JPS612369A - Detector for displacement - Google Patents

Detector for displacement

Info

Publication number
JPS612369A
JPS612369A JP12208284A JP12208284A JPS612369A JP S612369 A JPS612369 A JP S612369A JP 12208284 A JP12208284 A JP 12208284A JP 12208284 A JP12208284 A JP 12208284A JP S612369 A JPS612369 A JP S612369A
Authority
JP
Japan
Prior art keywords
strain
elastic plate
resistor
bending
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12208284A
Other languages
Japanese (ja)
Inventor
Hiroo Shiozu
塩津 弘雄
Yuji Matoba
的場 有治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Engineering Corp
Original Assignee
NKK Corp
Nippon Kokan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NKK Corp, Nippon Kokan Ltd filed Critical NKK Corp
Priority to JP12208284A priority Critical patent/JPS612369A/en
Publication of JPS612369A publication Critical patent/JPS612369A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To detect displacement by strain only in the direction of pull with high accuracy by fixing two OMEGA-shaped elastic plates, to which resistors for strain gages are fastened and which have different shapes, to a pedestal. CONSTITUTION:The ratio of the sensitivity of strain of the direction of pull to the direction of bending is increased extremely in order to easily compensate a detecting value by strain in the direction of bending regarding the OMEGA-shaped forms of an elastic plate 1 and a second elastic plate 4. A resistor 2a and a resistor 5a as strain gages are stuck to each curved surface section of the elastic plate 1 and the second elastic plate 4. Only a strain value of either of the direction of pull, the direction of compression or the direction of bending is detected by arithmetically operating a synthetic detecting value obtained from outputs from the strain gages.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、ストレインゲージを使用して変位を検出する
変位検出装置に関し、特に被測定体がこの変位検出装置
に対して引張p方向と曲げ方向の変位が混在する場合、
上記ストレインケージの検出値を補正して、上記の引張
多方向の変位量のみを高精度に検知できる変位検出装置
に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a displacement detection device that detects displacement using a strain gauge. When displacements of are mixed,
The present invention relates to a displacement detection device that can correct the detected value of the strain cage and detect only the amount of displacement in multiple tensile directions with high accuracy.

〔従来技術〕[Prior art]

従来のこの種の変位検出装置で、曲面にストレインゲー
ジを貼付して形成された、いわゆるΩ形変位検出装置と
しては第3図に示すものがあった。
A conventional displacement detection device of this kind, which is a so-called Ω-shaped displacement detection device formed by attaching a strain gauge to a curved surface, is shown in FIG.

図において、(1)は弾性板で、ペリラムカッパー等の
弾性の高い金属材料等で形成されている。(2)はスト
レインゲージ、(2a)はこのストレインゲージ(2)
の抵抗体で、ニッケル合金等の極細の電気抵抗線、(2
b)はこの抵抗体(2,a)の両端子よシ引出され、抵
抗体(2a)の抵抗値をホイートストーンブリッジの辺
抵抗回路、オツシログラフ入力等に接続するリード線で
ある。(3)は図示のない変位を計測すべき被計測体に
固着されている台座である。また、図中のδは上記の引
張り方向のひずみ量を、0点は同じく曲げ方向の変位の
中心、Rはこの曲げ方向の変位00点を中心とした抵抗
体(2m)位置の曲率半径、αは0点を中心とした曲げ
方向の変化角を示す。
In the figure, (1) is an elastic plate, which is made of a highly elastic metal material such as perillum copper. (2) is a strain gauge, (2a) is this strain gauge (2)
A resistor with an ultra-fine electrical resistance wire such as nickel alloy, (2
Lead wire b) is drawn out from both terminals of the resistor (2, a) and connects the resistance value of the resistor (2a) to the side resistance circuit of the Wheatstone bridge, the oscillograph input, etc. (3) is a pedestal (not shown) fixed to the object to be measured whose displacement is to be measured. In addition, δ in the figure is the amount of strain in the above-mentioned tensile direction, the 0 point is the center of displacement in the bending direction, and R is the radius of curvature of the resistor (2 m) position centered on the 00 point of displacement in the bending direction. α represents the angle of change in the bending direction around the 0 point.

