JPS61253164A - Local heating method - Google Patents

Local heating method

Info

Publication number
JPS61253164A
JPS61253164A JP9546085A JP9546085A JPS61253164A JP S61253164 A JPS61253164 A JP S61253164A JP 9546085 A JP9546085 A JP 9546085A JP 9546085 A JP9546085 A JP 9546085A JP S61253164 A JPS61253164 A JP S61253164A
Authority
JP
Japan
Prior art keywords
gas
port
temp
heating
heated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9546085A
Other languages
Japanese (ja)
Inventor
Masaru Sakaguchi
勝 坂口
Muneo Oshima
大島 宗夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9546085A priority Critical patent/JPS61253164A/en
Publication of JPS61253164A publication Critical patent/JPS61253164A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

PURPOSE:To reduce the rupture of a substrate and to improve working efficiency by providing flow regulating plates into a gas delivery port of a gas heating pipe contg. a heating element and setting the temp. distribution of the heating gas in the delivery part to the desired state thereby setting the temp. distribution of the surface to be heated in a desired range. CONSTITUTION:The heating element 4 attached to the bottom surface of a terminal board 5 having electric power supply terminals 6A, 6B is housed into the quartz pipe 1A having a feed port 2 and the delivery port 3. Grooves 7A, 7B are provided to the circumferential wall of the port 3 and the flow regulating plates 8 or controlling the flow of the gas are inserted into the grooves. The plates 8 are disposed adequately with many through-holes 9. The element 4 of such heating device 1 heats the gas when the gas is fed through the port 2 into the pipe 1A and the electric power determined preliminarily by experiment is supplied to the terminals 6A, 6B. The heated gas is delivered through the flow regulating plates from the port 3. The temp. of the heated gas in the port 3 is distributed to the flat shape in the high-temp. part where the isothermal lines cover a wide range near the center. Such temp. distribution is determined by how the holes 9 are disposed.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は主として配線基板上に電子部品をはんだ付けす
る場合などに使用される局所加熱方法に関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a local heating method mainly used when soldering electronic components onto a wiring board.

〔発明の背景〕[Background of the invention]

配線基板上に電子部品をはんだ付けする方法において、
耐熱性の低い部品を有するモジー−ルは、該モジュール
全体をはんだの溶融温度まで加熱することができない。
In the method of soldering electronic components onto a wiring board,
Modules with components with low heat resistance cannot be heated as a whole to the melting temperature of the solder.

このためはんだ付けする部分のみを局所的に加熱し、そ
の近傍の低耐熱性部品への影響を極力小さくする加熱方
法が要求される。この場合、接続歩留りおよび接続の信
頼性の見地から、はんだ接続部を均一に加熱することが
重要である。
For this reason, there is a need for a heating method that locally heats only the part to be soldered and minimizes the effect on low heat resistant components in the vicinity. In this case, from the standpoint of connection yield and connection reliability, it is important to uniformly heat the solder joints.

従来の局所加熱方法および装置として、アイビーエム・
テクニカル・ディスクロクジャ・ブリティ:/ (IB
M、’]’4cムワaf DLiciti臨f3仏ハL
rb  )1972年8月(Vol、 15.厖3)に
おける「ホット。
As a conventional local heating method and device, IBM
Technical Disclosure: / (IB
M,']'4c Mwa af DLiciti Rin f3 Buddha ha L
rb) “Hot.

ガス・ガンJ (HOT GA8 GTJN )に示さ
れているものがある。
There is one shown in Gas Gun J (HOT GA8 GTJN).

このガス加熱装置は、石英管内にヒータを組込み、この
ヒータに通電すると同時に、前記石英管の一端からガス
を送入し、他端から加熱されたガスを送出するように構
成されている。このガス加熱装置によシ生成された加熱
ガスを、はんだ付けされるチップの背面に吹き付けて結
合する方法も前記文献に記載されている。
This gas heating device has a heater built into a quartz tube, and is configured to energize the heater, simultaneously introduce gas from one end of the quartz tube, and send out heated gas from the other end. The above-mentioned document also describes a method for bonding by spraying the heated gas generated by this gas heating device onto the back surface of the chips to be soldered.

