JPS61243309A - Displacement measuring instrument - Google Patents

Displacement measuring instrument

Info

Publication number
JPS61243309A
JPS61243309A JP8430785A JP8430785A JPS61243309A JP S61243309 A JPS61243309 A JP S61243309A JP 8430785 A JP8430785 A JP 8430785A JP 8430785 A JP8430785 A JP 8430785A JP S61243309 A JPS61243309 A JP S61243309A
Authority
JP
Japan
Prior art keywords
connecting shaft
opening
hollow
hollow case
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8430785A
Other languages
Japanese (ja)
Inventor
Eiichi Kitajima
北島 栄一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP8430785A priority Critical patent/JPS61243309A/en
Publication of JPS61243309A publication Critical patent/JPS61243309A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746Linear encoders
    • G01D5/34761Protection devices, e.g. caps; Blowing devices
    • G01D5/34769Sealing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE:To prevent oil, dust and the like from invading the inside of a hollow casing by forming a labyrinthine groove wherein a connecting shaft and the side surface of an opening loosely fit each other in a longitudinal direction, said groove being formed between the connecting shaft and the side surface of the opening. CONSTITUTION:A hollow casing 1 and a slider 3 are fixed to the stationary and movable portions, respectively, of a machine tool or the like. When the slider 3 is displaced relative to the hollow casing 1, although the outside and inside of the hollow casing 1 are isolated from each other by a connecting shaft 5 and sealing members 19 and 20 anyhow, some gap is produced. However, since the connecting shaft 5 and a penetrated portion 18 loosely fit each other and a labyrinthine groove is formed between an opening 2 and a hollow space 4, a labyrinthine structure so formed prevents the invasion of dust and oil therethrough and further the invasion into the hollow space 4 is surely prevented.

Description

【発明の詳細な説明】 (発明の技術分野)   ゛ 本発明は工作機械等に取り付けて移動部材の相対移動の
検出および制御に使用する変位測定装置に関する。
DETAILED DESCRIPTION OF THE INVENTION (Technical Field of the Invention) The present invention relates to a displacement measuring device that is attached to a machine tool or the like and used to detect and control relative movement of moving members.

(発明の背景) 従来この種の変位測定装置には特公昭56−27803
@に示すものがある。
(Background of the invention) Conventionally, this type of displacement measuring device was developed by Japanese Patent Publication No. 56-27803
There are things shown in @.

このような変位測定装置の一例を概略的に第4図に示す
。同図は断面図であり、中空ケース1は長手方向(第4
図の紙面垂直方向)に沿って略方形の中空断面を有する
と共に長手方向の一側面に沿って略仝長に亘る開口2が
形成されている。スライダー3は中空ケース1の開口2
を貫通してその中空部4内に延設する連結1JIll1
5を一体に有してあり、中空ケース1の長子方向に相対
移動するようになっている。
An example of such a displacement measuring device is schematically shown in FIG. This figure is a sectional view, and the hollow case 1 is shown in the longitudinal direction (fourth direction).
An opening 2 is formed having a substantially rectangular hollow cross section along the direction perpendicular to the plane of the drawing, and extending substantially in length along one side in the longitudinal direction. The slider 3 is the opening 2 of the hollow case 1
A connection 1JIll1 extending through the hollow part 4 of the
5, and is configured to move relative to the longitudinal direction of the hollow case 1.

中空ケース1には開口2の両側から開口2を覆うように
、可撓性を有するシート状部材6.7が相対向して固定
され、シート状部材6,7によって所謂リップルシール
が構成されている。したがって、連結軸5はシート状部
材6,7に挟まれ、夫々のシート状部材6,7の間を割
込むようにして開口2内を長手方向に移動するようにな
っている。
Flexible sheet-like members 6 and 7 are fixed to the hollow case 1 from opposite sides of the opening 2 so as to cover the opening 2, and the sheet-like members 6 and 7 form a so-called ripple seal. There is. Therefore, the connecting shaft 5 is sandwiched between the sheet-like members 6 and 7, and moves in the longitudinal direction within the opening 2 so as to cut between the sheet-like members 6 and 7, respectively.