次に、作用について説明する。まず、ストレインゲージ
(2)のひずみ感度は、抵抗体(2a)が固着されてい
る弾性板(1)の厚さ、弾性係数E1断面係数I、Ω形
を形成している曲面の曲率半径、直線部、さらに曲げ方
向の変位を受ける場合は、この曲げ方向の変位の中心0
から上記の曲率半径R等の寸法によって定められる@ ここで、上記の諸条件で定められる引張多方向のひずみ
感度をS11曲げ方向のひずみ感度を82・抵抗体(2
a)のひずみ値を引張多方向はε1、曲げ方向はりとす
ると、 εl−δ’ 81  8M−α−SZ となる。
Next, the effect will be explained. First, the strain sensitivity of the strain gauge (2) is determined by the thickness of the elastic plate (1) to which the resistor (2a) is fixed, the elastic modulus E1, the section modulus I, and the radius of curvature of the curved surface forming the Ω shape. If the straight part is subjected to displacement in the bending direction, the center of displacement in the bending direction is 0.
is determined by the dimensions such as the radius of curvature R, etc.@Here, the strain sensitivity in tensile multi-directions determined by the above conditions is S11, the strain sensitivity in the bending direction is 82, and the resistor (2
Assuming that the strain value in a) is ε1 in the tensile direction and beam in the bending direction, it becomes εl−δ′ 81 8M−α−SZ.

したがって引張多方向のCトずみと、曲げ方向のひずみ
を同時に受けた場合の抵抗体(2a)のひずみ値εは、 ε=εl+ε2=δ・St十α・S! ・・・・・・(
1)となる。
Therefore, the strain value ε of the resistor (2a) when subjected to C strain in multiple tensile directions and strain in the bending direction at the same time is as follows: ε=εl+ε2=δ・St+α・S!・・・・・・(
1).

従来のΩ型のストレインゲージを用いた変位検出装置は
以上のように構成されているので、上記の引張り方向の
変位δだけを正確に検出したい場合でも、上記(1)式
の曲げ方向のひずみ値α・S!が引張り方向のひずみ検
出値に加算されるために、高精度の変位の検出が困難で
あると言う欠点があった。
Since the conventional displacement detection device using an Ω-type strain gauge is configured as described above, even when it is desired to accurately detect only the displacement δ in the above-mentioned tensile direction, the strain in the bending direction expressed in equation (1) above can be detected accurately. Value α・S! is added to the detected strain value in the tensile direction, which has the disadvantage that it is difficult to detect displacement with high accuracy.

〔発明の目的〕[Purpose of the invention]

本発明は、以上のよう々従来のものの欠点を除去するた
めに々されたもので、形状の異々る弾性板を2種類設け
、しかも、おのおのを引張りによるひずみ量と曲げによ
るひずみ蕾による上記のひずみ感度の差を予じめ認めら
れるようなΩ状を形成させることによって、高精度の引
張り方向のみのひずみによる変位検出装置を得ることを
目的とするものである。
The present invention has been developed in order to eliminate the drawbacks of the conventional ones as described above, and has two types of elastic plates with different shapes. The object of this invention is to obtain a highly accurate displacement detection device based on strain only in the tensile direction by forming an Ω shape in which a difference in strain sensitivity can be recognized in advance.

〔発明の概要〕[Summary of the invention]

本発明は上記の目的を達成するためになされたもので、
形状の異なる大小2個の弾性板、これらの弾性機にそれ
ぞれ固着された2個のストレインゲージの抵抗体及び前
記2個の弾性板の両端をそれぞれ固定する一双の台座を
備え、上記ストレインゲージの出力より得た合成検出値
を演算するととによって引張多方向、圧縮方向あるいは
曲げ方向のいずれかの方向のひずみ値のみを検知するよ
うにした変位検出装置を提供するものである。
The present invention has been made to achieve the above objects,
The strain gauge is equipped with two elastic plates of different sizes, two strain gauge resistors fixed to each of these elastic machines, and a pair of pedestals for fixing both ends of the two elastic plates, respectively. The present invention provides a displacement detecting device that detects only strain values in any one of the tensile directions, the compressive direction, and the bending direction by calculating a composite detected value obtained from the output.

〔発明の実施例〕[Embodiments of the invention]

以下、この発明にょる一実施例を図によって説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

第1図において、(1)は弾性板、(2)はストレイン
ゲージ、(2a)は抵抗体、(2b)はり一ド#i+、
(3)は台座で、従来例と相当部分を示す。(4)は第
2のり・11性板、(5)は第2のストレインゲージ、
(5a)は第2の抵抗体、(5b)は、第2の抵抗体(
5a)の1′+iA’:子よりの第2のリード線である
In Fig. 1, (1) is an elastic plate, (2) is a strain gauge, (2a) is a resistor, (2b) is a beam #i+,
(3) is a pedestal, and shows a portion corresponding to the conventional example. (4) is the second glue/eleventh plate, (5) is the second strain gauge,
(5a) is the second resistor, (5b) is the second resistor (
5a) 1'+iA': This is the second lead wire from the child.

