JPS61229382A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS61229382A JPS61229382A JP6898985A JP6898985A JPS61229382A JP S61229382 A JPS61229382 A JP S61229382A JP 6898985 A JP6898985 A JP 6898985A JP 6898985 A JP6898985 A JP 6898985A JP S61229382 A JPS61229382 A JP S61229382A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser
- gas
- laser beam
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発明はレーザ発振器の出力安定化に係シ、特に、パル
ス出力等のレーザ出力を頻繁に制御し使用する用途の発
振器に好適な光軸１１！１装置に関する。[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to output stabilization of a laser oscillator, and in particular, an optical axis 11 suitable for use in an oscillator that frequently controls and uses laser output such as pulse output. !1 Regarding the device.
レーザ出力の安定を図る装置には、例えば、特公昭５９
−１７９９４号公報に記載のように、レーザ出力をパワ
ーメータで検出し、磁界、あるいは、電流制御するよう
になっていた。また、容易にミラーを調整し安定を図る
ことも考えられている。Devices for stabilizing laser output include, for example, the Japanese Patent Publication No. 59
As described in Japanese Patent No. 17994, the laser output was detected by a power meter and the magnetic field or current was controlled. It is also being considered to easily adjust the mirror to stabilize it.
しかし、電流の増加で出力を安定させる場合等では、内
部の放電エネルギが増加し、出力効率が悪くなる、ある
いは、内部ガス温度が高くなり、ミラーの最適性が損な
われるおそれがあった。However, in cases where the output is stabilized by increasing the current, internal discharge energy increases, output efficiency deteriorates, or internal gas temperature increases, which may impair the mirror's optimality.
一方、ミラーをｇｌｌｎする場合は、出力をフィードバ
ックして行なうことから、出力のレーザビームモードな
どの質的な最適化は図りに＜＜、また、安定出力を得る
迄にミラーｆＡ整の試行錯誤があり、長時間を要する欠
点がめった。On the other hand, when gllning a mirror, the output is fed back, so qualitative optimization of the output laser beam mode etc. is not necessary.Also, trial and error adjustment of the mirror fA is required until a stable output is obtained. However, the drawback is that it takes a long time.
本発明の目的は、出力を最適にするレーザ発振器を提供
することにある。An object of the present invention is to provide a laser oscillator that optimizes the output.
本発明は、レーザ発振器の出力、あるいは、モード等の
質の変化は、単に周囲の温度の変化だけでなく、発振器
内部の放電による発熱による温度 −変化にある
ことに着目し、内部レーザガス温度をミラー近傍で検知
し、目視、又は、自動でミラーをｇ＃１輪する。The present invention focuses on the fact that changes in the quality of the output or mode of a laser oscillator are not just changes in ambient temperature, but also changes in temperature due to heat generated by discharge inside the oscillator, and the internal laser gas temperature is Detects near the mirror and moves the mirror visually or automatically.
以下、本発明の一実施例を図にょシ説明する。 An embodiment of the present invention will be described below with reference to the drawings.
ガスレーザ発ｔＲ器１は、負圧の容器２に発振媒体の炭
酸ガス等のレーザガス３を封入し、放電部４及び４′で
グロー放電を行なって励起させ、ブｏ ワｓ テｖ−サ
ガス３を循環しリフレッシェする。The gas laser generator 1 fills a negative pressure container 2 with a laser gas 3 such as carbon dioxide as an oscillation medium, and excites it by performing glow discharge in the discharge parts 4 and 4'. Cycle and refresh.
放電部４，４′で励起されたレーザガスは冷える際に光
を出し、ミラーである全反射！１Ｉ１７と出力鏡８間で
共損し放鑞部４，４間で増幅されレーザ光９となる。ガ
スの冷却は冷却器６で積極的に冷やさｎ１連続し九レー
ザ光を得る。レーザ光９は、部分反射膜を持った出力鏡
８からその一部がレーザ光ｌＯとして外部に取出される
。従来、レーザ光をパワーモニタ１１で検出し、ミラー
調整ネジ２０を手動、あるいは、制御器２１によシモー
タ２２等で動かしミラー７．８を調整している。The laser gas excited in the discharge parts 4, 4' emits light when it cools down, and is totally reflected by the mirror! A common loss occurs between 1I17 and the output mirror 8, and the laser beam is amplified between the solder parts 4 and 4, and becomes a laser beam 9. The gas is actively cooled by a cooler 6 and is continuously cooled n1 to obtain nine laser beams. A portion of the laser beam 9 is extracted to the outside as a laser beam IO from an output mirror 8 having a partially reflecting film. Conventionally, the laser beam is detected by a power monitor 11, and the mirror 7.8 is adjusted by moving the mirror adjustment screw 20 manually or by using a controller 21 and a motor 22 or the like.
