JPS61232427A - Optical scanning and recording device - Google Patents

Optical scanning and recording device

Info

Publication number
JPS61232427A
JPS61232427A JP60074066A JP7406685A JPS61232427A JP S61232427 A JPS61232427 A JP S61232427A JP 60074066 A JP60074066 A JP 60074066A JP 7406685 A JP7406685 A JP 7406685A JP S61232427 A JPS61232427 A JP S61232427A
Authority
JP
Japan
Prior art keywords
surface acoustic
optical waveguide
optical
light
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP60074066A
Other languages
Japanese (ja)
Inventor
Nobuharu Nozaki
野崎 信春
Hiroshi Sunakawa
寛 砂川
Takashi Murayama
任 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP60074066A priority Critical patent/JPS61232427A/en
Priority to EP86104739A priority patent/EP0197538B1/en
Priority to DE8686104739T priority patent/DE3686592T2/en
Priority to US06/849,447 priority patent/US4738501A/en
Publication of JPS61232427A publication Critical patent/JPS61232427A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Landscapes

  • Optical Integrated Circuits (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

PURPOSE:To improve durability and oscillation resistance and to permit easy adjustment by providing an auxiliary scanning means which moves relatively a photosensitive body and optical waveguide and a modulating means which modulates the light made incident on the optical waveguide from a light source according to an image signal. CONSTITUTION:The exit position of a focusing beam 18 from the optical waveguide 12 moves as a surface acoustic wave 30 moves and therefore the focusing spot P of the beam 18 moves in the arrow X direction parallel with the progressing direction A of the surface acoustic wave 30 so as to scan one-dimensionally the photosensitive body 21. Since the beam 18 is intensity-modulated according to the image signal S, the image of continuous mode carried by the image signal S is recorded by as much as one main scanning line. The main scanning of the beam 18 can be synchronized with the image signal S for one main scanning line simply by using a blanking signal Sb contained in the image signal S as a trigger signal and controlling the timing for applying a voltage to an electrode pair 13. The main scanning can be synchronized with the auxiliary scanning by controlling the timing for driving an endless belt device 22 by such blanking signal Sb. The durability and oscillation resistance are thereby improved and the adjustment is made easy.

Description

【発明の詳細な説明】 (発明の分野) 本発明は光走査記録装置、特に詳細には光導波路に表面
弾性波を発生させ、この表面弾性波により作られる回折
格子と導波光との結合作用を利用して光走査を行なうよ
うにした光走査記録装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to an optical scanning recording device, and more particularly to an optical scanning recording device, in which a surface acoustic wave is generated in an optical waveguide, and a coupling effect between a diffraction grating created by the surface acoustic wave and the guided light is provided. The present invention relates to an optical scanning recording device that performs optical scanning using.

(従来の技術) 周知の通り従来より、感光体を光で走査して、該感光体
に連続調画像や白黒の2値画像を記録するようにした光
走査記録装置が種々提供されている。このような記録装
置において記録光を1次元的に走査する光走査装置とし
て従来より、■例えばガルバノメータミラーやポリゴン
ミラー(回転多面#!り等の機械式光偏向器により光ビ
ームを偏向走査させるもの、 ■EOD (電気光学光偏向器)やAOD (音響光学
光偏向器)など光偏向素子を用いた光偏向器により光ビ
ームを偏向走査させるもの、 ■液晶素子アレイやPLZTアレイ等のシャッタアレイ
と線光源とを組み合わせ、シャッタアレイの各シャッタ
素子に個別的に駆動回路を接続し、画像信号に応じて、
0N10FFを選択して同時に開くことにより線順次走
査をさせるもの、さらには ■LED等の発光素子を多数−列に並設し、各発光素子
に個別的に駆動回路を接続し、画像信号に応じて0N1
0FFを選択して同時に発光させることにより線順次走
査させるもの等が知られている。
(Prior Art) As is well known, various optical scanning recording apparatuses have been conventionally provided which scan a photoreceptor with light and record a continuous tone image or a black and white binary image on the photoreceptor. Conventionally, as an optical scanning device that scans the recording light one-dimensionally in such a recording device, there is a device that deflects and scans the optical beam using a mechanical optical deflector such as a galvanometer mirror or a polygon mirror (rotating polygon mirror). , ■ A device that deflects and scans a light beam using an optical deflector using an optical deflection element such as an EOD (electro-optic optical deflector) or an AOD (acousto-optical optical deflector), ■ A shutter array such as a liquid crystal element array or a PLZT array, etc. In combination with a line light source, a drive circuit is individually connected to each shutter element of the shutter array, and according to the image signal,
0N10FF are selected and opened at the same time to perform line sequential scanning.Furthermore, a large number of light emitting elements such as LEDs are arranged in parallel in a row, and a drive circuit is individually connected to each light emitting element to respond to image signals. Te0N1
There are known devices that perform line-sequential scanning by selecting 0FF and emitting light at the same time.

