JPS61228503A - Process controller - Google Patents

Abstract

PURPOSE:To reduce the program capacity and also to omit production of a program in accordance with the action of a drive part each time, by using a single reentrant program to constitute a means for control of plural drive parts of a process controller using a microcomputer. CONSTITUTION:The control signal supplied from a keyboard 2 is applied to a control unit 1 and the output signal of the unit 1 is sent to the 1st-n-th input/output control parts 4-5. The 1st drive part 6 and the 1st detector 8 are connected to the part 4; while the n-th drive part 7 and the 1st detector 9 are connected to the part 5 respectively. The results of detection obtained by both detectors 8 and 9 are fed back to the unit 1 via the parts 4 and 5. Then the output of the unit 1 is displayed on a CRT 3. Thus plural control tasks can be processed in time division. This omits production of individual programs accordant with each control form.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a process control device that performs process control, and particularly to one that performs control using a microcomputer.

[Conventional technology]

FIG. 2 shows a general configuration when the device is controlled by a microcomputer, and FIG. In the figure, l is a control unit, 2 is a keyboard, and 3 is a C'RT.
3 and the keyboard 2 are connected to a communication controller 27 within the control unit 1. Further, 4 and 5 are input/output control units, 6.7 is a drive unit connected to the input/output control units 4 and 5, and 8.9 is a detection unit connected to the input/output control unit 4.5. It is connected to the input/output controller 26 via a signal converter 28.

In a system configured in this way, the detector 8.9
The information is given to the input/output controller 26 of the control unit 1 via the input/output controller 4.5, and is configured such that the state of the detector can be determined in the memory 29 (hereinafter referred to as input control). ).

In addition, the drive unit 6.7 sends the operating state (ON or OFF) into the memory 29, which is applied to the input/output control unit 4.5 via the input/output controller 26, and the respective specified The drive 6.7 is activated (hereinafter referred to as output control).

The input control and output control described above are configured such that the signal converter 28 inputs the status to the memory 29 and outputs the contents of the memory 29 in a certain predetermined time cycle.

Further, FIG. 4 shows a semiconductor manufacturing apparatus, which is an example of an apparatus whose process is controlled by the process control apparatus configured as described above.

The operating order of this device will be briefly described below.

The wafer loading cassette is taken out from the input loss tonker section 13 and transported to the entrance transfer section 16 by the first conveyance section 14.
The aerodynamic set transported by the seventh transport section 24 is transported to the entrance transfer section 16 using the second transport section 15,
In the entrance transfer section 16, the wafers are transferred and the empty cassettes are transferred to the entrance storage 7 using the first transport section 14.
The cassettes to be returned to the chamber 13 and loaded with wafers are transported to the processing tank section 18 using the first transport section 14 and the third transport section 17 . The cassette containing the wafers that have been cleaned in the processing tank section 18 is transferred to the fourth transport section 19 and the fifth transport section 2.
0 to the outlet transfer section 23, and the outlet stocker section 2
1, the aerodynamic set is transported to the exit transfer section 23 using the sixth transport section 22, the wafers are transferred, and the empty cassette is transferred to the seventh transport section 24 by the fifth transport section 20. carry it up to

The cassette containing the wafers is stored in the exit stocker section 21 using the sixth transport section 22.

For example, when attempting to control the semiconductor manufacturing apparatus shown in FIG. 4 with a process control device having the above-mentioned hardware configuration,
The conventional method is to create a program routine as shown in FIG. The state of stop determination detection is checked (step 41), and if the state is OK, the specific drive section is turned off (step 57).

If the timer value times up (step 56) before the stop judgment detection state becomes OK, the specific drive section is turned off (step 58) and an error report (
Step 59) is performed, a human (operator) is notified of the occurrence of an error, and the operator is asked to make an adjustment (step 60). [Problems to be Solved by the Invention] A conventional process control device is configured as described above, and programs must be created according to the number of objects to be controlled. In addition, the program capacity increases, and even when common modifications such as stop detection methods and error reporting are to be made, modifications must be made to each program.

This invention was made in order to solve the above-mentioned problems, and it is an object of the present invention to provide a process control device that requires a small program capacity and does not require creating a program in accordance with the operation of the drive unit each time. purpose.

[Means for solving problems]

In the process control device according to the present invention, a drive control means for controlling a plurality of drive units is configured by a single recitative program.

[Effect]

In this invention, since the drive control means is constituted by a single reentrant program, the program size is small, the area required for storing the program is small, and common modification of each drive section is facilitated.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is an overall configuration diagram of a process control device according to an embodiment of the present invention. As is clear from FIG. 1, this embodiment includes a plurality of drive units 6 and 7 that drive controlled objects, and a plurality of detectors 8 and 9 that detect the states of the plurality of controlled objects driven thereby. The plurality of drive sections 6.7 are controlled by the drive control means 1b which inputs the detection signal of this detector 8.9, and this drive control means 1b controls the respective drive sections in a time-sharing manner. This system is provided with a system control means 1a for controlling the execution.

FIGS. 2 and 3 show the specific configuration of the apparatus of this embodiment, and the hardware configuration is exactly the same as that of the conventional apparatus.