中空ケース1の中空部4内には中空ケース1とスライダ
ー3との相対移動量を検出する位置検出機構か装着され
ている。即ち、中空ケース1の中空部4内には第4図の
紙面に垂直な方向へ延びるカラス等の透明平面板からな
るスケール部材8が中空ケース1内の溝に嵌込まれゴム
ロッド9にて固定されでいる。このスケール部材8の一
側面には中空ケース1に沿って目盛が描かれている。ス
ライダー3より延設された連結軸5はスケール部材8の
近傍まで延びており、この先端部に位置検出機構の読取
り機構が取り付けられている。即ち、スケール部材8の
先端部には断面形状が口字上の読取り部材10がスケー
ル部材8に直行する2面に当接する摺動子11.12及
びバネにて付勢されたコロ13によってスケール部材8
に常に押圧され、この読取り部材10はスケール部材8
に案内されている。又、読取り部材10は連結軸5との
間に回転自在となるように取り付けられ、スケール部材
8の目盛面を挟んで一方に発光素子14を、他方にイン
デックス15と受光素子16とを右方る。
A position detection mechanism for detecting the amount of relative movement between the hollow case 1 and the slider 3 is installed in the hollow part 4 of the hollow case 1. That is, in the hollow part 4 of the hollow case 1, a scale member 8 made of a transparent flat plate such as a crow, which extends in a direction perpendicular to the paper surface of FIG. 4, is fitted into a groove in the hollow case 1 and fixed with a rubber rod 9. It's been done. A scale is drawn on one side of the scale member 8 along the hollow case 1. A connecting shaft 5 extending from the slider 3 extends to the vicinity of the scale member 8, and a reading mechanism of a position detecting mechanism is attached to the tip end of the connecting shaft 5. That is, at the tip of the scale member 8, a reading member 10 having a cross-sectional shape is mounted on the scale by sliders 11 and 12 that contact two surfaces perpendicular to the scale member 8, and rollers 13 biased by springs. Part 8
The reading member 10 is always pressed against the scale member 8.
are guided by. Further, the reading member 10 is rotatably attached to the connecting shaft 5, and the light emitting element 14 is placed on one side with the graduation surface of the scale member 8 in between, and the index 15 and the light receiving element 16 are placed on the other side on the right side. Ru.

この様に構成した変位測定装置において、相対移動する
一対の被測定物体の一方に中空ケース1を固着し、他方
にスライダー3を固着し、該被測定物体が相対移動する
と、これに伴って中空ケース1とスライダー3とが相対
移動し、インデックス151発光素子14及び受光素子
16を設ける読取り部材10もスケール部材8に対し相
対移動する。
In the displacement measuring device configured in this way, the hollow case 1 is fixed to one of a pair of objects to be measured that move relatively, and the slider 3 is fixed to the other. The case 1 and the slider 3 move relative to each other, and the reading member 10 provided with the index 151, the light emitting element 14, and the light receiving element 16 also moves relative to the scale member 8.

このとき、スケール部材8の目盛を形成する黒線等の光
を透過しない部分と黒線の形成されない光を透過する部
分との光の透過の違いに応じて受光素子16から正弦波
状の信号が得られ、この信号を矩形信号に波形成型して
計数することにより被測定物体の相対位置を検出する事
ができる。
At this time, a sinusoidal signal is generated from the light receiving element 16 in accordance with the difference in light transmission between a portion of the scale member 8 that does not transmit light, such as a black line, and a portion that transmits light without a black line. The relative position of the object to be measured can be detected by converting this signal into a rectangular signal and counting it.