本発明はミラーの近傍にあるミラーホルダ２３、または
、支持フレーム２４部にガス温度を検知するセンサ２５
を配設し、指示部２６で目視でミラー近傍ガス温度を知
り、その温度に応じたミラー位Ｉｔ設定を、例えば、微
小目盛付のバーニア２０で行なう。例えば、バーニア２
０を右廻しにするとミラーホルダ２３は手前に動きミラ
ーの傾きをｇｕすることができる。ミラーの傾きはミラ
ー近脅のガス温度によシ、一定の関係がるるか、外部温
度によシ補正した方が正確になるため、ミラー近傍の外
部温度を検知するセンサ２７を設けておく場合もある。The present invention provides a sensor 25 for detecting gas temperature on the mirror holder 23 or the support frame 24 near the mirror.
The gas temperature in the vicinity of the mirror is visually determined using the indicator 26, and the mirror position It is set according to the temperature using, for example, a vernier 20 with minute scales. For example, vernier 2
When 0 is turned clockwise, the mirror holder 23 moves toward you and the tilt of the mirror can be adjusted. The tilt of the mirror has a certain relationship with the gas temperature near the mirror, or it will be more accurate if it is corrected based on the external temperature, so if a sensor 27 is provided to detect the external temperature near the mirror. There is also.
ミラーａｌｌ贅を自動で行なう場合は、演算等を行なう
制御６２８により、ガス温度に応じた設定値との差分に
よシ、バーニア２０をモータ２２等で制御し作動させる
。設定は、発振器１の固有のものであシ、外部温度によ
シ補正する場合もある。又、補正として水温を入れる場
合もある。装置として複雑になるが、従来知られている
パワーモニタ１１を設定又は補正として用すてもよい。When all the mirrors are to be removed automatically, the vernier 20 is controlled and operated by the motor 22 or the like according to the difference from the set value according to the gas temperature using a control 628 that performs calculations and the like. The settings are unique to the oscillator 1, and may be corrected depending on the external temperature. Also, water temperature may be included as a correction. A conventionally known power monitor 11 may be used for setting or correction, although the device becomes complicated.
本発明によれば、発儀器内部のガス温度によシ、ミラー
設定が行なえるので、パワーモニタカ不要、るるいは、
確認するだけでよく、熟練者でなくとも＋ｓ便に効率よ
くレーザ光軸を調整することができる。According to the present invention, mirror settings can be made depending on the gas temperature inside the trigger, so there is no need for a power monitor, and
All you have to do is check, and even non-experts can adjust the laser optical axis quickly and efficiently.
図面の簡単なｆＪｌ、明 図は本発明のレーザ発振器の構成図でめる。Simple fJl of drawings, light The figure is a block diagram of a laser oscillator according to the present invention.
３・・・レーザガス、４・・・放電部、７・・・全反射
鏡、８・・出力鏡、２５・・・温度検出センサ、２６・
・・温度指示計、２８・・・制御器。3... Laser gas, 4... Discharge part, 7... Total reflection mirror, 8... Output mirror, 25... Temperature detection sensor, 26...
...Temperature indicator, 28...Controller.
Claims (1)
極部と、共振を行ないレーザ光を取り出す全反射鏡と、
前記反射鏡および出力鏡の傾きを調整できるミラーホル
ダ部とから成るレーザ発振器において、 ミラー近傍の温度検出を行なう温度検出器を設け、前記
ミラーの傾きを調整し、レーザ出力及びビームモード等
を安定にすることを特徴とするレーザ発振器。[Claims] 1. A laser medium placed in a negative pressure container, an electrode section for excitation, and a total reflection mirror for resonating and extracting laser light;
In a laser oscillator consisting of the reflecting mirror and a mirror holder part that can adjust the inclination of the output mirror, a temperature detector is provided to detect the temperature near the mirror, and the inclination of the mirror is adjusted to stabilize the laser output, beam mode, etc. A laser oscillator characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6898985A JPS61229382A (en) | 1985-04-03 | 1985-04-03 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6898985A JPS61229382A (en) | 1985-04-03 | 1985-04-03 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61229382A true JPS61229382A (en) | 1986-10-13 |
Family
ID=13389578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6898985A Pending JPS61229382A (en) | 1985-04-03 | 1985-04-03 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61229382A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289865U (en) * | 1988-12-28 | 1990-07-17 |
-
1985
- 1985-04-03 JP JP6898985A patent/JPS61229382A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0289865U (en) * | 1988-12-28 | 1990-07-17 |
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