ところが、上記方法では、ガス送出口におけるガス温度
分布は、ノズル先端の形状により決定される。このため
はんだ付けされる部品の形状、寸法、熱容量および基板
の材質などが異なると、はんだ付は部の温度分布が不均
一になり、接続不良の増加、接続信頼性の低下および基
板の破損を招く懸念があった。
However, in the above method, the gas temperature distribution at the gas outlet is determined by the shape of the nozzle tip. For this reason, if the shapes, dimensions, heat capacities, and board materials of the parts to be soldered differ, the temperature distribution during soldering will be uneven, leading to an increase in connection failures, a decrease in connection reliability, and damage to the board. There were concerns that this would lead to

〔発明の目的〕[Purpose of the invention]

本発明は上記のような従来技術の問題点を解消し、被加
熱面の温度分布を所望範囲に設定することにより、作業
効率の向上と設備コストの低減をはかると共に、接続信
頼性を大幅に向上させることを目的とするものである。
The present invention solves the problems of the conventional technology as described above, and by setting the temperature distribution of the heated surface within a desired range, it improves work efficiency and reduces equipment costs, and significantly improves connection reliability. The purpose is to improve

〔発明の概要〕[Summary of the invention]

本発明は上記目的を達成するために、送入口と送出口を
有し、かつ発熱体を内蔵する管中に該送入口よシ気体を
送入し、該送出口から送出する加熱ガスにより局部を加
熱する局所加熱方法において、前記管の送出口内に整流
板を設け、該送出口における加熱ガスの温度分布を所望
の状態に設定することにより、被加熱面の温度分布を所
望範囲に設定するようにしたことを特徴とする。
In order to achieve the above object, the present invention has an inlet and an outlet, and introduces gas through the inlet into a tube containing a heating element, and heats the heated gas sent out from the outlet to generate local heat. In the local heating method, a current plate is provided in the outlet of the pipe, and the temperature distribution of the heated gas at the outlet is set to a desired state, thereby setting the temperature distribution of the heated surface to a desired range. It is characterized by being made to do.

〔発明の実施例〕[Embodiments of the invention]

以F1本発明の局所加熱方法の実施例を図面について説
明する。第1図および第2図は本発明の局所加熱方法の
一実施例を適用した局所加熱装置の正面図および平面図
である。
Hereinafter, an embodiment of the local heating method of the present invention will be described with reference to the drawings. 1 and 2 are a front view and a plan view of a local heating device to which an embodiment of the local heating method of the present invention is applied.

同図において、送入口2と送出口5を有する石英管1人
内には、電力供給端子6A、6B (以下、端子と称す
)を存する端子盤5の下面に取付けた発熱体4が収納さ
れている。該端子盤5は前記送入口2の外周部に装着さ
れている。また、前記送出口3の周壁には@7A、7B
が設けられ、該#47A、7Bにはガスの流れを制御す
るための整流板8(第3図参照)が挿入される。該整流
板8には、多数の貫通孔9が適当に配置されている。
In the figure, a heating element 4 attached to the lower surface of a terminal board 5 containing power supply terminals 6A and 6B (hereinafter referred to as terminals) is housed in a quartz tube having an inlet 2 and an outlet 5. ing. The terminal board 5 is attached to the outer periphery of the inlet 2. Also, @7A, 7B are provided on the peripheral wall of the outlet 3.
A rectifier plate 8 (see FIG. 3) for controlling the flow of gas is inserted into #47A and #47B. A large number of through holes 9 are appropriately arranged in the current plate 8.

