JPS6125310B2 - - Google Patents
Info
- Publication number
- JPS6125310B2 JPS6125310B2 JP55070057A JP7005780A JPS6125310B2 JP S6125310 B2 JPS6125310 B2 JP S6125310B2 JP 55070057 A JP55070057 A JP 55070057A JP 7005780 A JP7005780 A JP 7005780A JP S6125310 B2 JPS6125310 B2 JP S6125310B2
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- slit
- element substrate
- combustion
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 28
- 238000002485 combustion reaction Methods 0.000 claims description 15
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 11
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000007772 electrode material Substances 0.000 description 5
- 230000007257 malfunction Effects 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Regulation And Control Of Combustion (AREA)
Description
【発明の詳細な説明】
本発明は、ジルコニアその他の素子基板に表裏
両面の電極を形成して、酸欠時の不完全燃焼を検
知し得るようにした燃焼検知素子の製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a combustion detection element in which incomplete combustion in the absence of oxygen can be detected by forming electrodes on both the front and back surfaces of an element substrate made of zirconia or other material.
本願出願人は、先にこの種素子として、例えば
第１図に示すように素子基板ａにスリツトｂと、
該スリツトｂの両側に並設される表裏１対の電極
ｃ，ｃの２組とを設け、１個の素子で２個の素子
を用いると同様の作動を得られるようにしたもの
を提案したが、この場合該素子は、先ず素子基板
ａにスリツトｂを形成した後、該スリツトｂの両
側に２組の電極ｃ，ｃを形成して製造されるを一
般としたもので、この方法によれば各組の電極
ｃ，ｃをスリツトｂに近接させると、電極ｃ，ｃ
の形成に際し電極材がスリツトｂ内に垂れこんで
表裏の電極ｃ，ｃの短絡を生ずることがあるた
め、各組の電極ｃ，ｃはスリツトｂとの間に多少
とも間隙を存して形成するを一般とする。然し、
このものでは２組の電極ｃ，ｃ間の間隔が広くな
り、素子を例えば第２図示の如くバーナｄに対設
したとき、バーナｄに対する各組の電極ｃ，ｃの
設置条件に差を生じ、燃焼排気が２組の電極ｃ，
ｃに均等に接触せず、誤作動の原因となる不都合
を伴う。 The applicant of the present application has previously proposed an element of this type, for example, as shown in FIG.
We have proposed a device in which two sets of electrodes c and c are provided on both sides of the slit b, one on the front and the other on the back, so that the same operation can be obtained by using two elements in one element. However, in this case, the device is generally manufactured by first forming a slit b on the device substrate a, and then forming two sets of electrodes c, c on both sides of the slit b. According to this, when each set of electrodes c, c is brought close to slit b, electrodes
When forming, the electrode material may hang down into the slit b, causing a short circuit between the front and back electrodes c, c, so each pair of electrodes c, c is formed with some gap between them and the slit b Generally speaking. However,
In this case, the distance between the two sets of electrodes c and c is wide, and when the element is installed opposite to the burner d as shown in the second figure, a difference occurs in the installation conditions of each set of electrodes c and c with respect to the burner d. , the combustion exhaust has two sets of electrodes c,
c does not contact evenly, resulting in the inconvenience of causing malfunction.
本発明は、かかる不都合を解消すべく各組の電
極をスリツトに接する状態に形成して且つ表裏の
電極の短絡も生じないようにした素子の製造方法
を提供することをその目的とするもので、ジルコ
ニアその他の素子基板に、先ず表裏１対の電極を
少なくとも１組形成し、次いで該素子基板に該１
組の電極を一側と他側との少なくとも２組に分断
するスリツトを形成したことを特徴とする。 SUMMARY OF THE INVENTION In order to solve this problem, it is an object of the present invention to provide a method for manufacturing an element in which each set of electrodes is formed in contact with a slit, and a short circuit between the front and back electrodes does not occur. First, at least one pair of front and back electrodes is formed on an element substrate made of zirconia or other material, and then the one pair of electrodes is formed on the element substrate.