(発明か解決しようとする問題点) しかしながら、この様な構造の変位測定装置にあっては
、中空ケース1とスライダー3が相対移動するとシート
状部材6,7の合せ目が連結軸5によって強制的に外側
に開かれるため、連結軸5の両端側に中空ケース1の内
部と外部とが連通ずる隙間か出来る。このため例えば、
変位測定装置を数値υj111工作機械等のフィードバ
ック装置として用いた場合、切削液の散乱する雰囲気中
に配置されることになるので該隙間から中空ケース1の
内部に油や塵等の異物が侵入し、これがスケール部材8
1発光素子14あるいは受光素子16等に付着して測定
精度の劣化を招来する問題があった。
(Problem to be solved by the invention) However, in a displacement measuring device having such a structure, when the hollow case 1 and the slider 3 move relative to each other, the joint between the sheet members 6 and 7 is forced by the connecting shaft 5. Since the connecting shaft 5 is opened outward, a gap is created at both ends of the connecting shaft 5 so that the inside and outside of the hollow case 1 communicate with each other. For this reason, for example,
When the displacement measuring device is used as a feedback device for a numerical value υj111 machine tool, etc., it will be placed in an atmosphere where cutting fluid is scattered, so foreign substances such as oil and dust may enter the hollow case 1 through the gap. , this is scale member 8
There is a problem in that the particles adhere to the light emitting element 14 or the light receiving element 16, resulting in deterioration of measurement accuracy.

尚、このことは上記光電式の変位測定装置に限らず、磁
気式等信の原理に基づいた変位測定装置でも同様に問題
である。
Note that this problem is not limited to the photoelectric displacement measuring device described above, but also applies to displacement measuring devices based on the principle of magnetic isometry.

(発明の目的) 本発明は、このような従来の問題点に鑑みてなされたも
ので、中空ケース内にスライダーの一端を挿入するため
に形成した開口から該中空ケースの内部へ油や塵等が侵
入するのを防止することができる変位測定装置を提供す
ることにある。
(Object of the Invention) The present invention has been made in view of the above-mentioned problems in the prior art. An object of the present invention is to provide a displacement measuring device that can prevent the intrusion of foreign substances.

(発明の概要) この目的を達成するため本発明は、スケール部材を内蔵
すると共に、該スケール部材の長手方向に開口を有する
中空ケースと、該開口を通して前記中空ケースの内部に
挿入され先端に前記スケール部材の目盛りを読取るため
の読取り部を有するスライダーと、前記開口を覆うよう
に相対向して設けられた一対の可撓性部材とを有する変
位測定装置において、前記連結軸と前記開口の側面との
間に、該連結軸と該開口の側面とが長手方向に沿って互
いに遊嵌する迷路状の溝を形成したことを技術要点とす
る。
(Summary of the Invention) In order to achieve this object, the present invention includes a hollow case that incorporates a scale member and has an opening in the longitudinal direction of the scale member, and a hollow case that is inserted into the hollow case through the opening and has a In a displacement measuring device having a slider having a reading section for reading the scale of a scale member, and a pair of flexible members provided facing each other so as to cover the opening, the connecting shaft and a side surface of the opening. The technical point is that a labyrinth-shaped groove is formed between the connecting shaft and the side surface of the opening in which the connecting shaft and the side surface of the opening loosely fit into each other along the longitudinal direction.

(実施例) 以下、本発明の一実施例を図面の簡単な説明する。(Example) Hereinafter, one embodiment of the present invention will be briefly described with reference to the drawings.

第1図は本発明の一実施例を示−す断面図でおる。FIG. 1 is a sectional view showing one embodiment of the present invention.

中空ケース1には、中空ケース1の中空部4まで貫通す
る開口2が長手方向に沿って略全長に亘って形成されて
いる。
In the hollow case 1, an opening 2 that penetrates to the hollow part 4 of the hollow case 1 is formed over substantially the entire length along the longitudinal direction.

スライダー3は中空ケース1の開口2を貫通してその中
空部4内に延設する連結軸5を一体に有しており、中空
ケース1の長手方向に相対移動するようになっている。
The slider 3 integrally has a connecting shaft 5 extending through the opening 2 of the hollow case 1 and into the hollow part 4 thereof, and is configured to move relative to the hollow case 1 in the longitudinal direction.