上記のような構成からなる加熱装置1において、ガスを
送入口2より管1A内に送入し、端子6A、6Bにあら
かじめ実験により求めた値の電力を供給すると、発熱体
4は発熱してガスを加熱する。この加熱ガスは送出口3
の溝7A、78にそれぞれ挿入された整流板(図示せず
)を経て送出される。
In the heating device 1 configured as described above, when gas is introduced into the pipe 1A through the inlet 2 and electric power of a value determined in advance by experiment is supplied to the terminals 6A and 6B, the heating element 4 generates heat. Heat the gas. This heated gas is sent to outlet port 3.
The liquid is sent out through rectifier plates (not shown) inserted into the grooves 7A and 78, respectively.

この場合、送出口3の長手方向中心線0に沿った温変分
布は、第4図の実線αに示すような状態となり、該温度
分布を等温線で示すと、第5図に示すような状態となる
。すなわち、等温ffa10は送出口3の中央付近で広
範囲にわたり、等温域かえられる高温部平坦形の温変分
布を形成することが測定の結果より確認された。
In this case, the temperature distribution along the longitudinal center line 0 of the outlet port 3 will be as shown by the solid line α in FIG. state. That is, it was confirmed from the measurement results that the isothermal ffa10 spreads over a wide range near the center of the outlet 3, forming a flat temperature variation distribution in the high temperature region where the isothermal region changes.

上記高温部平坦形の温度分布は、第3図に示す整流板8
の多数の貫通孔9の配置状態により決定されるので、該
貫通孔9の配置を変更した整流板を使用することにより
、別の所望の温度分布を容易にうることが可能である。
The temperature distribution of the flat shape of the high-temperature part is as shown in FIG.
Since the temperature distribution is determined by the arrangement of a large number of through holes 9, by using a current plate in which the arrangement of the through holes 9 is changed, it is possible to easily obtain another desired temperature distribution.

前記整流板を使用しない場合には、第4図の破線善およ
び第6図の等温線11に示すように送出口3の中央付近
を頂点とする山形状の温度分布を形成する。
When the baffle plate is not used, a mountain-shaped temperature distribution is formed with the apex near the center of the outlet 3 as shown by the broken line in FIG. 4 and the isothermal line 11 in FIG. 6.

第7図ないし第10図は前加熱装置の適用例を示したも
のである。すなわち、第7図ないし第9図はそれぞれ本
発明の加熱方法を適用した加熱装置により、配線基板上
にLSIチップをはんだリフロ接続する方法を説明する
正面図、側面図および平面図であり、第10図は加熱時
の配線基板の温度分布図である。これらの各図の符号の
うち、同一符号は同一または該当する部分を示すものと
する。
7 to 10 show examples of application of the preheating device. That is, FIGS. 7 to 9 are a front view, a side view, and a plan view, respectively, illustrating a method of soldering reflow bonding an LSI chip onto a wiring board using a heating device to which the heating method of the present invention is applied. FIG. 10 is a temperature distribution diagram of the wiring board during heating. Among the reference numerals in these figures, the same reference numerals indicate the same or corresponding parts.

第7図ないし第9図において、配線パターン(図示せず
)が形成されたガラス製基板20の上面には、はんだバ
ンプ21を有するLSIチップ22が位置合わせして載
置されている。また、基板20の上面と下面には、チッ
プ取り付はエリア23および基板端部24を開放形にし
た上部遮へい板25および下部遮へい板26がそれぞれ
設置されており、該下部遮へい板26は基板保持具(図
示せず)Ic固定されている。また前記基板20の内部
には耐熱性部材、例えば160°Cの樹脂27が固着さ
れておシ、該樹脂27の上面は上部遮へい板25で覆わ
れている。
In FIGS. 7 to 9, an LSI chip 22 having solder bumps 21 is positioned and placed on the upper surface of a glass substrate 20 on which a wiring pattern (not shown) is formed. Further, on the upper and lower surfaces of the board 20, an upper shielding plate 25 and a lower shielding plate 26 are installed, respectively, in which a chip mounting area 23 and a board end 24 are open. A holder (not shown) is fixed to Ic. Further, a heat-resistant member such as a resin 27 having a temperature of 160° C. is fixed inside the substrate 20, and the upper surface of the resin 27 is covered with an upper shielding plate 25.