The present invention is characterized in that a slit is formed to divide the set of electrodes into at least two sets, one on one side and the other.
次いで本発明の実施例を別紙図面に付説明す
る。燃焼検知素子としては、素子基板をジルコニ
アその他の酸素イオン伝導性固体電解質で構成し
て、その表裏の電極間の雰囲気酸素濃度差に応じ
た起電力が発生されるようにした酸素濃淡電池素
子、或いは素子基板をチタニアその他の金属酸化
物半導体で構成して、その表裏の電極間の雰囲気
酸素濃度差に応じた抵抗変化が発生されるように
した抵抗変化素子が知られるが、本発明は何れの
素子にも適用される。 Next, embodiments of the present invention will be explained with reference to attached drawings. The combustion detection element includes an oxygen concentration battery element whose element substrate is made of zirconia or other oxygen ion conductive solid electrolyte, and which generates an electromotive force according to the atmospheric oxygen concentration difference between the front and back electrodes; Alternatively, a resistance change element is known in which the element substrate is made of titania or other metal oxide semiconductor, and a resistance change is generated according to the difference in atmospheric oxygen concentration between the front and back electrodes. It also applies to elements of
第３図及び第４図は本発明方法により得られた
燃焼検知素子の１例を示し、該素子は、上記した
酸素イオン伝導性固体電解質或は金属酸化物半導
体から成る素子基板１に、先端側のスリツト２
と、該スリツト２の両側にこれに接して並設され
る表裏１対の電極３，３の２組とを備え、更に該
各電極３の尾端から尾方にのびる各別の引出部４
を備える。 FIGS. 3 and 4 show an example of a combustion sensing element obtained by the method of the present invention. side slit 2
and two pairs of front and back electrodes 3, 3 arranged in parallel on both sides of the slit 2 in contact with the slit 2, and furthermore, separate lead-out portions 4 extending caudally from the tail end of each electrode 3.
Equipped with.
その製造方法は、先ず素子基板１を構成する原
料粉末に有機バインダーを混入して混練し、これ
を板状に成型して乾燥し生焼き或いは半焼き状態
の素子基板１を得る。 In its manufacturing method, first, an organic binder is mixed and kneaded into the raw material powder constituting the element substrate 1, which is then molded into a plate shape and dried to obtain the element substrate 1 in a raw or half-baked state.
次いで該素子基板１の表裏両面にスリツト２の
形成予定位置の両側に跨るように白金その他の電
極材を印刷、塗布、蒸着等の手段により被着し
て、第５図及び第６図に示す如く表裏１対の電極
３，３を１組形成する。尚、この際同一の電極材
を用いて引出部４も形成しておく。 Next, platinum or other electrode material is deposited on both the front and back sides of the element substrate 1 by printing, coating, vapor deposition, etc. so as to span both sides of the intended formation position of the slit 2, as shown in FIGS. 5 and 6. A pair of front and back electrodes 3, 3 is formed as shown in FIG. Incidentally, at this time, the lead-out portion 4 is also formed using the same electrode material.
次いで、該形成予定位置にスリツト２を形成
し、該１組の電極３，３を一側と他側との２組に
分断し、而る後素子基板１を焼成して上記した燃
焼検知素子を得る。 Next, a slit 2 is formed at the planned formation position, the set of electrodes 3, 3 is divided into two sets, one side and the other side, and then the element substrate 1 is fired to form the above-mentioned combustion sensing element. get.
尚、素子基板１を完全に焼成した後、これに電
極３，３を形成してスリツト２を形成するように
しても良いが、この場合はスリツト２の形成に際
し素子基板１に亀裂や破断を生じ易く注意を要す
る。 Incidentally, after the element substrate 1 is completely fired, the electrodes 3, 3 may be formed thereon to form the slit 2, but in this case, when forming the slit 2, it is necessary to avoid cracking or breaking the element substrate 1. This occurs easily and requires caution.