中空ケース1の中空部4内には中空ケース1とスライダ
ー3との相対移動量を検出する位置検出機構が装着され
ている。即ち、中空ケース1の中空部内には第1図の紙
面垂直な方向へガラス等の透明平行板からなるスケール
部材8が中空部4内の溝に嵌められゴムロッド9を介し
て固定されている。このスケール部材8の一側面には長
手方向に沿って目盛が描かれている。スライダー3より
延設された連結軸5はスケール部材8の近傍まで延びて
おり、この先端部には第4図に示した位置検出機構と同
様に読取り機構17が固着されている。即ち、読取り機
構17は第4図に示すように連結軸5に取り付けられた
読取り部材10.1と動子11,12)コロ13、発光
素子14、インデックス15、受光素子16で構成され
、発光素子14からの発光がスケール部材8とインデッ
クス15を通って受光素子16に受光されるようになっ
ている。
A position detection mechanism for detecting the amount of relative movement between the hollow case 1 and the slider 3 is installed in the hollow portion 4 of the hollow case 1 . That is, in the hollow part of the hollow case 1, a scale member 8 made of a transparent parallel plate made of glass or the like is fitted into a groove in the hollow part 4 and fixed via a rubber rod 9 in a direction perpendicular to the paper plane of FIG. A scale is drawn on one side of the scale member 8 along the longitudinal direction. A connecting shaft 5 extending from the slider 3 extends to the vicinity of the scale member 8, and a reading mechanism 17 is fixed to the tip thereof, similar to the position detecting mechanism shown in FIG. 4. That is, as shown in FIG. 4, the reading mechanism 17 is composed of a reading member 10.1 attached to the connecting shaft 5, movers 11, 12), rollers 13, a light emitting element 14, an index 15, and a light receiving element 16. Light emitted from the element 14 passes through the scale member 8 and the index 15 and is received by the light receiving element 16.

ここで第1図に示すように、連結軸5は複数のアングル
部を有する折れ曲がった断面形状をしており、この連結
軸5を開口2に沿って長手方向に移動可能に装置するた
めに、中空ケース1の外側と中空部4とをつなぐ開口2
の貫通部分18を連結軸5の断面形状に従って折れ曲が
った中空断面形状に形成し、連結軸5を所定の隙間間隔
て遊嵌している。
As shown in FIG. 1, the connecting shaft 5 has a bent cross-sectional shape with a plurality of angle parts, and in order to make the connecting shaft 5 movable in the longitudinal direction along the opening 2, An opening 2 connecting the outside of the hollow case 1 and the hollow part 4
The penetrating portion 18 is formed to have a hollow cross-sectional shape bent according to the cross-sectional shape of the connecting shaft 5, and the connecting shaft 5 is loosely fitted with a predetermined gap.

この結果、連結軸4と貫通部分18との間に迷路状の溝
が形成されている。
As a result, a labyrinth-like groove is formed between the connecting shaft 4 and the penetrating portion 18.

中空ケース1には、開口2の両側から開口2を覆うよう
に可撓性を有するシート部材19.20が相対向して固
定されて所謂リップルシールを構成し、更に、貫通部分
18の中空部4側にも可撓性を有するシート部材21.
22が相対向して固定されて所謂リップルシールを構成
している。
Flexible sheet members 19 and 20 are fixed to the hollow case 1 facing each other so as to cover the opening 2 from both sides of the opening 2 to form a so-called ripple seal. Sheet member 21 which also has flexibility on the 4th side.
22 are fixed facing each other to form a so-called ripple seal.

尚、連結軸5と貫通部分18の側面にて形成される迷路
状の溝の幅は、読取り機構17がスケール部材8に案内
されて移動する際、案内面が傾斜している等により中空
ケース1に対してスライダー3が傾いて水平方向に移動
した場合の移動許容範囲を定めており、その結果、貫通
部分18の側面は連結軸5の横移動の制限壁としても動
いている。
Note that the width of the labyrinth-shaped groove formed on the side surface of the connecting shaft 5 and the penetrating portion 18 is such that when the reading mechanism 17 is guided by the scale member 8 and moves, the guide surface is inclined, etc. As a result, the side surface of the penetrating portion 18 also acts as a limit wall for the lateral movement of the connecting shaft 5.

