JPS6126162U - humidity sensor - Google Patents
humidity sensorInfo
- Publication number
- JPS6126162U JPS6126162U JP11070584U JP11070584U JPS6126162U JP S6126162 U JPS6126162 U JP S6126162U JP 11070584 U JP11070584 U JP 11070584U JP 11070584 U JP11070584 U JP 11070584U JP S6126162 U JPS6126162 U JP S6126162U
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- shaped electrodes
- comb
- outer periphery
- molding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は本考案の一実施例に係る湿度セン
サを示すもので第１図は平面図、第２図は第１図のＡ−
Ａ断面図、第３図は本考案に係る湿度センサを基板に取
付けた状態を示す正断面図、第４図および第５図は従来
例に係る湿度センサを示すもので第４図は平面図、第５
図は側面図である。
１・・・・・・感湿素子、２・・・・・・外周辺、３，
”４・・・・・・櫛形電極、５，６・・・・・・貫通孔
。1 and 2 show a humidity sensor according to an embodiment of the present invention. FIG. 1 is a plan view, and FIG. 2 is a
A sectional view, FIG. 3 is a front sectional view showing the state in which the humidity sensor according to the present invention is attached to a substrate, and FIGS. 4 and 5 show a humidity sensor according to the conventional example, and FIG. 4 is a plan view. , 5th
The figure is a side view. 1...Moisture sensing element, 2...Outer periphery, 3,
"4...Comb-shaped electrode, 5,6...Through hole.
Claims (1)
子の一方面に外周辺を残して形成した相対する櫛形電極
と、該櫛形電極それぞれに前記素子の他方面に連ねて形
成した貫通孔とを具備したことを特徴とする湿度センサ
。A moisture sensing element formed by molding and sintering porous ceramic powder, opposing comb-shaped electrodes formed on one side of the element leaving an outer periphery, and through-holes formed in each of the comb-shaped electrodes in series on the other side of the element. A humidity sensor comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11070584U JPS6126162U (en) | 1984-07-20 | 1984-07-20 | humidity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11070584U JPS6126162U (en) | 1984-07-20 | 1984-07-20 | humidity sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6126162U true JPS6126162U (en) | 1986-02-17 |
Family
ID=30669823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11070584U Pending JPS6126162U (en) | 1984-07-20 | 1984-07-20 | humidity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6126162U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5690254A (en) * | 1979-12-25 | 1981-07-22 | Nissan Motor Co Ltd | Preparation of heater-incorporating substrate for gas sensor |
-
1984
- 1984-07-20 JP JP11070584U patent/JPS6126162U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5690254A (en) * | 1979-12-25 | 1981-07-22 | Nissan Motor Co Ltd | Preparation of heater-incorporating substrate for gas sensor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |
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