ところが上記■の機械式光偏向器は振動に対して弱く、
また機械的耐久性も低く、その上調整が面倒であるとい
う欠点を有している。さらに光ビームを振って偏向させ
るために光学系が大きくなり、記録装置や読取装置の大
型化を招くという問題もある。
However, the mechanical optical deflector described in ■ above is weak against vibrations.
It also has the drawbacks of low mechanical durability and troublesome adjustment. Furthermore, since the optical system is large in order to swing and deflect the light beam, there is also the problem that the recording device and the reading device become larger.

また■のEODやAODを用いる光走査記録装置にあっ
ても、上記と同様に光ビームを振って偏向させるために
、装2が大型になりやすいという問題がある。特に上記
EODやAODは光偏向角が大きくとれないので、■の
機械式光偏向器を用いる場合よりもさらに光学系が大き
くなりがちである。
Furthermore, even in the case of an optical scanning recording apparatus using an EOD or an AOD (2), since the light beam is swung and deflected in the same way as described above, there is a problem that the device 2 tends to be large. In particular, since the EOD and AOD mentioned above cannot have a large optical deflection angle, the optical system tends to be even larger than when using a mechanical optical deflector (2).

一方■のシャッタアレイを用いる光走査記録装置にあっ
ては、偏光板を2枚使用する必要があることから、光源
の光利用効率が非常に低いという問題がある。
On the other hand, in the case of the optical scanning recording apparatus using the shutter array (2), since it is necessary to use two polarizing plates, there is a problem in that the light utilization efficiency of the light source is extremely low.

また■の発光素子を多数並設して用いる光走査記録装置
にあっては、各発光素子の発光強度にバラツキが生じる
ため、精密走査には不向きであるという問題がある。
Furthermore, the optical scanning recording device using a large number of light emitting elements arranged side by side (2) has the problem that it is not suitable for precise scanning because the light emitting intensity of each light emitting element varies.

(発明の目的) 本発明は上記のような事情に鑑みてなされたものであり
、耐久性、耐振動性に優れ、調整が容易で、光利用効率
が高く、精密走査が可能で、しかも小型に形成されうる
光走査記録装置を提供することを目的とするものである
(Object of the Invention) The present invention was made in view of the above circumstances, and has excellent durability and vibration resistance, easy adjustment, high light utilization efficiency, precision scanning, and small size. It is an object of the present invention to provide an optical scanning recording device that can be formed in the following manner.

(発明の構成) 本発明の光走査記録装置は、表面弾性波(SAW:3u
rface  Acoustic  Wave)が伝播
可能な材料から形成された先導波路と、上記光入射端面
からこの光導波路内に光を入射させる光源と、 前記光導波路内の光の光路に沿って進行する表面弾性波
を該光導波路において発生させる手段と、この表面弾性
波発生手段に周期的にパルス状の電圧を印加する駆動回
路と、 上記表面弾性波により作られる回折格子と導波光の結合
作用により光導波路外に出射された光が照射される位置
に配された感光体と上記光導波路とを、上記表面弾性波
の進行方向と略直角な方向に相対移動させる副走査手段
と、 上記光源から先導波路内に入射される光を画像信号に応
じて変調する変調手段とから構成されたものである。
(Structure of the Invention) The optical scanning recording device of the present invention uses a surface acoustic wave (SAW: 3u
a leading waveguide formed of a material capable of propagating rface acoustic waves; a light source that enters light into the optical waveguide from the light incident end face; and a surface acoustic wave that propagates along the optical path of the light in the optical waveguide. a drive circuit that periodically applies a pulse-like voltage to the surface acoustic wave generating means, and a coupling effect between the guided light and the diffraction grating created by the surface acoustic wave to generate a wave outside the optical waveguide. sub-scanning means for relatively moving the optical waveguide and a photoreceptor placed at a position to be irradiated with the light emitted from the light source in a direction substantially perpendicular to the traveling direction of the surface acoustic wave; and a modulation means for modulating the light incident on the image signal according to the image signal.

