定方向に通過させるため
の小孔を有し、両開口端が排ガス輸送用ダクトと連結さ
れていて実質上前記ダクトの一部を構成している管体か
らなる電子線照射反応室、前記管体の外部かつ近傍に配
置され、発生する電子線が前記小孔を通つてダクト内部
に向つて一定方向に照射されるように設定された電子線
加速器および、前記小孔を通過した電子線が、前記反応
室内部の管壁に近い一点Sを屈折点として、必要走査角
θの範囲でスキャニングされるようにするためのスキャ
ナーからなることを特徴とする排ガスに電子線を照射す
る装置。
(2) A part of the tube wall has a small hole for passing the electron beam in a certain direction, and both open ends are connected to the exhaust gas transport duct and substantially constitute a part of the duct. An electron beam irradiation reaction chamber consisting of a tubular body, an electron beam placed outside and near the tubular body, and set so that the generated electron beam passes through the small hole and is irradiated in a fixed direction toward the inside of the duct. It is characterized by comprising an accelerator and a scanner for scanning the electron beam that has passed through the small hole within the required scanning angle θ with a point S near the tube wall inside the reaction chamber as a refraction point. A device that irradiates the exhaust gas with an electron beam.
(3)前記反応室の小孔部が、電子線の進行方向に間隔
をとつて同心的に配置された1対の小孔からなり、2つ
の小孔をそれぞれ含む2つの対向部材の中間は減圧され
た小空間をなす低圧室を形成するように構成されている
ことを特徴とする特許請求の範囲第2項に記載の装置。
(3) The small hole portion of the reaction chamber is composed of a pair of small holes arranged concentrically with an interval in the direction of propagation of the electron beam, and the middle of the two opposing members each containing the two small holes is 3. The device according to claim 2, wherein the device is configured to form a low-pressure chamber that is a small space with reduced pressure.
(4)前記低圧室の一部に連結された吸気管、および該
吸気管を通して低圧室内の気体を吸引するための吸引手
段を有し、前記吸気管の排出端は反応室または排ガス輸
送用ダクトの管壁の一部に連結されていることを特徴と
する、特許請求の範囲第3項に記載の装置。
(4) An intake pipe connected to a part of the low pressure chamber, and a suction means for sucking gas in the low pressure chamber through the intake pipe, and the discharge end of the intake pipe is connected to a reaction chamber or a duct for transporting exhaust gas. 4. Device according to claim 3, characterized in that it is connected to a part of the wall of a tube.
JP60119963A 1985-06-03 1985-06-03 Method and apparatus for irradiating electron beam to exhaust gas Pending JPS61278334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60119963A JPS61278334A (en) 1985-06-03 1985-06-03 Method and apparatus for irradiating electron beam to exhaust gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60119963A JPS61278334A (en) 1985-06-03 1985-06-03 Method and apparatus for irradiating electron beam to exhaust gas

Publications (1)

Publication Number Publication Date
JPS61278334A true JPS61278334A (en) 1986-12-09

Family

ID=14774532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60119963A Pending JPS61278334A (en) 1985-06-03 1985-06-03 Method and apparatus for irradiating electron beam to exhaust gas

Country Status (1)

Country Link
JP (1) JPS61278334A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211146A (en) * 1975-07-18 1977-01-27 Nippon Handa Kogyo Automatic soldering device
JPS61164627A (en) * 1985-01-16 1986-07-25 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method and apparatus for purifying sulfur and nitrogen-containing flue gas

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5211146A (en) * 1975-07-18 1977-01-27 Nippon Handa Kogyo Automatic soldering device
JPS61164627A (en) * 1985-01-16 1986-07-25 ライボルト‐ヘレーウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング Method and apparatus for purifying sulfur and nitrogen-containing flue gas

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