JPS6125972U - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPS6125972U
JPS6125972U JP10907384U JP10907384U JPS6125972U JP S6125972 U JPS6125972 U JP S6125972U JP 10907384 U JP10907384 U JP 10907384U JP 10907384 U JP10907384 U JP 10907384U JP S6125972 U JPS6125972 U JP S6125972U
Authority
JP
Japan
Prior art keywords
storage chamber
plasma processing
processing apparatus
injection
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10907384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027646Y2 (enrdf_load_stackoverflow
Inventor
勝英 真部
康彦 荻巣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Priority to JP10907384U priority Critical patent/JPS6125972U/ja
Priority to DE19853520924 priority patent/DE3520924A1/de
Priority to CA000483614A priority patent/CA1249926A/en
Priority to US06/744,061 priority patent/US4668479A/en
Priority to AU43492/85A priority patent/AU565026B2/en
Publication of JPS6125972U publication Critical patent/JPS6125972U/ja
Application granted granted Critical
Publication of JPH027646Y2 publication Critical patent/JPH027646Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Nozzles (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
JP10907384U 1984-06-12 1984-07-19 プラズマ処理装置 Granted JPS6125972U (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10907384U JPS6125972U (ja) 1984-07-19 1984-07-19 プラズマ処理装置
DE19853520924 DE3520924A1 (de) 1984-06-12 1985-06-11 Plasmaverfahrensanlage
CA000483614A CA1249926A (en) 1984-06-12 1985-06-11 Plasma processing apparatus
US06/744,061 US4668479A (en) 1984-06-12 1985-06-12 Plasma processing apparatus
AU43492/85A AU565026B2 (en) 1984-06-12 1985-06-12 Plasma processing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10907384U JPS6125972U (ja) 1984-07-19 1984-07-19 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS6125972U true JPS6125972U (ja) 1986-02-15
JPH027646Y2 JPH027646Y2 (enrdf_load_stackoverflow) 1990-02-23

Family

ID=30668240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10907384U Granted JPS6125972U (ja) 1984-06-12 1984-07-19 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS6125972U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH027646Y2 (enrdf_load_stackoverflow) 1990-02-23

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