(作  用) 上記表面弾性波により作られる回折格子は、該表面弾性
波の光弾性効果による屈折率変化の周期構造、空気層と
接する先導波路表面の幾可学的変形の周期構造、強誘電
媒質ではざらに電気光学効果(これは圧電効果による電
界によって生じる)による屈折率変化の周期構造あるい
はこれらの複合によって得られるものである。そしてこ
の表面弾性波の部分から光導波路外に出射する光の出射
位置は、当然この表面弾性波の進行にともなって変化す
るので、先導波路からの出射光は1次元的に走査される
ようになる。
(Function) The diffraction grating created by the surface acoustic waves has a periodic structure of refractive index change due to the photoelastic effect of the surface acoustic waves, a periodic structure of geometric deformation of the leading waveguide surface in contact with an air layer, a ferroelectric In the medium, this can be obtained by a periodic structure in which the refractive index changes due to an electro-optic effect (which is caused by an electric field due to a piezoelectric effect) or a combination of these. The emission position of the light emitted from this surface acoustic wave portion to the outside of the optical waveguide naturally changes as the surface acoustic wave advances, so the light emitted from the leading waveguide is scanned one-dimensionally. Become.

(実施態様) 以下、図面に示す実施態様に基づいて本発明の詳細な説
明する。
(Embodiments) Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

図は本発明の一実施態様による光走査記録装置を示すも
のである。図示されるようにこの光走査記録装置の光走
査部10は、細長い基板11と、この基板11上に形成
された先導波路12と、この先導波路12内の一端部に
設けられた交叉くし形電極対(IDT:Inter  
Diaital  TransdtJcer)13と、
この電極対13に電圧を印加する駆動回路14と、上記
先導波路12の図中上方に配置されたシリンドリカルレ
ンズ15とから構成されている。本実施態様においては
一例として、基板11にLtNbO3ウェハを用い、こ
のウェハの表面にTi拡散膜を設けることにより光導波
路12を形成している。なお基板11としてその他サフ
ァイア、3i等からなる結晶性基板が用いられてもよい
。また先導波路12も上記のT1拡散に限らず、基板1
1上にその他の材料をスパッタ、蒸着する等して形成す
ることもできる。尚、先導波路については、例えばT、
Tam1 rlirIntearated  0pti
csJ  (Topics  in  Applied
  Physics  第7巻)Spr i nQer
−yer I aQ刊(1975):6原、巻毛、柏原
共著「光集積回路」オーム社刊(1985)等の成著に
詳細な記述があり、本発明では光導波路12としてこれ
ら公知の光導波路のいずれをも使用できる。但し、この
先導波路12は、上記TiEl&膜等、後述する表面弾
性波が伝播可能な材料から形成されなければならない。
The figure shows an optical scanning recording device according to one embodiment of the present invention. As shown in the figure, the optical scanning unit 10 of this optical scanning recording device includes an elongated substrate 11, a leading waveguide 12 formed on the substrate 11, and a cross-comb shaped waveguide provided at one end of the leading waveguide 12. Electrode pair (IDT: Inter
Diaital TransdtJcer) 13 and
It consists of a drive circuit 14 that applies a voltage to this electrode pair 13, and a cylindrical lens 15 arranged above the leading waveguide 12 in the figure. In this embodiment, as an example, an LtNbO3 wafer is used as the substrate 11, and the optical waveguide 12 is formed by providing a Ti diffusion film on the surface of this wafer. Note that other crystalline substrates made of sapphire, 3i, etc. may also be used as the substrate 11. Furthermore, the guiding waveguide 12 is not limited to the above-mentioned T1 diffusion.
Other materials can also be formed on the substrate 1 by sputtering, vapor deposition, or the like. Regarding the leading wavepath, for example, T,
Tam1 rlirInterarated 0pti
csJ (Topics in Applied
Physics Volume 7) Spr i nQer
-yer I aQ (1975): Detailed descriptions can be found in published works such as ``Optical Integrated Circuits'' co-authored by Hara, Kage, and Kashiwara, published by Ohmsha (1985), and in the present invention, these known optical waveguides are used as the optical waveguide 12. Either wave path can be used. However, this guide wave path 12 must be formed of a material through which surface acoustic waves (described later) can propagate, such as the above-mentioned TiEl & film.

また先導波路は2層以上の積層構造を有していてもよい
Further, the guiding waveguide may have a laminated structure of two or more layers.

上記電極対13が設けられた側の光導波路12の端面は
光入射端面12aとされ、この光入射端面12aには、
該光導波路12内に向けてレーザビーム18′を射出す
る半導体レーザ16が直接結合されている。
The end face of the optical waveguide 12 on the side where the electrode pair 13 is provided is a light incidence end face 12a, and this light incidence end face 12a includes:
A semiconductor laser 16 that emits a laser beam 18' into the optical waveguide 12 is directly coupled.