上記弾性板(1)4−・よび第2の弾性板(4)のΩ状
の形状は、曲げ方向のひずみによる検出値の補正を容易
にするため、引張り方向と曲げ方向とのひずみ感度の比
が秒カ多くなるようにするのが望オしい。
The Ω-shaped shape of the elastic plate (1) 4- and the second elastic plate (4) makes it easy to correct the detected value due to the strain in the bending direction, so that the strain sensitivity in the tensile direction and the bending direction can be easily corrected. It is desirable to increase the ratio by seconds.

1次、当然のことながら、抵抗体(2a)、第2の抵抗
体(5a)は弾性板(1)、第2の弾性板(4)のそれ
ぞれの曲面部に貼付すると、ひずみに対する抵抗体(2
a)、第2の抵抗体(5s)のそれぞれの電気抵抗値変
化がi#:適条件となる。
As a matter of course, when the primary resistor (2a) and the second resistor (5a) are attached to the curved portions of the elastic plate (1) and the second elastic plate (4), they become resistors against strain. (2
a), the change in the electrical resistance value of each of the second resistors (5s) becomes i#: suitable condition.

上記の弾性板(1)と第2の弾性板(4)のΩ形の形状
を定めた実験値を第2図(イ)、(ロ)に示す。例えば
弾性板(1)の直線部りを5閣、曲率半径rを35m。
Experimental values for determining the Ω-shaped shapes of the elastic plate (1) and the second elastic plate (4) are shown in FIGS. 2(A) and 2(B). For example, the straight part of the elastic plate (1) is 5 m, and the radius of curvature r is 35 m.

第2の弾性板(4)の直線部りを35鴫、曲率半径r1
5勧とすゐと、それぞれの感度は、引張シひずみの場合
で弾性板(1)は1183μに1第2の弾性板(4)は
1137 x/m 、曲げによるひずみは弾性板(1)
が582μ/2°、第2の弾性板(4)が625μ/2
゜となって、引張シの場合と曲げの場合との感度比が約
2:1と々った。しかし実際には弾性板(1)と第2の
弾性板(4)との曲面部が寸法的に重なシ合うために、
弾性板(1)、と第2の弾性板(4)のそれぞれの直線
部L、曲率半径rを20mm、55mおよび45 mg
 、40 mと選択した結果、感度は弾性板(1)では
365 tt/m、325μ/2°、第2の弾性板(4
)では360μ/m、  345μ/2°を得て、感度
比が約1:1となった。
The straight part of the second elastic plate (4) is 35mm, the radius of curvature is r1
The sensitivities of each of the 5-sensitivity and water are 1183 μ for the elastic plate (1) for tensile strain, 1137 x/m for the second elastic plate (4), and 1137 x/m for the elastic plate (1) for strain due to bending.
is 582 μ/2°, and the second elastic plate (4) is 625 μ/2
The sensitivity ratio between the tensile and bending cases was approximately 2:1. However, in reality, the curved surfaces of the elastic plate (1) and the second elastic plate (4) overlap dimensionally, so
The linear portion L and the radius of curvature r of the elastic plate (1) and the second elastic plate (4) are 20 mm, 55 m, and 45 mg, respectively.
, 40 m, the sensitivity is 365 tt/m and 325 μ/2° for the elastic plate (1), and the sensitivity for the second elastic plate (4
) obtained 360μ/m and 345μ/2°, giving a sensitivity ratio of approximately 1:1.

次に作用について説明する。上記に例を挙げて説明した
弾性板(1)および第2の弾性板(4)のΩ形の寸法に
基づき、抵抗体(2&)と抵抗体(5a)における引張
り方向、曲げ方向のそれぞれのひずみ感度をSδ1+S
α1 、Sδ1s8α、とし、抵抗体(2a)、第2の
抵抗体(5a)の総ひずみ値をそれぞれεI 、ε2と
すると、 ε1−δ・Sδl+α・Sαl   ・・・・・・(2
)ε2=δ・Sδ2+α・Sα2   ・・・・・・(
3)となるので、この(z)、 (3)式のSα1とS
α冨を実験値等で低値の常数として求めておけば、両式
からαを消去できるので、εl、ε2の適切な演算を行
うことによって引張多方向のみのひずみ量δの正確な値
が得られる。
Next, the effect will be explained. Based on the Ω-shaped dimensions of the elastic plate (1) and the second elastic plate (4) explained above with reference to the example, the tensile direction and bending direction of the resistor (2 &) and the resistor (5a) are determined respectively. Strain sensitivity is Sδ1+S
α1, Sδ1s8α, and the total strain values of the resistor (2a) and the second resistor (5a) are εI and ε2, respectively, then ε1−δ・Sδl+α・Sαl (2
)ε2=δ・Sδ2+α・Sα2 ・・・・・・(
3), so this (z), Sα1 and S of equation (3)
If α-value is determined as a low-value constant using experimental values, etc., α can be eliminated from both equations, so by performing appropriate calculations of εl and ε2, the accurate value of the strain amount δ in only the tensile multi-direction can be obtained. can get.