このような構成であるから、例えば、中空ケース1を工
作機械等の固定部に、スライダー3を可動部に夫々固定
し中空ケース1に対しスライダー3を相対移動すれば、
連結軸5とシール部材1つ。
With such a configuration, for example, if the hollow case 1 is fixed to a fixed part of a machine tool and the slider 3 is fixed to a movable part, and the slider 3 is moved relative to the hollow case 1,
5 connecting shafts and 1 sealing member.

20とによって中空ケース1の外部と内部とは一応遮断
されるが、従来同様、若干の隙間が生じることは避けら
れない。しかしながら、連結軸5と貫通部分18との遊
嵌で開口2と中空部4との間には迷路状の溝が形成され
るので、この迷路構造か塵や油の侵入を防止し、更に、
内側のシート状部材21.22にて中空部4への侵入か
確実に防止されている。
20, the outside and the inside of the hollow case 1 are temporarily cut off, but as in the conventional case, it is inevitable that a slight gap will occur. However, since a labyrinth-like groove is formed between the opening 2 and the hollow part 4 due to the loose fit between the connecting shaft 5 and the penetrating portion 18, this labyrinth structure prevents the intrusion of dust and oil, and furthermore,
Intrusion into the hollow portion 4 is reliably prevented by the inner sheet-like members 21 and 22.

第2図は本発明の他の実施例を示す断面図である。スケ
ール部材8.ゴムロッド9及び読取り懇構17から構成
される装置検出機構については第1図と同様に構成され
ているので説明は省略する。
FIG. 2 is a sectional view showing another embodiment of the present invention. Scale member 8. The device detection mechanism composed of the rubber rod 9 and the reading mechanism 17 is constructed in the same manner as shown in FIG. 1, and therefore its explanation will be omitted.

連結軸5は第1図の場合よりも更に多数のアングル部を
有して折返し部23を形成している。そして、貫通部分
18には折返し部23て形成される凹段部に遊嵌するよ
うに突出する第1の防油堤24が形成されている。更に
、中空ケース1の中空部4側に第2の防油堤25が形成
されている。
The connecting shaft 5 has a larger number of angle portions to form folded portions 23 than in the case of FIG. A first oil barrier 24 is formed in the penetrating portion 18 and protrudes so as to loosely fit into the recess formed by the folded portion 23 . Furthermore, a second oil barrier 25 is formed on the hollow part 4 side of the hollow case 1.

したがって、連結軸5と貫通部分18との遊嵌により迷
路状の溝が形成されている。
Therefore, a labyrinth-shaped groove is formed by the loose fit between the connecting shaft 5 and the penetrating portion 18.

中空ケース1の開口2には開口2を覆うように可撓性を
有するシート部材19.20か相対向して固定されてい
る。
Flexible sheet members 19 and 20 are fixed to the opening 2 of the hollow case 1 so as to cover the opening 2 and face each other.

尚、連結軸5と貫通部分18の側面にて形成される迷路
状の溝の幅は、第1図の実施例に示すように、読取り機
構17がスケール部材6に案内されで移動する際、案内
面か傾斜している等により中空ケース1に対してスライ
ダー3が傾いて水平方向に移動した場合の移動許容範囲
を定めてあり、その結果、貫通部分18の側面は連結軸
5の横移動の制限壁としても働いている。
Note that the width of the labyrinth-shaped groove formed on the side surface of the connecting shaft 5 and the penetrating portion 18 is determined by the width of the labyrinth-shaped groove formed on the side surface of the connecting shaft 5 and the penetrating portion 18 when the reading mechanism 17 moves while being guided by the scale member 6, as shown in the embodiment of FIG. The allowable range of movement is determined when the slider 3 is tilted with respect to the hollow case 1 and moved horizontally due to the guide surface being inclined, etc., and as a result, the side surface of the penetrating portion 18 will prevent the lateral movement of the connecting shaft 5. It also acts as a limiting wall.