この半導体レーザ16に近接して対向する位置において
、先導波路12には導波路レンズ1γが設けられており
、半導体レーザ16から射出されたレーザビーム18′
はこの導波路レンズ17により平行ビーム18とされる
。この平行ビーム18は光導波路12内において導波モ
ードで図中矢印へ方向に進行する。
A waveguide lens 1γ is provided in the leading waveguide 12 at a position close to and facing the semiconductor laser 16, and the laser beam 18' emitted from the semiconductor laser 16 is
is made into a parallel beam 18 by this waveguide lens 17. This parallel beam 18 travels in the direction of the arrow in the figure in a waveguide mode within the optical waveguide 12.

なお半導体レーザ16を上記のように光入射端面12a
に直接結合せずに、レンズやカプラープリズム、グレー
ティングカブラ(回折格子)等を介して光導波路12内
にビームを入射させるようにしてもよい。また走査光を
発生する光源も上述の半導体レーザ16に限らず、その
他例えばガスレーザや固体レーザ等が用いられてもよい
Note that the semiconductor laser 16 is connected to the light incident end face 12a as described above.
The beam may be made to enter the optical waveguide 12 through a lens, a coupler prism, a grating coupler (diffraction grating), etc., instead of being directly coupled to the optical waveguide 12 . Furthermore, the light source that generates the scanning light is not limited to the above-described semiconductor laser 16, but other sources such as a gas laser or a solid laser may also be used.

上記半導体レーザ16を駆動するレーザ駆動回路19は
変調回路20によって制御され、画像信号Sに応じて光
出力を変えるように半導体レーザ16を駆動する。また
前記シリンドリカルレンズ15のさらに上方には、副走
査手段としてのエンドレスベルト装置22が配され、該
エンドレスベルト装置22により感光体21が、平行ビ
ーム18の進行方向Aと直角な矢印Y方向に移送される
ようになっている。
A laser drive circuit 19 that drives the semiconductor laser 16 is controlled by a modulation circuit 20, and drives the semiconductor laser 16 so as to change the optical output according to the image signal S. Further, above the cylindrical lens 15, an endless belt device 22 as a sub-scanning means is disposed, and the endless belt device 22 transports the photoreceptor 21 in the direction of the arrow Y perpendicular to the traveling direction A of the parallel beam 18. It is now possible to do so.

上記感光体21に画像記録を行なう際、半導体レーザ1
6が前述のように、画像信号Sに応じて光出力を変える
ように駆動される。それとともに電極対13には、駆動
回路14により周期的に所定のパルス状の電圧が印加さ
れる。こうして電極対13にパルス状電圧が印加される
と、光導波路12には一群の表面弾性波30が生じ、こ
の表面弾性波30は光導波路12の表面を伝播して矢印
へ方向、つまりビーム18と平行に進行する。このJ:
うな表面弾性波30が生じると、該表面弾性波30の光
弾性効果、空気層と接する光導波路12表面の幾何学的
変形、圧電効果により派生する電気光学効果あるいはこ
れらの複合により回折格子が得られ、光導波路12内を
進むビーム18は、この回折格子との結合作用により該
表面弾性波30の部分から光導波路12外に出射する。
When recording an image on the photoreceptor 21, the semiconductor laser 1
6 is driven to change the optical output according to the image signal S, as described above. At the same time, a predetermined pulse voltage is periodically applied to the electrode pair 13 by the drive circuit 14 . When a pulsed voltage is thus applied to the electrode pair 13, a group of surface acoustic waves 30 are generated in the optical waveguide 12, and these surface acoustic waves 30 propagate on the surface of the optical waveguide 12 in the direction of the arrow, that is, the beam 18. progresses in parallel. This J:
When such a surface acoustic wave 30 is generated, a diffraction grating is obtained by the photoelastic effect of the surface acoustic wave 30, the geometric deformation of the surface of the optical waveguide 12 in contact with the air layer, the electro-optic effect derived from the piezoelectric effect, or a combination of these. The beam 18 traveling through the optical waveguide 12 is emitted from the surface acoustic wave 30 to the outside of the optical waveguide 12 due to the coupling effect with this diffraction grating.