上記基板20の上方にはガス加熱装置1が設置されてお
り、該ガス加熱装置は1は、石英管1人内にガスを加熱
するための発熱体(図示せず)を設け、加熱ガスの送出
部3を長円筒形に形成し、該送出部1人内にガスの流量
分布を制御するための整流板8A、8Bを設けた構造か
らなる。このようなガス加熱装置1は、第7図において
左右方向、上下方向および紙面に垂直方向にそれぞれス
ライド可能な機構(図示せず)を備えている。
A gas heating device 1 is installed above the substrate 20, and the gas heating device 1 includes a heating element (not shown) for heating gas in a quartz tube. The delivery section 3 is formed in an elongated cylindrical shape, and has a structure in which rectifier plates 8A and 8B are provided for controlling the gas flow rate distribution within the delivery section. Such a gas heating device 1 is equipped with a mechanism (not shown) that can slide in the left-right direction, the up-down direction, and the direction perpendicular to the plane of the paper in FIG.

次に配線基板20上にチップ22をはんだリフロ接続す
る場合について述べる。
Next, a case will be described in which the chip 22 is connected by solder reflow onto the wiring board 20.

まず、下部遮へい板26の開放部中央にチップ取り付は
エリア23が位置するように、チップ22を載置した基
板20を設置する。ついで、基板20の上面に上部遮へ
い板25を設置した後、加熱ガスを吹き出しているガス
加熱装置1をチップ取り付はエリア23の上方に位置す
るように移動させる。このような状態で一定時間加熱す
ることにより、はんだバンブ21は溶融して基板20上
の配線パターンとチップ22とをはんだ接合させる。
First, the substrate 20 on which the chip 22 is mounted is installed so that the chip mounting area 23 is located in the center of the open part of the lower shielding plate 26. Next, after installing the upper shielding plate 25 on the upper surface of the substrate 20, the gas heating device 1 blowing out the heating gas is moved so as to be located above the chip mounting area 23. By heating in this state for a certain period of time, the solder bumps 21 are melted and the wiring pattern on the substrate 20 and the chip 22 are soldered together.

上記のようにはんだ溶融し、一定時間経過した後にガス
加熱装置1をボンディング部から遠ざけるように移動さ
せ、該ボンディング部を自然冷却することにより、接続
部のはんだが凝固してボンディングが完了する。
After the solder melts as described above and a certain period of time has elapsed, the gas heating device 1 is moved away from the bonding part and the bonding part is naturally cooled, whereby the solder at the connection part solidifies and the bonding is completed.

本実施例では、基板20にガラス板を用いているため、
基板端部24に引張り応力が作用すると、基板20が容
易に破断して致命的な不良となる恐れがある。該不良を
招かない温度分布としては、第10図に示すようにチッ
プ取付はエリア23の周囲を等製線2日で取り囲み、該
エリア23と基板端部24を等温にすることが有効であ
る。
In this embodiment, since a glass plate is used for the substrate 20,
If tensile stress is applied to the substrate end 24, the substrate 20 may easily break, resulting in a fatal failure. As for the temperature distribution that does not cause such defects, it is effective to surround the area 23 with two isometric lines for chip mounting as shown in FIG. .

そこで、本実施例では、第5図と同一構造の整流板8A
、8Bを用いることにより、第10図に示すような等温
線28からなる等温分布の加装を実現することができた
Therefore, in this embodiment, the current plate 8A having the same structure as that in FIG.
, 8B, it was possible to realize an isothermal distribution consisting of isothermal lines 28 as shown in FIG.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明によれば、ガス送出口に適
当な整流板を設けることにより、被加熱品に適応した温
度分布を容易に実現でよるので、従来、温度分布の不適
性から多発していたガラス基板の破断不良を大幅に低減
させると共に、作業能率の向上をはかることができる。
As explained above, according to the present invention, by providing an appropriate rectifying plate at the gas outlet, it is possible to easily realize a temperature distribution suitable for the heated product. It is possible to significantly reduce the number of broken glass substrates that have previously been used, and to improve work efficiency.