この様に、貫通部分18に防油堤24.25を形成し、
連結軸5の折返し部23とで迷路状の溝を形成したので
、数値制御工作機械等に取り付けて使用しても切削油等
の中空ケース1内部への侵入を確実に防止することが出
来る。
In this way, the oil barrier 24.25 is formed in the penetrating portion 18,
Since a labyrinth-shaped groove is formed with the folded portion 23 of the connecting shaft 5, it is possible to reliably prevent cutting oil and the like from entering the inside of the hollow case 1 even when used in a numerically controlled machine tool or the like.

又、連結軸5と貫通部18との間に形成される迷路状の
溝のうち、中空部4側に通じる溝の方が開口2側に通じ
る溝よりも高い位置になっているので、たとえシート部
材19.20の隙間から油等が侵入しても、中空部4側
の溝を越える高ざまで溜ることはなく再びシート部材1
9.20の隙間から外部に排出されることになる。
In addition, among the labyrinth-shaped grooves formed between the connecting shaft 5 and the penetration part 18, the groove leading to the hollow part 4 side is located at a higher position than the groove leading to the opening 2 side. Even if oil or the like enters through the gap between the sheet members 19 and 20, it will not accumulate to a height that exceeds the groove on the hollow part 4 side, and the sheet member 1 will re-enter.
It will be discharged to the outside through the gap at 9.20.

又、迷路状の溝で油の侵入を阻止することができるので
、シート部材の数を減らすことが可能となり、連結軸と
シート部材の接触摩擦を減らすことができる。このため
、スライダーの摺動抵抗を軽減しなければならない機械
等に使用する場合に利点がある。
Furthermore, since the labyrinth-shaped groove can prevent oil from entering, it is possible to reduce the number of sheet members, and the contact friction between the connecting shaft and the sheet member can be reduced. Therefore, it is advantageous when used in a machine or the like in which the sliding resistance of the slider must be reduced.

第3図は更に他の実施例を示した断面図である。FIG. 3 is a sectional view showing still another embodiment.

尚、位置検出機構については第1図と第2図と同様の構
成であるので、説明については省略する。
Note that the position detection mechanism has the same configuration as in FIGS. 1 and 2, so a description thereof will be omitted.

中空ケース1の貫通部分18の側面には、両側から内側
に向けて交互に防油堤26.27が突出し、連結軸5に
はこれらの防油堤26.27を所定の隙間間隔で取り囲
むように凹嵌部28.29が形成され、でいる。そして
、防油堤26.27と凹嵌部28.29が夫々遊嵌し、
開口2と中空部4との貫通部分18の間に迷路上の溝が
形成され、中空ケース1と連結軸5とが開口2の長手方
向に相対移動するようになっている。
Oil barriers 26 and 27 alternately protrude inward from both sides of the side surface of the penetrating portion 18 of the hollow case 1, and the connecting shaft 5 is provided with oil barriers 26 and 27 so as to surround these barriers 26 and 27 at predetermined intervals. Recessed fitting portions 28 and 29 are formed in and exposed. Then, the oil barrier 26.27 and the recessed fitting portions 28.29 fit loosely, respectively.
A labyrinthine groove is formed between the opening 2 and the penetrating portion 18 of the hollow portion 4, so that the hollow case 1 and the connecting shaft 5 can move relative to each other in the longitudinal direction of the opening 2.

尚、第1図、第2図の実施例に示すように、連結fII
II5と貫通部分18の側面にて形成される迷路状の溝
の幅は、読取り機構17がスケール部材6に案内されて
移動する際、案内面が傾斜している等により中空ケース
1に対してスライダー3が傾いて水平方向に移動した場
合の移動許容範囲を定めており、その結果、貫通部分1
8の側面は連結軸5の横移動の制限壁としても動いてい
る。
In addition, as shown in the embodiments of FIGS. 1 and 2, the connection fII
When the reading mechanism 17 is guided by the scale member 6 and moves, the width of the labyrinth-like groove formed on the side surface of the II 5 and the penetrating portion 18 is determined by the width of the labyrinth-like groove formed by the side surface of the II 5 and the penetrating portion 18. The permissible range of movement when the slider 3 tilts and moves horizontally is determined, and as a result, the penetrating portion 1
The side surface of 8 also acts as a limiting wall for the lateral movement of the connecting shaft 5.