本実施態様において駆動回路14は電極対13に、表面
弾性波30の多波が次々と周波数を変え、いわゆるチャ
ープ周期の一部の表面弾性波30が得られるように電圧
を印加する。このようなチャープ周期の一部の表面弾性
波30から出射するビーム18は、表面弾性波30の進
行方向前又は後側に集束する。このように集束したビー
ム18はさらにシリンドリカルレンズ15により、上記
集束の方向と直角な方向に集束され、結局1つのスポッ
トPに集束する。この集束ビーム18の光導波路12か
らの出射位置は、当然ながら表面弾性波30の進行にと
もなって移動するので、該ビーム18の集束スポットP
も表面弾性波30の進行方向Aと平行な矢印X方向に移
動し、感光体21を1次元的に走査(主走査)する。そ
してこのど−ム18は前述したように画像信号Sに応じ
て強度変調されているので、感光体21にはこのビーム
18により、画像信号Sが担持する連続調画像が1主走
査ライン分だけ記録される。
In this embodiment, the drive circuit 14 applies a voltage to the electrode pair 13 so that multiple waves of the surface acoustic waves 30 change their frequencies one after another and a surface acoustic wave 30 having a part of the so-called chirp period is obtained. The beam 18 emitted from the surface acoustic wave 30 having a part of the chirp period is focused on the front or rear side in the traveling direction of the surface acoustic wave 30. The beam 18 thus focused is further focused by the cylindrical lens 15 in a direction perpendicular to the direction of the above-mentioned focusing, and is finally focused on one spot P. Since the exit position of the focused beam 18 from the optical waveguide 12 naturally moves with the progress of the surface acoustic wave 30, the focused spot P of the beam 18
also moves in the direction of arrow X parallel to the traveling direction A of the surface acoustic wave 30, and scans the photoreceptor 21 one-dimensionally (main scan). Since this beam 18 is intensity-modulated according to the image signal S as described above, the continuous tone image carried by the image signal S is transmitted to the photoreceptor 21 by one main scanning line. recorded.

それとともに前記エンドレスベルト装ji22がビーム
18の走査と同期をとって駆動され、感光体21が矢印
Y方向に移送されて副走査がなされるので、該感光体2
1には画像信号Sが担持する2次元画像が記録される。
At the same time, the endless belt device 22 is driven in synchronization with the scanning of the beam 18, and the photoreceptor 21 is transported in the direction of arrow Y to perform sub-scanning.
1, a two-dimensional image carried by the image signal S is recorded.

1主走査ライン分の画像信号Sとビーム18の主走査と
の同期をとるためには、この画像信号Sに含まれるブラ
ンキング信@Sbをトリガ信号として用いて、電極対1
3への電圧印加タイミングを制御jずればよい。またこ
のブランキング信@Sbによりエンドレスベルト装@2
2の駆動タイミングを制御1tjることにより、上記主
走査と副走査との同期をとることができる。
In order to synchronize the image signal S for one main scanning line with the main scanning of the beam 18, the blanking signal @Sb included in this image signal S is used as a trigger signal, and the electrode pair 1
It is only necessary to shift the timing of voltage application to 3 by control j. Also, due to this blanking signal @Sb, endless belt installation @2
By controlling the drive timing of No. 2, it is possible to synchronize the main scanning and sub-scanning.

なおこの実1A態様においては、画像信号Sに応じて半
導体レーザ16を直接変調しているが、半導体レーザ1
6から一定強度のレーザビームを射出させ、該半導体レ
ーザ16と光導波路12との間に介設したAOM(音響
光学光変調器)や、EOM (’!気光学光変調器)等
の外部変調器によりレーザビームを変調するようにして
もよい。また変調方式もレーザビームの強度変調に限ら
ず、レーザビームをパルス状に射出させ、画像信号Sに
応じてこのパルスの幅やパルス数を変調するようにして
もよい。ざらにこの実施態様においては、感光体21に
連続調画像を記録するようにしているが、画像信号に応
じて半導体レーザ16を0N−OFF!l1tllする
ことにより、白黒の21画像を記録することも勿論可能
である。
Note that in this embodiment 1A, the semiconductor laser 16 is directly modulated according to the image signal S, but the semiconductor laser 1
A laser beam of a constant intensity is emitted from the semiconductor laser 16 and the optical waveguide 12, and an external modulation device such as an AOM (acousto-optic modulator) or an EOM ('! aero-optical modulator) is inserted between the semiconductor laser 16 and the optical waveguide 12. The laser beam may be modulated by a device. Further, the modulation method is not limited to the intensity modulation of the laser beam, and the laser beam may be emitted in a pulsed manner, and the width or number of pulses may be modulated in accordance with the image signal S. Roughly speaking, in this embodiment, a continuous tone image is recorded on the photoreceptor 21, but the semiconductor laser 16 is turned on and off in accordance with the image signal. Of course, it is also possible to record 21 black and white images by doing this.

