JPS61257474A - Method for controlling sheet temperature in vacuum deposition device - Google Patents

Abstract

PURPOSE:To correct the nonuniform temp. distribution of a steel sheet and to execute uniform vapor deposition by providing edge heaters to heat the edge parts of the steel sheet in a vacuum deposition device. CONSTITUTION:The edge heaters 12 are disposed between sealing roll 4-6 groups and a vapor deposition chamber 2 or on the inlet side of the roll 4-6 groups, etc., and the position thereof is adjusted at all times with a position setter 16 by the signal from an edge position detector 15 so that an adequate position as against the meandering of the steel 1 is always maintained. The edge heaters can be changed to the adequate position by the signal from the outside or the signal from the detector 15 even if the sheet width changes. The temp. distribution in the transverse direction is detected at all times by a sheet temp. detector 13 and the output of the heaters 12 is controlled. The uneven temp. arising from the local overcooling near the edges generated with the sealing devices by the sealing rolls 4-6, 6'-6' is thus eliminated and the uniform vapor deposition treatment of the steel sheet 1 is made possible.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for controlling the temperature of a steel plate in a vacuum evaporation apparatus in which the temperature of a steel plate subjected to vacuum evaporation is controlled to perform good vacuum evaporation.

[Prior Art] Conventionally, a vacuum evaporation apparatus shown in FIG. 6 has been proposed as a vacuum evaporation apparatus for evaporating zinc by continuously passing a steel plate into a vacuum chamber. In FIG. 6, 1 is a steel plate, 2 is a deposition chamber, 3.
3' is a duct, 4, 5.6 and 4', 5', 6'
is a seal roll consisting of a pair of rolls, and 7.8.9 is a vacuum pump. Further, 10 is a zinc evaporation tank provided in the vapor deposition chamber 2, and 11 is a gas jet cooling device for adjusting the temperature of the steel plate 1 during vapor deposition.

Moreover, Pa is the required pressure of the vapor deposition chamber 2, Pr, P2.

P3 is the pressure in the duct between each seal roll, and this pressure is caused by the exhaust by the vacuum pump, so that Pa > P2 >
Like Pi, the pressure decreases step by step, and the required pressure Pa is obtained (P34760 torr in FIG. 6).

Fig. 7(a,)(b) shows the seal roll 4 in Fig. 6.
This is an expanded version of The sealing performance of the seal roll is better as the ventilation area of the rooms with different pressures facing each other across the seal roll (for the seal roll 4, the rooms P9 and P2 in FIG. 6) is smaller. In this sense, the seal roll is configured to contact the steel plate 1 and rotate at the same speed as the steel plate 1, as shown in FIG.

[Problems to be Solved by the Invention However, this type of device has the following problems. In other words, it has been confirmed that the temperature of the steel plate 1 at the start of vapor deposition must be at least 150 [°C] or higher, but the surface color tone after vapor deposition varies depending on this temperature, and it is not possible to maintain a uniform temperature across the width of the steel plate 1. distribution is required. On the other hand, as shown in FIG. 7, in the range outside the width of the steel plate 1 in the seal roll part, a gap equal to the thickness of the steel plate inevitably occurs between the rolls, and for this reason, for example, P3 and P2
Gas flows through this gap depending on the pressure difference between the two.

The speed of the gas flowing through this gap is high (usually the speed of sound) and the temperature is around room temperature, which is lower than the steel plate, so the area near the edge of the steel plate 1 is supercooled, and the exit of the seal roll group on the inlet side, that is, the vapor deposition chamber 2
At the entrance, only the temperature near the edge has a temperature distribution that drops sharply, as shown in Figure 8.

