JPS6125995A - タ−ボ分子ポンプ - Google Patents

タ−ボ分子ポンプ

Info

Publication number
JPS6125995A
JPS6125995A JP14439284A JP14439284A JPS6125995A JP S6125995 A JPS6125995 A JP S6125995A JP 14439284 A JP14439284 A JP 14439284A JP 14439284 A JP14439284 A JP 14439284A JP S6125995 A JPS6125995 A JP S6125995A
Authority
JP
Japan
Prior art keywords
vertex
rotor
apex
blades
rotor blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14439284A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0381000B2 (enrdf_load_stackoverflow
Inventor
Toshio Kusumoto
淑郎 楠本
Hiroyuki Yamakawa
洋幸 山川
Hisahiro Terasawa
寿浩 寺澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14439284A priority Critical patent/JPS6125995A/ja
Publication of JPS6125995A publication Critical patent/JPS6125995A/ja
Publication of JPH0381000B2 publication Critical patent/JPH0381000B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP14439284A 1984-07-13 1984-07-13 タ−ボ分子ポンプ Granted JPS6125995A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14439284A JPS6125995A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14439284A JPS6125995A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6125995A true JPS6125995A (ja) 1986-02-05
JPH0381000B2 JPH0381000B2 (enrdf_load_stackoverflow) 1991-12-26

Family

ID=15361079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14439284A Granted JPS6125995A (ja) 1984-07-13 1984-07-13 タ−ボ分子ポンプ

Country Status (1)

Country Link
JP (1) JPS6125995A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017104541A1 (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP2017110627A (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
GB2612781A (en) * 2021-11-10 2023-05-17 Edwards Ltd Turbomolecular pump bladed disc

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57191492A (en) * 1981-05-22 1982-11-25 Hitachi Ltd Molecular turbo-pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017104541A1 (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP2017110627A (ja) * 2015-12-15 2017-06-22 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
US11009029B2 (en) 2015-12-15 2021-05-18 Edwards Japan Limited Vacuum pump, and rotor blade and reflection mechanism mounted in vacuum pump
GB2612781A (en) * 2021-11-10 2023-05-17 Edwards Ltd Turbomolecular pump bladed disc
GB2612781B (en) * 2021-11-10 2024-04-10 Edwards Ltd Turbomolecular pump bladed disc

Also Published As

Publication number Publication date
JPH0381000B2 (enrdf_load_stackoverflow) 1991-12-26

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