以上説明した実施態様の光走査部10においては、光導
波路12の、電極対13が設けられた側の端部が光入射
端面12aとされ、したがって光導波路12内を伝わる
ビーム18の進行方向と同方向に表面弾性波30が進行
するようになっているが、光入射端面12aを電極対1
3設置部とは反対側の端面に設定するか、あるいは電極
対13を光入射端面12aと反対側の端部に設置して、
ビーム18の進行方向と表面弾性波30の進行方向が互
いに反対になるようにしてもよい。要するに表面弾性波
30の少なくとも一部がビーム18の光路に沿って進行
するようになっていれば、該ビーム18を光導波路12
外に出射させることができる。
In the optical scanning section 10 of the embodiment described above, the end of the optical waveguide 12 on the side where the electrode pair 13 is provided is the light incident end surface 12a, and therefore the traveling direction of the beam 18 that travels within the optical waveguide 12 is Although the surface acoustic waves 30 are designed to travel in the same direction, the light incident end surface 12a is connected to the electrode pair 1.
3 on the end face opposite to the installation part, or set the electrode pair 13 on the end face opposite to the light incident end face 12a,
The traveling direction of the beam 18 and the traveling direction of the surface acoustic wave 30 may be opposite to each other. In short, if at least a portion of the surface acoustic wave 30 travels along the optical path of the beam 18, the beam 18 can be directed to the optical waveguide 12.
It can be emitted outside.

また上記実施態様の光走査部10においては、表面弾性
波30はチャープ周期の一部の表面弾性波とされている
が、この表面弾性波30として、単一周期の一部の表面
弾性波を発生させるようにしてもよい。このような表面
弾性波によっても、勿論回折格子作用が得られるから、
光導波路12内を進む光を先導波路12外に出射させる
ことが可能である。
Furthermore, in the optical scanning unit 10 of the above embodiment, the surface acoustic wave 30 is a surface acoustic wave with a part of a chirp period; It may be made to occur. Of course, a diffraction grating effect can be obtained with such surface acoustic waves, so
It is possible to emit the light traveling within the optical waveguide 12 to the outside of the leading waveguide 12.

このような単一周期の一部の表面弾性波を利用する場合
には、前述したような集束作用は得られないから、前記
シリンドリカルレンズ15に代えて、例えばセルフォッ
クレンズアレイ等のレンズアレイや、小さな凸レンズが
光走査方向に亘って1列に並置されてなる集束光学系、
あるいは屈折率分布型のレンズが1列に並置されてなる
集束光学系等を使用すればよい。なお電極対13は、基
板11や光導波路12が圧電性を有する材料からなる場
合には、直接先導波路12内あるいは基板11上に設置
しても表面弾性波30を発生させることができるが、そ
うでない場合には基板11あるいは先導波路12の一部
に例えばZnO等からなる圧電性薄膜を蒸着、スパッタ
等によって形成し、そこに電極対13を設置すればよい
When using such surface acoustic waves that are part of a single period, the above-mentioned focusing effect cannot be obtained, so instead of the cylindrical lens 15, a lens array such as a selfoc lens array or the like may be used. , a focusing optical system in which small convex lenses are arranged in a row in the optical scanning direction;
Alternatively, a focusing optical system in which graded refractive index lenses are arranged in a row may be used. Note that when the substrate 11 and the optical waveguide 12 are made of a piezoelectric material, the electrode pair 13 can generate the surface acoustic wave 30 even if it is installed directly inside the leading waveguide 12 or on the substrate 11. If this is not the case, a piezoelectric thin film made of, for example, ZnO may be formed on a part of the substrate 11 or the guiding waveguide 12 by vapor deposition, sputtering, etc., and the electrode pair 13 may be placed there.

また副走査手段としては前記エンドレスベルト装置22
に限らず、例えば回転ドラム等、その伯の公知のものが
用いられてもよい。勿論、この副走査手段は感光体を移
動させるものの伯、静置された原稿表面に沿って光走査
部10を移動させるものであってもよい。特に本発明装
置においては、機械的作動部分を持たない簡単な光走査
部が用いられているので、容易に光走査部を移動させる
ことができる。
Further, the endless belt device 22 serves as a sub-scanning means.
However, the present invention is not limited to this, and a known device such as a rotating drum may be used. Of course, although this sub-scanning means moves the photoreceptor, it may also move the optical scanning section 10 along the surface of the document placed still. In particular, in the device of the present invention, a simple optical scanning section without mechanically operating parts is used, so that the optical scanning section can be easily moved.