In Fig. 8, the horizontal axis is the width W of the steel plate 1, and the vertical axis is the width W of the steel plate 1.
is the temperature T. Further, W is the range in which the temperature drops near the edge, and as a result of the investigation, it is narrow at 50 to 100 [sl], and there is almost no difference depending on the sheet width. Of course, the temperature of the steel plate at the entrance of the deposition chamber 2 is adjusted to the target value by the cooling device 11 on the inlet side, and the temperature distribution in the width direction is also adjusted to be uniform. It is extremely small in comparison, and it is difficult to respond appropriately to various sheet widths (the width of normally processed steel sheets varies from about 500 mm to about 2000 mm), and the sharp drop range Because it is narrow, it is affected by even a slight meandering of the steel plate 1, and there is a limit to the uniformity of the plate temperature distribution in the width direction.

The present invention was made with attention to these points, and its purpose is to correct the uneven temperature distribution near the edge of the steel plate that occurs in the seal roll part of the vacuum evaporation equipment, and to make it more uniform. It is an object of the present invention to provide a method for controlling a plate temperature in a vacuum evaporation apparatus, which can obtain a temperature distribution and contribute to uniformity of evaporation.

[Means for Solving the Problems] The gist of the present invention is to provide an edge heater that heats the edge portion of a steel plate subjected to vacuum deposition, and to make the plate temperature distribution uniform by this heater.

That is, the present invention provides a vacuum evaporation apparatus that performs pressure sealing using a seal roll group, in which an edge heater is provided on the entrance side of the seal roll group on the vapor deposition cavity side, or between the seal roll group and the vapor deposition chamber, or between adjacent seal rolls, The width and edge position of the steel plate to be processed are detected to continuously control the position of the edge heater in the plate width direction, and the temperature distribution in the width direction of the steel plate at the entrance of the deposition chamber is detected to continuously control the output of the edge heater. This method is designed to uniformly control the plate temperature distribution.

[Function] In the method of the present invention, the edge heater can always maintain the optimum position against the meandering of the steel plate, and even when changing the width of the steel plate, the edge heater can maintain the appropriate position by external signals or detector signals. position is changed. Furthermore, the output of the edge heater is controlled by the temperature distribution in the width direction of the steel plate.

[Effects of the Invention] Therefore, according to the present invention, it is possible to solve the problem caused by sealing devices using seal rolls, that is, the unique temperature unevenness caused by local supercooling near the edges of the steel plate. Therefore, there are advantages that the plate temperature can be controlled uniformly and that effective vacuum deposition can be performed.

[Example code] Hereinafter, details of the present invention will be explained with reference to illustrated embodiments.

FIG. 1 is a schematic diagram showing a vacuum evaporation apparatus used in an embodiment of the present invention. In the figure, 1 is a steel plate running in the direction of the arrow, 2 is a vapor deposition chamber, and 3 and 3' are ducts connected to the inlet and outlet sides of the vapor deposition chamber 2, respectively. 4.5.6 is a seal roll consisting of a pair of rolls provided inside the duct 3 so as to sandwich the running steel plate 1, and similarly, =6- 4' + 5' + 6' is the seal roll of the duct 3. This is a sealing roll consisting of a pair of rolls, each of which is provided inside the roller so as to sandwich a running steel plate 1 therebetween. An exhaust duct is provided between the seal rolls of the duct 3° 3', and internal gas is sucked and exhausted by a vacuum pump 7.8.9.

Po is the required pressure of the vapor deposition chamber 2, Pt, P2, Pa
is the pressure in the duct between each seal roll, and this pressure is raised to P3 > P by exhaustion by the vacuum pump 7.8.9.
2>Pi, and thereby the required pressure Pa is obtained.

Moreover, 1o is a zinc evaporation tank provided in the vapor deposition chamber 2. Reference numeral 11 denotes a gas jet cooling device installed on the entrance side of the seal roll group, and the amount of cooling is adjusted so that the temperature of the steel plate 1 at the entrance of the vapor deposition chamber 2 reaches the required temperature, and the width at the entrance of the seal roll group is adjusted. The amount of cooling in the width direction is also adjusted so that the directional plate temperature distribution is uniform. Reference numeral 12 denotes an edge heater provided in the duct 3 between the entrance side seal roll group outlet and the deposition chamber 2.