又、電極３，３を形成した後素子基板１を長時
間焼成すると、電極材が蒸散することがあるた
め、素子基板１は予め半焼き状態に用意しておく
ことが好ましい。 Furthermore, if the element substrate 1 is baked for a long time after forming the electrodes 3, 3, the electrode material may evaporate, so it is preferable to prepare the element substrate 1 in a half-baked state in advance.
又、素子基板１は必ずしも１個毎に用意する必
要はなく、複数枚の素子基板１に切断されるシー
ト状の元基板を用意して、この元基板に各素子基
板１に対応する各１組の電極３，３を印刷その他
の手段で形成し次いで元基板を型枠状の切断刃等
で各素子基板１に切断し、同時にスリツト２を形
成するようにしても良い。 Furthermore, it is not necessary to prepare each element substrate 1 individually; instead, a sheet-like original substrate that is cut into a plurality of element substrates 1 is prepared, and each element substrate 1 corresponding to each element substrate 1 is prepared on this original substrate. The electrodes 3, 3 of the set may be formed by printing or other means, and then the original substrate may be cut into each element substrate 1 using a cutter blade shaped like a mold, and the slits 2 may be formed at the same time.
燃焼検知素子は、例えば第７図及び第８図に示
す如くバーナ５の燃焼面の前面に対設して使用す
るもので該バーナ５の不完全燃焼によれば燃焼面
に対向する各組の表面の電極３，３が前方に脹む
燃焼排気の流れに晒されて、外気に晒される裏面
の電極３，３との間に酸素濃度差を生じ、スリツ
ト２で分断される素子基板１の両側片１ａ，１ａ
において夫々酸素濃度差に応じた電気的変化が発
生され、この際一側片１ａの一方の面の電極３に
連る引出部４と、他側片１ａの他方の面の電極３
に連る引出部４とを接続しておけば、２個の素子
を直列接続した場合と同様の出力が得られる。 The combustion detection element is used, for example, as shown in FIG. 7 and FIG. The electrodes 3, 3 on the front surface are exposed to the flow of combustion exhaust gas expanding forward, and a difference in oxygen concentration occurs between the electrodes 3, 3 on the back surface exposed to the outside air. Both side pieces 1a, 1a
An electrical change is generated in accordance with the oxygen concentration difference, and at this time, the lead-out portion 4 connected to the electrode 3 on one side of the one side piece 1a and the electrode 3 on the other side of the other side piece 1a are generated.
If the lead-out portion 4 is connected to the lead-out portion 4, the same output as when two elements are connected in series can be obtained.
そして本発明方法により得られる素子は、素子
基板１に１組の電極３，３を形成した後これをス
リツト２で一側と他側との２組の電極３，３に分
断するため、２組の電極３，３は夫々スリツト２
に接して互に近接配置され、従つて燃焼排気の流
れに均等に晒されて、誤作動を生ずることがな
い。 In the device obtained by the method of the present invention, a pair of electrodes 3, 3 are formed on the device substrate 1, and then this is divided by a slit 2 into two pairs of electrodes 3, 3 on one side and the other side. The pair of electrodes 3 and 3 are each connected to the slit 2.
They are placed in close proximity to each other and are therefore evenly exposed to the flow of combustion exhaust, preventing malfunctions.
第９図は素子基板１に備える２組の電極３，３
の尾端部から共通の引出部４を延出した燃焼検知
素子を示し、この場合も上記実施例と同様に素子
基板１に予め第１０図に示す如く１組の電極３，
３を形成してからスリツト２を形成するが、この
場合スリツト２は電極３，３の尾端部を分断しな
い長さとし、表裏の引出部４，４間に２個の素子
を並列接続したと同様の出力が得られるようにす
る。 FIG. 9 shows two sets of electrodes 3, 3 provided on the element substrate 1.