ざらに本発明の光走査記録装置は、光走査部を複数並置
して、複数本の光を同時に走査するように形成されても
よい。例えば光走査部を3つ並置して、それぞれにR,
G、B等の相異なる色フィルタ、あるいは相異なる発光
色の光源を組み合わせて、カラー画像記録のために使用
することも可能である。
In general, the optical scanning recording device of the present invention may be formed by arranging a plurality of optical scanning sections in parallel to simultaneously scan a plurality of beams of light. For example, if three optical scanning units are arranged side by side, each one has R,
It is also possible to use a combination of different color filters such as G and B or light sources of different emission colors to record a color image.

(発明の効果) 以上詳細に説明した通り本発明の光走査記録装置は、単
一の光源を使用して光走査を行なうものであるから、前
記LEDアレイ等にみられる光源の発光強度バラツキの
問題が無く、精密走査が可能となり、光源の光利用効率
も高められる。また本発明の光走査記録装置は、機械的
作動部分を備えない簡単な光走査部によって光走査を行
なうものであるから、耐久性、耐振動性に優れて調整も
容易であり、さらに光ビームを大きく振らずに走査可能
であるから、光走査系の大型化を回避し、小型に形成す
ることができる。
(Effects of the Invention) As explained in detail above, the optical scanning recording device of the present invention performs optical scanning using a single light source, so it is possible to reduce the variation in the light emission intensity of the light source seen in the LED array, etc. There is no problem, precise scanning becomes possible, and the light utilization efficiency of the light source is also increased. Furthermore, since the optical scanning recording device of the present invention performs optical scanning using a simple optical scanning unit that does not include mechanically operating parts, it has excellent durability and vibration resistance, and is easy to adjust. Since scanning can be performed without shaking the optical system significantly, the optical scanning system can be made smaller without increasing its size.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の一実施態様による光走査記録装置を示す概
略図である。 10・・・光走査部       11・・・基板12
・・・光導波路       12a・・・光入射端面
13・・・電極対        14・・・駆動回路
16・・・半導体レーf18・・・光ビーム20・・・
変調回路       21・・・感光体22・・・エ
ンドレスベルト装置 30・・・表面弾性波同時に手数
料補正書あり (自発)手続補正書 特許庁長官 殿            昭和60年5
月981、事件の表示               
  −跡特願昭60−74066号 2、発明の名称 光走査記録装置 3、補正をする者 事件との関係     特許出願人 柱 所   神奈川県南足柄市中沼210番地名 称 
   富士写真フィルム株式会社4、代理人 東京都港区六本木5丁目2番1号 はうらいやビル 7階 (7318)弁理士 柳 1)征 史 (ほか1名)5
、補正命令の日付   な  し く内容に変更なし) 9、添付書類
The figure is a schematic diagram showing an optical scanning recording device according to an embodiment of the present invention. 10... Optical scanning section 11... Substrate 12
... Optical waveguide 12a ... Light incidence end face 13 ... Electrode pair 14 ... Drive circuit 16 ... Semiconductor laser f18 ... Light beam 20 ...
Modulation circuit 21...Photoreceptor 22...Endless belt device 30...Surface acoustic wave and fee amendment at the same time (voluntary) Procedural amendment Commissioner of the Patent Office May 1985
Month 981, incident display
-Patent Patent Application No. 60-74066 2, Name of the invention Optical scanning recording device 3, Relationship with the case of the person making the amendment Patent applicant Location 210 Nakanuma, Minamiashigara City, Kanagawa Prefecture Name Name
Fuji Photo Film Co., Ltd. 4, Agent: 7th floor, Uraya Building, 5-2-1 Roppongi, Minato-ku, Tokyo (7318) Patent attorney: Yanagi 1) Seishi (and 1 other person) 5
(No date of amendment order, no change in content) 9. Attached documents

Claims (6)

