JPS6127659U - 平面研摩装置 - Google Patents

平面研摩装置

Info

Publication number
JPS6127659U
JPS6127659U JP1984111863U JP11186384U JPS6127659U JP S6127659 U JPS6127659 U JP S6127659U JP 1984111863 U JP1984111863 U JP 1984111863U JP 11186384 U JP11186384 U JP 11186384U JP S6127659 U JPS6127659 U JP S6127659U
Authority
JP
Japan
Prior art keywords
correction ring
surface polishing
polishing equipment
pressure plate
surface plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984111863U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0212042Y2 (enExample
Inventor
初雪 新井
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP1984111863U priority Critical patent/JPS6127659U/ja
Publication of JPS6127659U publication Critical patent/JPS6127659U/ja
Application granted granted Critical
Publication of JPH0212042Y2 publication Critical patent/JPH0212042Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP1984111863U 1984-07-24 1984-07-24 平面研摩装置 Granted JPS6127659U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984111863U JPS6127659U (ja) 1984-07-24 1984-07-24 平面研摩装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984111863U JPS6127659U (ja) 1984-07-24 1984-07-24 平面研摩装置

Publications (2)

Publication Number Publication Date
JPS6127659U true JPS6127659U (ja) 1986-02-19
JPH0212042Y2 JPH0212042Y2 (enExample) 1990-04-04

Family

ID=30670936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984111863U Granted JPS6127659U (ja) 1984-07-24 1984-07-24 平面研摩装置

Country Status (1)

Country Link
JP (1) JPS6127659U (enExample)

Also Published As

Publication number Publication date
JPH0212042Y2 (enExample) 1990-04-04

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