JPS6123746Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a flow rate regulator for use when the flow rate of fluid flowing through a flow path is minute.

2. Description of the Related Art Conventionally, a needle valve as shown in FIG. 1 of the accompanying drawings has generally been used as a regulator used to adjust the flow rate of fluid. This is a valve body 1, a needle 2 having a thread on the outer periphery of the base end, and a sealing material 3.
The valve body 1 is slidably attached to the valve body 1 by the screw, and its slanted end portion is inserted into the orifice 4, and both sides of the orifice 4 communicate with a flow path 5 provided in the valve body 1.

In such a conventional flow rate regulator, the needle 2 needs to slide accurately in the orifice 4, but this is somewhat difficult due to the rotation of the screw mentioned above, and the flow rate is small. To,
Leakage of fluid from the joint with the seal portion 3 due to sliding of the needle 2 also has a large effect, and especially when the output side flow path 5 is in a vacuum, the above-mentioned leakage often becomes a problem. Furthermore, in order for the flow rate to be minute, it is necessary to make the fluid passage area between the orifice 4 and the needle 2 extremely small, which will only worsen the reproducibility of the flow rate adjustment. However, it had many drawbacks such as being significantly affected by even a very small amount of dust.

The present invention eliminates these conventional drawbacks and allows stable use over a long period of time, even if the output side is a vacuum and the input side is under considerable positive pressure, or even if the flow rate is extremely small. The purpose is to obtain a minute flow rate regulator.

Hereinafter, the present invention will be explained based on FIG. 2 of the accompanying drawings showing one embodiment thereof.

In the figure, 11 is a hollow member that forms a cylinder, 12 is a spool that is a rod-shaped member that is inserted with a predetermined fit and fit tolerance between the inner diameter of the cylinder 11, and 13 is a hollow member that forms a cylinder 11. It is a flange attached to both ends via a sealing material 14 such as an O-ring, and a flow passage 15 is provided.

Since the present invention is configured in this way, the fluid flows into the cylinder 11 from one of the flow passages 15,
Next, a flow rate corresponding to this gap 16 flows through a predetermined small gap 16 between the inner diameter of the cylinder 11 and the outer diameter of the spool 12, and flows out from the other flow path 15.

In addition, in this embodiment, since the shape is symmetrical, the fluid may flow in or out from either side, and the flange can be attached as well.
The flange 1 may be mounted by screwing as in the embodiment or by mounting bolts.
3 to support the spool 12.

Further, the spool 12 may be attached to one flange 13, and furthermore, the cylinder 11 and the spool 12 may be made of the same material, or the spool 12 may be made of a material different from the cylinder 11, for example. , metals such as a combination of steel and copper alloy, or one metal and the other organic material; 16 may be set. Furthermore, the length of the spool may be made shorter than the length of the fitted part of the cylinder 11 in order to change the flow resistance by changing the fitted length between the inner diameter of the cylinder 11 and the spool 12. good.

Furthermore, in order to change the flow rate, a plurality of spools with different diameters or lengths are prepared, and depending on the required flow rate, a spool corresponding to the required flow rate is selected from the prepared spools and inserted into the cylinder 11 in exchange. Alternatively, a plurality of regulators of the present invention with various fitting tolerances, that is, clearances 16, may be provided in parallel, and the regulators may be selectively adjusted by operating a switching valve such as a Kotoku. The flow rate may be selected by selecting one of them.

Since the minute flow rate regulator of the present invention is configured and operates in this way, any minute flow rate regulator can
It has an extremely simple structure, is easy to assemble and disassemble, and since it has no sliding parts, there is no leakage, and it not only provides a flow regulator with high precision and extremely good reproducibility. , it can be used stably for a long period of time, and since the fluid flows along the inner circumferential surface of the cylinder, it has many effects such as not directly causing clogging even if dust etc. enters. are doing.

[Brief explanation of the drawing]

FIG. 1 is a vertical cross-sectional view of a needle valve conventionally used for flow rate adjustment, and FIG. 2 is a vertical cross-sectional view of a minute flow rate regulator showing an embodiment of the present invention. 11... Hollow member (cylinder), 12... Rod-shaped member (spool), 13... Flange, 14...
Seal material, 15...Flow path, 16...Gap.

Claims (1)

[Claims for Utility Model Registration] (1) A hollow member having a passage through it, a rod-shaped member inserted into the passage of the hollow member with a selected fit and fit tolerance, and a rod-shaped member inserted into the passage of the hollow member with a selected fit and fit tolerance; It is composed of a flange that is arranged so as to be able to come into contact with each other and has a function of sealing the opening of the hollow member and connecting the flow path of the hollow member with an external flow path,
A minute flow regulator, characterized in that fluid is caused to flow through a gap between the hollow member and the rod-shaped member. (2) The minute flow rate regulator according to claim 1, wherein the gap is provided in a hollow member in which a rod-shaped member having various fitting tolerances can be selectively attached to and removed from the hollow member. (3) The minute flow rate regulator according to claim 1, wherein the gap is obtained by the difference in thermal expansion between the hollow member and the rod-shaped member. (4) The minute flow rate according to claim 1 of the utility model registration claim, in which the gap is obtained by the difference in coefficient of thermal expansion between the hollow member and the rod-shaped member, one of which is made of a metal material and the other of which is an organic material. regulator. (5) Scope of Utility Model Registration Claim No. 1 in which the gap is obtained by selectively switching between multiple hollow members and rod-shaped members with different gaps arranged in parallel.
Micro flow regulator as described in section.