このように、防油堤26.27と凹嵌部28゜29とて
迷路上の溝を形成したので、外部からの油や塵等の侵入
を確実に防止することができる。
In this way, since the oil barrier 26, 27 and the recessed fitting portions 28 and 29 form a maze-like groove, intrusion of oil, dust, etc. from the outside can be reliably prevented.

又、連結軸5と貫通部18との間に形成される迷路状の
溝のうち、中空部4側に通じる溝の方が開口2側に通じ
る溝よりも高い位置になっているので、たとえシート部
材19.20の隙間から油等が侵入しても、中空部4側
の溝を越える高ざまで溜ることはなく再びシート部材1
9.20の隙間から外部に排出されることになる。
In addition, among the labyrinth-shaped grooves formed between the connecting shaft 5 and the penetration part 18, the groove leading to the hollow part 4 side is located at a higher position than the groove leading to the opening 2 side. Even if oil or the like enters through the gap between the sheet members 19 and 20, it will not accumulate to a height that exceeds the groove on the hollow part 4 side, and the sheet member 1 will re-enter.
It will be discharged to the outside through the gap at 9.20.

又、迷路状の溝で油の侵入を阻止することができるので
、シート部材の数を減らすことが可能となり、連結軸と
シート部材の接触摩擦を減らすことができる。このため
、スライダーの摺動抵抗を軽減しなければならない機械
等に使用する場合に利点がおる。
Furthermore, since the labyrinth-shaped groove can prevent oil from entering, it is possible to reduce the number of sheet members, and the contact friction between the connecting shaft and the sheet member can be reduced. Therefore, it is advantageous when used in machines, etc. in which the sliding resistance of the slider must be reduced.

尚、上述の各実施例の溝の形状は種々変更が可能であり
、ここで示した形状に限るものではない。
Note that the shapes of the grooves in each of the above embodiments can be modified in various ways, and are not limited to the shapes shown here.

又、各実施例は光学式の変位測定装置について示したが
、磁気式等のその他の方式によるものであっても構わな
い。
Furthermore, although each embodiment has been described using an optical displacement measuring device, other methods such as a magnetic method may be used.

(考案の効果) 以上説明したように本発明によれば、外部から中空ケー
ス内への油や塵等の異物の侵入を阻止することができる
(Effects of the Invention) As explained above, according to the present invention, it is possible to prevent foreign substances such as oil and dust from entering into the hollow case from the outside.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す断面図、第2図は本発
明の他の実施例を示す断面図、第3図は更に伯の実施例
を示す断面図、第4図は従来の変位測定装置の構成を示
す断面図である。 1:中空ケース 2:開口 3ニスライダー 4:中空部 5:連結軸 6、7.19.20.21.22 :シート状部材8ニ
スケール部材 9:ゴムロッド 10:読取り部材 17:読取り機構 181貫通部分 23:折返し部 24、25.26.27 :防油堤 28.29:凹嵌部
Fig. 1 is a sectional view showing one embodiment of the present invention, Fig. 2 is a sectional view showing another embodiment of the invention, Fig. 3 is a sectional view showing another embodiment of the invention, and Fig. 4 is a sectional view showing a conventional FIG. 2 is a cross-sectional view showing the configuration of a displacement measuring device. 1: Hollow case 2: Opening 3 Nislider 4: Hollow part 5: Connecting shaft 6, 7.19.20.21.22: Sheet member 8 Niscale member 9: Rubber rod 10: Reading member 17: Reading mechanism 181 penetration part 23: Turned part 24, 25.26.27: Oil dike 28.29: Recessed part

Claims (2)