【特許請求の範囲】[Claims] (1)表面弾性波が伝播可能な材料から形成された光導
波路と、 この光導波路内に光を入射させる光源と、 前記光導波路内の光の光路に沿って進行する表面弾性波
を該光導波路において発生させる手段と、この表面弾性
波発生手段に周期的にパルス状の電圧を印加する駆動回
路と、 前記表面弾性波により作られる回折格子と導波光との結
合作用により光導波路外に出射された光が照射される位
置に配された感光体と前記光導波路とを、前記表面弾性
波の進行方向と略直角な方向に相対移動させる副走査手
段と、 前記光源から前記光導波路内に入射される光を画像信号
に応じて変調する変調手段とからなる光走査記録装置。
(1) an optical waveguide formed of a material through which surface acoustic waves can propagate; a light source that allows light to enter the optical waveguide; A driving circuit that periodically applies a pulse-like voltage to the surface acoustic wave generating means; and a coupling effect between the guided light and the diffraction grating formed by the surface acoustic wave to emit the wave out of the optical waveguide. sub-scanning means for relatively moving the optical waveguide and a photoreceptor placed at a position where the light is irradiated in a direction substantially perpendicular to the traveling direction of the surface acoustic wave; An optical scanning recording device comprising modulation means that modulates incident light according to an image signal.
(2)前記駆動回路が、チャープ周期の一群の表面弾性
波を発生するように形成されていることを特徴とする特
許請求の範囲第1項記載の光走査記録装置。
(2) The optical scanning recording apparatus according to claim 1, wherein the drive circuit is formed to generate a group of surface acoustic waves with a chirp period.
(3)前記駆動回路が、単一周期の一群の表面弾性波を
発生するように形成されていることを特徴とする特許請
求の範囲第1項記載の光走査記録装置。
(3) The optical scanning recording device according to claim 1, wherein the drive circuit is formed to generate a group of surface acoustic waves with a single period.
(4)前記表面弾性波が、前記光導波路内の光と同じ方
向に進行するようになっていることを特徴とする特許請
求の範囲第1項から第3項いずれか1項記載の光走査記
録装置。
(4) Optical scanning according to any one of claims 1 to 3, characterized in that the surface acoustic wave travels in the same direction as the light in the optical waveguide. Recording device.
(5)前記表面弾性波が、前記光導波路内の光と逆方向
に進行するようになっていることを特徴とする特許請求
の範囲第1項から第3項いずれか11記載の光走査記録
装置。
(5) Optical scanning recording according to any one of claims 1 to 3, wherein the surface acoustic wave is configured to travel in a direction opposite to the light in the optical waveguide. Device.
(6)前記光導波路から出射した光を集束させる集束光
学系が設けられていることを特徴とする特許請求の範囲
第1項から第5項いずれか1項記載の光走査記録装置。
(6) The optical scanning recording device according to any one of claims 1 to 5, further comprising a focusing optical system that focuses the light emitted from the optical waveguide.
JP60074066A 1985-04-08 1985-04-08 Optical scanning and recording device Pending JPS61232427A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60074066A JPS61232427A (en) 1985-04-08 1985-04-08 Optical scanning and recording device
EP86104739A EP0197538B1 (en) 1985-04-08 1986-04-07 Light beam scanning apparatus and read-out or recording apparatus using the same
DE8686104739T DE3686592T2 (en) 1985-04-08 1986-04-07 READING OR RECORDING DEVICE USING A LIGHT BEAM SENSOR.
US06/849,447 US4738501A (en) 1985-04-08 1986-04-08 Light beam scanning apparatus, and read-out apparatus and recording apparatus using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60074066A JPS61232427A (en) 1985-04-08 1985-04-08 Optical scanning and recording device

Publications (1)

Publication Number Publication Date
JPS61232427A true JPS61232427A (en) 1986-10-16

Family

ID=13536442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60074066A Pending JPS61232427A (en) 1985-04-08 1985-04-08 Optical scanning and recording device

Country Status (1)

Country Link
JP (1) JPS61232427A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005521065A (en) * 2002-03-22 2005-07-14 アプライド マテリアルズ イスラエル リミテッド Dark field detection apparatus and method with moving lens multi-beam scanner

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565934A (en) * 1978-11-10 1980-05-17 Matsushita Electric Ind Co Ltd Photo scanner
JPS57142604A (en) * 1981-02-27 1982-09-03 Canon Inc Luminescence spot scanner

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565934A (en) * 1978-11-10 1980-05-17 Matsushita Electric Ind Co Ltd Photo scanner
JPS57142604A (en) * 1981-02-27 1982-09-03 Canon Inc Luminescence spot scanner

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005521065A (en) * 2002-03-22 2005-07-14 アプライド マテリアルズ イスラエル リミテッド Dark field detection apparatus and method with moving lens multi-beam scanner
JP2005521064A (en) * 2002-03-22 2005-07-14 アプライド マテリアルズ イスラエル リミテッド Wafer defect detection system with moving lens multi-beam scanner
JP2010048813A (en) * 2002-03-22 2010-03-04 Applied Materials Israel Ltd Wafer defect detection system with traveling lens multi-beam scanner

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