Edge heaters are provided at both edges of the steel plate 1, as shown in FIGS. 2(a) and 2(b). FIG. 2<a) is a cross-section of the edge heater section. The edge heater 12 has an electric heater 21 built in and is provided so as to sandwich the steel plate 1, so that only the vicinity of the edge of the steel plate 1 can be heated. Figure 2 (
In b), 17 is a drive bar that passes through the ducts i to 3 and is connected to the edge heater 12. Although not shown, the drive bar 17 is moved in the direction of the arrow by a cylinder or screw mechanism or the like to change the position of the edge heater 12. 18 is an extensible bellows that seals the inside of the duct and the outside air; one is a roller or wheel that supports the edge heater 12 and smoothes movement by the drive bar 17; and 20 is a guide rail thereof.

In FIG. 1, reference numeral 13 indicates a plate temperature detector which is provided on the outlet side of the edge heater 12 and constantly detects the temperature distribution in the width direction of the plate.
This is an output setting device that determines the output of 1. 15 is an edge position detector that detects the edge position of the steel plate 1; 16 is a position setting device that receives a signal from the edge position detector 15 and determines the position of the edge heater 12.

The edge position detector 15 is for dealing with meandering of the steel plate 1, and its position is not limited as long as the amount of meandering of the steel plate 1 is not significantly different from the installed position of the edge heater 12. In addition, the position setting device 16 receives not only the signal from the edge position detector 15 but also an external signal (not shown) for plate width change, or a welding inspection of the steel plate 1 provided in front of the edge heater 12. The edge position is set even when a signal from the output device 25 or the like is received. Of course, if the edge position detector 15 is provided in front of the edge heater 12, depending on its position, changes in the sheet width can be handled as is.

In addition, when changing the plate width, it is necessary to start moving the edge heater 12 in consideration of the moving speed of the drive bar 17, the amount of change in plate width, and the moving speed of the steel plate 1, as shown in FIG. 2(b). be.

In such a configuration, the edge beater 12 constantly controls the position setting device 16 by the signal from the edge position detector 15.
By adjusting the position through the , it is possible to always maintain the optimum position with respect to the meandering of the steel plate 1. Furthermore, the plate width can be changed to an appropriate position by an external signal or a signal from the edge position detector 15, welding point detector 25, or the like. Further, the width direction distribution is constantly detected by the plate temperature detector 13, and the output of the edge heater 12 is controlled.

Therefore, it is possible to eliminate the unique temperature unevenness caused by local supercooling near the edge caused by the sealing device using the sealing roll, as shown in FIG. 3. Therefore, uniform vapor deposition treatment can be performed on the steel plate 1. In addition, in Fig. 3, the horizontal axis is the width W of the steel plate.
, the vertical axis is the temperature T of the steel plate, a is the plate temperature distribution at the exit of the final seal roll on the entrance side, b is the plate temperature distribution at the outlet of the edge heater 12, and A is the portion corrected by the edge heater 12.

Next, other embodiments of the present invention will be described.

FIG. 4 shows an example in which the edge heater 12 is provided at the entrance of the entrance seal roll group. The structure and operation of the edge heater 12 are similar to those shown in FIGS. 1 and 2, and the 11.12.degree. 17 etc. shown in FIGS. 1 and 2 are not shown in FIG.

The temperature distribution of the steel plate in this case is as shown in FIG.

In FIG. 5, b is the plate temperature distribution at the entrance of the vapor deposition chamber, and a is the Itataki distribution at the entrance of the seal roll group for obtaining b.

In this example, anticipating that the edge portion of the steel plate 1 will be supercooled by the seal roll group, the edge heater 12 is used to set the temperature distribution at the seal roll group entrance to the temperature distribution a in advance, thereby achieving a uniform distribution at the vapor deposition chamber entrance as shown at b. is obtained. A is the part pre-adjusted by the edge heater. Therefore, the same effects as in the previous embodiment can be obtained.