【特許請求の範囲】[Claims] (1)スケール部材を内蔵すると共に、該スケール部材
の長手方向に開口を有する中空ケースと、前記開口を通
して前記中空ケースの内部に挿入され、先端に前記スケ
ール部材の目盛りを読取る為の読み取り機構を有し、終
端にスライダーを固定した連結軸と、 前記開口の両側から該開口を覆うように相対向して設け
られた可撓性を有するリップルシールとを有する変位測
定装置において、 前記間口の側面と前記連結軸との間に、該開口の長手方
向に沿って前記中空ケースと前記連結軸が遊嵌すること
で形成される迷路状の溝を備えたこを特徴とする変位測
定装置。
(1) A hollow case containing a scale member and having an opening in the longitudinal direction of the scale member, and a reading mechanism that is inserted into the hollow case through the opening and reads the scale of the scale member at the tip. a connecting shaft having a slider fixed to the end thereof; and flexible ripple seals facing each other so as to cover the opening from both sides of the opening; and the connecting shaft, comprising a labyrinth-shaped groove formed by loosely fitting the hollow case and the connecting shaft along the longitudinal direction of the opening.
(2)特許請求の範囲第1項記載の変位測定装置におい
て、 前記迷路状の溝は、前記スケール部材のスケール面に直
行する方向及び該方向と前記スケール面とに直行する方
向に、前記中空ケースと前記連結軸との相対移動量を規
制する所定の隙間間隔を有することを特徴とする変位測
定装置。
(2) In the displacement measuring device according to claim 1, the labyrinth-shaped groove is formed in the hollow space in a direction perpendicular to the scale surface of the scale member and in a direction perpendicular to the direction and the scale surface. A displacement measuring device characterized by having a predetermined gap interval that regulates the amount of relative movement between the case and the connecting shaft.
JP8430785A 1985-04-19 1985-04-19 Displacement measuring instrument Pending JPS61243309A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8430785A JPS61243309A (en) 1985-04-19 1985-04-19 Displacement measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8430785A JPS61243309A (en) 1985-04-19 1985-04-19 Displacement measuring instrument

Publications (1)

Publication Number Publication Date
JPS61243309A true JPS61243309A (en) 1986-10-29

Family

ID=13826832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8430785A Pending JPS61243309A (en) 1985-04-19 1985-04-19 Displacement measuring instrument

Country Status (1)

Country Link
JP (1) JPS61243309A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0372193A2 (en) * 1988-12-03 1990-06-13 Dr. Johannes Heidenhain GmbH Encapsulated position-measuring device
DE4017858A1 (en) * 1990-06-02 1991-12-12 Heidenhain Gmbh Dr Johannes ENCLOSED MEASURING DEVICE
JPH0755403A (en) * 1993-07-15 1995-03-03 Dr Johannes Heidenhain Gmbh Sealed type measuring device
JP2019117061A (en) * 2017-12-26 2019-07-18 ファナック株式会社 Rotary encoder and manufacturing method of rotary encoder
WO2020017304A1 (en) * 2018-07-17 2020-01-23 三菱電機株式会社 Reflective optical encoder and motor, and reflective optical encoder manufacturing method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0372193A2 (en) * 1988-12-03 1990-06-13 Dr. Johannes Heidenhain GmbH Encapsulated position-measuring device
DE4017858A1 (en) * 1990-06-02 1991-12-12 Heidenhain Gmbh Dr Johannes ENCLOSED MEASURING DEVICE
JPH0755403A (en) * 1993-07-15 1995-03-03 Dr Johannes Heidenhain Gmbh Sealed type measuring device
JP2019117061A (en) * 2017-12-26 2019-07-18 ファナック株式会社 Rotary encoder and manufacturing method of rotary encoder
WO2020017304A1 (en) * 2018-07-17 2020-01-23 三菱電機株式会社 Reflective optical encoder and motor, and reflective optical encoder manufacturing method
JPWO2020017304A1 (en) * 2018-07-17 2020-12-17 三菱電機株式会社 Reflective optical encoder and motor, and manufacturing method of reflective optical encoder
KR20210016625A (en) * 2018-07-17 2021-02-16 미쓰비시덴키 가부시키가이샤 Reflective optical encoder and motor, and method of manufacturing reflective optical encoder
US11609106B2 (en) 2018-07-17 2023-03-21 Mitsubishi Electric Corporation Reflective optical encoder comprising a hub with an adhesive surface with a step structure

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