なお、上記の実施例では引張多方向のひずみ量δを正確
に求める例について述べたが、この例とは逆に曲げ方向
の変化角θを引張多方向のひずみ′jA、δの影響なし
に求める場合、あるいは圧縮方向と曲は方向のひずみが
混在する場合でも上記(2)。
In addition, in the above example, an example was described in which the amount of strain δ in multiple tensile directions is accurately determined, but contrary to this example, the change angle θ in the bending direction is calculated without the influence of the strain ′jA, δ in multiple tensile directions. (2) above even when the distortion in the compression direction and the bending direction are mixed.

(3)式を用いて行えば実施例と同一の効果を奏する。If the equation (3) is used, the same effect as in the embodiment can be obtained.

〔発明の効果〕〔Effect of the invention〕

以上のようにこの発明によれば、形状の異なる2個のΩ
形弾性板に、それぞれストレインゲージの抵抗体を固着
させ、これらの弾性板を被測定体に接続された台座に一
体となって固定する構成にしたので、上記2個のそれぞ
れのΩ形弾性板のひずみ感度を知ることKよって、2個
のストレインゲージの合成出力よシ、引張多方向、圧縮
方向あるいは曲げ方向のいずれか一方のみによるひずみ
量を検知できる変位検出装置が得られる。
As described above, according to the present invention, two Ω having different shapes
The resistor of the strain gauge is fixed to each of the two Ω-shaped elastic plates, and these elastic plates are integrally fixed to a pedestal connected to the object to be measured. By knowing the strain sensitivity of the strain gauge, it is possible to obtain a displacement detection device capable of detecting the amount of strain due to the combined output of two strain gauges, the tensile direction in multiple directions, the compression direction, or only one of the bending directions.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を示す変位検出装置の正面
図、第2図は第1図における変位検出装置の形状とひず
み感度との関係を示す線図、第6図は従来の変位検出装
置の正面図である。 (1):弾性板、(2)ニストレインゲージ、(2m)
  :抵抗体、(2b)  :リード線、(3):台座
、(4):第2の弾性板、(5) :第2のストレイン
ゲージ、(5m):第2の抵抗体、(5b):第2のリ
ード線。
Fig. 1 is a front view of a displacement detection device showing an embodiment of the present invention, Fig. 2 is a diagram showing the relationship between the shape of the displacement detection device in Fig. 1 and strain sensitivity, and Fig. 6 is a conventional displacement detection device. FIG. 3 is a front view of the detection device. (1): Elastic plate, (2) Nystrain gauge, (2m)
: Resistor, (2b) : Lead wire, (3) : Pedestal, (4) : Second elastic plate, (5) : Second strain gauge, (5m) : Second resistor, (5b) :Second lead wire.

Claims (1)

【特許請求の範囲】[Claims]  形状の異なる大小2個の弾性板、これらの弾性板にそ
れぞれ固着された2個のストレインゲージの抵抗体及び
前記2個の弾性板の両端をそれぞれ固定する一双の台座
を備え、上記ストレインゲージの出力より得た合成検出
値を演算することによつて引張り方向、圧縮方向あるい
は曲げ方向のいずれかの方向のひずみ値のみを検知する
ことを特徴とする変位検出装置。
The strain gauge is equipped with two elastic plates of different sizes, two strain gauge resistors fixed to each of these elastic plates, and a pair of pedestals for fixing both ends of the two elastic plates, respectively. A displacement detection device that detects only a strain value in any one of the tensile direction, compression direction, or bending direction by calculating a composite detection value obtained from the output.
JP12208284A 1984-06-15 1984-06-15 Detector for displacement Pending JPS612369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12208284A JPS612369A (en) 1984-06-15 1984-06-15 Detector for displacement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12208284A JPS612369A (en) 1984-06-15 1984-06-15 Detector for displacement

Publications (1)

Publication Number Publication Date
JPS612369A true JPS612369A (en) 1986-01-08

Family

ID=14827209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12208284A Pending JPS612369A (en) 1984-06-15 1984-06-15 Detector for displacement

Country Status (1)

Country Link
JP (1) JPS612369A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008179919A (en) * 2007-01-25 2008-08-07 Hiroharu Oishibashi Yarn-delivering device, warp-feeding device and weaving apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008179919A (en) * 2007-01-25 2008-08-07 Hiroharu Oishibashi Yarn-delivering device, warp-feeding device and weaving apparatus

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