Incidentally, generally, a gentle temperature distribution occurs in the width direction of the steel plate that is transferred to and from the inside of the duct, and in order to prevent this, it is conceivable to fix the heater 92 to the side wall of the duct 93 as shown in FIG. 9. However, although this is effective against a relatively gentle temperature distribution in the plate temperature direction,
In order to correct the local edge cooling in an extremely narrow range of the edge portion of the steel plate 91 caused by the seal roll, the heater 9
The influence of No. 2 in the board width direction is too wide, making it impossible to obtain a uniform distribution. That is, the necessary influence range of the heater 92 is, for example, an extremely narrow range W shown in FIG. 8, whereas the influence range in FIG. In some cases, this may result in loss of performance.

In other words, it is heated extra to a uniform range and raised to that temperature. Also, in Fig. 9, it is thought that if the heater length is made extremely small, the above-mentioned influence range will be reduced.
Taking this into account, the objective cannot be achieved even with regard to meandering of the steel plate due to poor racking.

In addition, if the temperature distribution is gentle that occurs in a normal duct, it is possible to obtain a uniform plate temperature by dividing the cooling device and adjusting the gas amount to adjust the distribution of cooling ports in the width direction of the plate. Since this apparatus is under vacuum conditions, a cooling device must be installed on the inlet side of the seal roll section, and in order to achieve a uniform plate temperature at the entrance of the deposition chamber, the distribution of a shown in the fifth section is required at the exit of the cooling device. Is required. On the other hand, considering that W is 50 to 100 [s], it is extremely difficult to accurately follow various board widths and meanderings, as mentioned above with the heater. .

From these facts, it can be seen that the method of the present invention for solving the phenomenon occurring in a sealing device using a sealing roll of a vacuum evaporation device is unprecedented, and that the effects of the above-described embodiments are tremendous.

Note that the present invention is not limited to the embodiments described above, and can be implemented with various modifications without departing from the gist thereof. For example, even if the edge heater is installed between adjacent seal rolls, the same effect as in the previous embodiment can be obtained. Moreover, it goes without saying that the present invention can be applied to vapor deposition of various materials other than zinc.

[Brief explanation of the drawing]

Fig. 1 is a schematic configuration diagram showing a vacuum heating device according to an embodiment of the present invention, Fig. 2 is a sectional view showing the specific structure of the edge heater section used in the above device, and Fig. 3 is a width of the steel plate. Characteristic diagrams showing the temperature distribution in the directions, Figures 4 and 5 are for explaining other embodiments, respectively. Figure 4 is a schematic configuration diagram, Figure 5 is a temperature distribution characteristic diagram, and Figures 6 to 5. FIG. 9 is a diagram for explaining the conventional problems. DESCRIPTION OF SYMBOLS 1... Steel plate, 2... Vapor deposition chamber, 3.3'... Duct, 4, ~, 6.4', ~, 6'... Seal roll,
7.8.9... Vacuum pump, 10... Evaporation tank, 11
...Cooling device, 12...Edge heater, 13...
Plate temperature detector, 14... Output setting device, 15... Edge position detector, 16... Position setting device, 17... Drive bar, 25... Welding point detector. Applicant's sub-agent Patent attorney Takehiko Suzue 1) ---□

Claims (1)

[Claims] In a vacuum evaporation apparatus that performs pressure sealing using a group of seal rolls, an edge heater is provided on the entrance side of the seal roll group on the entrance side of the deposition chamber, between the seal roll group and the deposition chamber, or between adjacent seal rolls, and the process is performed. The width and edge position of the steel plate are detected to continuously control the position of the edge heater in the plate width direction, and the temperature distribution in the width direction of the steel plate at the entrance of the deposition chamber is detected to continuously control the output of the edge heater. A method for controlling a plate temperature in a vacuum evaporation apparatus, which is characterized by controlling the temperature in a vacuum evaporation apparatus.