また、多発接続部品の各接続点間の温度のバラツキを低
減することにより、接続信頼性を大幅に向上させること
がでよる。
In addition, by reducing the variation in temperature between the connection points of the frequently connected component, connection reliability can be significantly improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図および第2図は本発明の局所加熱方法を適用した
加熱装置の正面図および側面図、第6図は本発明の局所
加熱方法に用いられる整流板の平面図、第4図ないし第
6図は本発明の局所加熱方法および従来方法における温
度分布の説明図、第7図ないし第9図はそれぞれ配線基
板上にチップをはんだリフロ接続する方法を説明する正
面図、側面図および平面図、第10図は加熱時の配線基
板の温度分布図である。 1人・・・管、2・・・送入口、3・・・送出口、4・
・・発熱体、8・・・整流板。 第1図 第 2 図 第 3 図 第 4 図 て 粥 5 図     第 6 図 第7図   第8図 第 q 図
1 and 2 are front and side views of a heating device to which the local heating method of the present invention is applied, FIG. 6 is a plan view of a rectifier plate used in the local heating method of the present invention, and FIGS. FIG. 6 is an explanatory diagram of temperature distribution in the local heating method of the present invention and the conventional method, and FIGS. 7 to 9 are a front view, a side view, and a plan view, respectively, illustrating a method for soldering reflow connection of chips on a wiring board. , FIG. 10 is a temperature distribution diagram of the wiring board during heating. 1 person...pipe, 2...inlet, 3...outlet, 4...
... Heating element, 8... Rectifier plate. Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure q

Claims (1)

【特許請求の範囲】[Claims]  送入口と送出口を有し、かつ発熱体を内蔵する管中に
該入口より気体を送入し、該送出口から送出する加熱ガ
スにより局部を加熱する局所加熱方法において、前記管
の送出口内に整流板を設け、該送出口における加熱ガス
の温度分布を所望の状態に設定することにより、被加熱
面の温度分布を所望範囲に設定するように構成したこと
を特徴とする局所加熱方法。
In a local heating method in which gas is introduced from the inlet into a tube having an inlet and an outlet and a heating element is built in, and a local area is heated by the heated gas sent out from the outlet, the outlet of the tube A local heating method characterized in that the temperature distribution of the heated surface is set within a desired range by providing a rectifier plate inside the outlet and setting the temperature distribution of the heated gas at the outlet to a desired state. .
JP9546085A 1985-05-07 1985-05-07 Local heating method Pending JPS61253164A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9546085A JPS61253164A (en) 1985-05-07 1985-05-07 Local heating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9546085A JPS61253164A (en) 1985-05-07 1985-05-07 Local heating method

Publications (1)

Publication Number Publication Date
JPS61253164A true JPS61253164A (en) 1986-11-11

Family

ID=14138281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9546085A Pending JPS61253164A (en) 1985-05-07 1985-05-07 Local heating method

Country Status (1)

Country Link
JP (1) JPS61253164A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63247586A (en) * 1987-04-03 1988-10-14 松下電器産業株式会社 Substrate heater

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212167A (en) * 1983-05-16 1984-12-01 Matsushita Electric Ind Co Ltd Soldering method of electronic parts
JPS6114077A (en) * 1984-06-29 1986-01-22 Matsushita Electric Ind Co Ltd Preliminary heater for solder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59212167A (en) * 1983-05-16 1984-12-01 Matsushita Electric Ind Co Ltd Soldering method of electronic parts
JPS6114077A (en) * 1984-06-29 1986-01-22 Matsushita Electric Ind Co Ltd Preliminary heater for solder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63247586A (en) * 1987-04-03 1988-10-14 松下電器産業株式会社 Substrate heater

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