FIG. 5 is a flowchart showing drive control processing by a process control device according to an embodiment of the present invention. Also,
FIG. 6 shows processing within the subroutine indicated by step 30 in FIG. 5, which is a step for transferring information (for output control) data to corresponding memories. Further, FIG. 7 shows the error detection contents detected in step 32 of FIG. 5, and FIG. 8 shows the types of errors reported in step 34 of FIG.

In step 30 of FIG. 5, the multi-task O3
The output control data given by the (system control processing means) is transferred to the storage location (data table provided in the RAM) associated with the task number as shown in step 46 in FIG. 6 (step 47). .48
). Next, the output control number is selected from the data at the transfer destination by the multitasking O8, and the drive unit corresponding to the control number is turned on in step 31, and the occurrence of an error is checked in steps 3 and 2. The items are time over and limit detection as shown in steps 49 and 50 in FIG. 7, and the limit detection.

It is detected by checking the contents of the mint detector. Then, in step 41, the contents of the stop detector specified by the data stored in the data table are checked, and if OK, in step 42, the output control number is turned off and its driving is stopped.

Next, in step 43, an arbitrary timer value is sent,
Wait for the time specified by the sent data (
Step 44) and once again check the contents of the stop detector in the program block 45, and if the conditions are met, the process ends.

Meanwhile, step 32. If the conditions are not met in step 45, an error process is performed, an output control number is selected in step 33 and the drive is stopped, and in step 34, step 51 of FIG.
, 52, 53, the lamp is blinked, the buzzer is turned on, and the content of the error that has occurred is displayed on the CRT.

Then, in step 35, it is determined whether or not there is an error cancellation. Cancellation at this time can be done by inputting the error number in the error display in step 34 from the keyboard or by inputting error cancel.
It is on standby until it is cancelled. If the error is canceled by the operator, the lamp, buzzer, etc. are turned off (step 36), but if other errors have occurred, this process is excluded. Then, in steps 37 to 40, the drive unit to be moved backward is determined based on the given data, and the target device is moved backward for a specified period of time, after which the process is started from the beginning.

By doing this, even if the target device is overrunning, it becomes possible to cancel without the person (operator) moving it backwards.

As described above, the device of this embodiment performs input, output control, and error detection simply by supplying data for output control, and when an error occurs, a lamp, a buzzer, and a report process of the details of the error are also performed.

In order to execute a reentrant program as described above, it is necessary to perform task management using multitasking O3. In the embodiment, a control program (control procedure) is divided into several dozen tasks, and the O8 activates the tasks in a constant cycle. When each task uses the control software of this drive control means, if the task is waiting for conditions such as steps 62 to 65 in FIG. 5, the oS is currently being executed (as shown in step 66 in FIG. 9). In order to drive the next cycle, the CPU's program counter (address at the start of the next cycle) and registers (for example, in the case of an 8-bit CPU 8080, A, F, B, C
, D, E, H, and L registers) are set in a memory area (stack) dedicated to that task, and the next task is processed.

According to the above-mentioned reentrant program, multiple control tasks can use this software in a time-sharing manner, and there is no need to process each task using a similar program as in the conventional case. It becomes possible to execute multiple processes using this program. However, in this case, it is necessary to absorb differences in processing content between tasks using a data table.

Note that in the above embodiment, the case where one drive unit and one stop detector are selected is explained as an example;
By changing the output control data configuration and modifying only the program part when selecting the drive section and detector, changes can be made to suit any control condition, for example, the drive section stops at 2 points and the detector stops at 3 points. It is.

Further, reverse movement processing in error processing is also processed depending on the content of the error. You can choose not to do so. for example,
In the case of an overtime error (not moving within a certain period of time), it is possible to make changes such as not performing reverse movement processing.

C. Effects of the Invention] As described above, according to the process control device of the present invention, the drive control means for controlling the drive of the drive unit is configured with a reentrant program, so the program capacity is small and the control is performed each time. It is no longer necessary to create programs tailored to the configuration individually for each controlled object, speeding up software development and making modifications to change operations extremely easy.

[Brief explanation of the drawing]

FIG. 1 is an overall configuration diagram of a process control device according to an embodiment of the present invention, FIG. 2 is a block configuration diagram of the device in FIG. 1, and FIG. 3 is a configuration of the control unit and input/output control section in FIG. 2. FIG. 4 is a diagram showing an example of a device controlled by this process control device, and FIGS. 5 to 9
1 is a flowchart showing the processing of the present invention, and FIG. 10 is a flowchart showing the processing of a conventional device. In the figure, 1 is a control unit, 1a is a system control means, 1b is a drive control means, 2 is a keyboard, and 3
is a CRT, 4.5 is an input/output control section, 6.7 is a drive section, 8
．． 9 is a detector, 1o is a control device section, 11 is an inlet input/output control section, 14. 15. 1? , 19, 20.22.24
16 is an inlet transfer unit, 18 is a processing tank unit, 21 is an outlet stocker unit, 23 is an outlet transfer unit, 25 is a CPU, 2
6 is an input/output controller, 28 is a signal converter, and 29 is a memory.

Claims (1)

[Claims] (1) A device that performs process control, including a plurality of drive units that drive controlled objects, a plurality of detectors that detect the states of the plurality of control objects driven by the drive units, and a single reentrant device. a drive control means that is configured by a program and controls the plurality of drive units according to information from the plurality of detectors, and controls the drive control unit so that it executes control of each drive unit in a time-sharing manner; A process control device comprising system control means.