A combustion sensing element is shown in which a common lead-out part 4 extends from the tail end of the combustion sensing element, and in this case, as in the above embodiment, a set of electrodes 3,
3 is formed, and then the slit 2 is formed. In this case, the slit 2 has a length that does not cut off the tail ends of the electrodes 3, 3, and two elements are connected in parallel between the lead-out parts 4, 4 on the front and back sides. Make sure you get similar output.
この様に本発明によるときは、素子基板に表裏
１対の電極を形成してからスリツトを形成して、
該電極を一側と他側との少なくとも２組に分断す
るようにしたので、各組の電極は夫々スリツトに
接して互に近接配置され、バーナの燃焼状態が互
に同一条件で検知されて、誤作動を生ずることが
なく、而もスリツトを形成してから電極を形成す
るものと異り、スリツトに電極材が垂れこんで電
極の短絡を生ずる虞れもない等の効果を有する。 As described above, according to the present invention, a pair of front and back electrodes are formed on the element substrate, and then a slit is formed,
Since the electrodes are divided into at least two sets, one on one side and the other, each set of electrodes is placed close to each other in contact with the slit, so that the combustion state of the burner can be detected under the same conditions. This method does not cause malfunction, and unlike the method in which the electrode is formed after forming the slit, there is no risk of the electrode material hanging into the slit and causing a short circuit between the electrodes.
第１図は先の提案の燃焼検知素子の正面図、第
２図はその使用状態の截断側面図、第３図は本発
明方法による燃焼検知素子の１例の正面図、第４
図は第３図の−線拡大截断面図、第５図はそ
のスリツト形成前の状態を示す正面図、第６図は
第５図の−線拡大截断面図、第７図及び第８
図はその使用状態を示す正面図と截断側面図、第
９図は本発明方法による燃焼検知素子の変形例の
正面図、第１０図はそのスリツト形成前の状態を
示す正面図である。
１……素子基板、２……スリツト、３……電
極。
FIG. 1 is a front view of the previously proposed combustion detection element, FIG. 2 is a cutaway side view of its usage state, FIG.
The figures are an enlarged sectional view taken along the - line in Fig. 3, Fig. 5 is a front view showing the state before the slit is formed, Fig. 6 is an enlarged sectional view taken along the - line in Fig. 5, and Figs. 7 and 8.
The figures are a front view and a cutaway side view showing the state in which it is used, FIG. 9 is a front view of a modification of the combustion detection element according to the method of the present invention, and FIG. 10 is a front view showing the state before slits are formed. 1...Element substrate, 2...Slit, 3...Electrode.
Claims (1)
対の電極を少なくとも１組形成し、次いで該素子
基板に該１組の電極を一側と他側との少なくとも
２組に分断するスリツトを形成したことを特徴と
する燃焼検知素子の製造方法。1 First, place the front and back sides of the zirconia or other element substrate.
1. A method for manufacturing a combustion detection element, comprising forming at least one set of paired electrodes, and then forming a slit in the element substrate to divide the set of electrodes into at least two sets, one on one side and the other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7005780A JPS56166462A (en) | 1980-05-28 | 1980-05-28 | Manufacture of combustion detecting element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7005780A JPS56166462A (en) | 1980-05-28 | 1980-05-28 | Manufacture of combustion detecting element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56166462A JPS56166462A (en) | 1981-12-21 |
| JPS6125310B2 true JPS6125310B2 (en) | 1986-06-14 |
Family
ID=13420533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7005780A Granted JPS56166462A (en) | 1980-05-28 | 1980-05-28 | Manufacture of combustion detecting element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56166462A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0873012A (en) * | 1994-09-06 | 1996-03-19 | N K K Plant Kensetsu Kk | Long object storage device |
-
1980
- 1980-05-28 JP JP7005780A patent/JPS56166462A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0873012A (en) * | 1994-09-06 | 1996-03-19 | N K K Plant Kensetsu Kk | Long object storage device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56166462A (en) | 1981-12-21 |
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