JPS61228180A - Regulating system for opening of openable valve - Google Patents

Abstract

PURPOSE:To provide a valve opening regulating system which optically detects the opening of a valve and enables regulation of the opening of a valve with high precision, by providing first and second photo sensors which detect valve opening and valve closing, respectively. CONSTITUTION:When a valve is present in a full closed position, in a first photo sensor 25, light from a luminous element, passing through a pore 24c, is perceived by a collecting element, and a full closed position display lamp 25a is lighted ON. In this case, in a second photo sensor 26a, the light is in a state in that it is shut off by a shut-off disc 23, and therefore, a full opening position display lamp 26a is not lighted ON. When the valve is brought into a full opening state, the light transmission state of the first photo sensor 25 is shut off by the shut-off disc 23. However, since a pore 24b is moved to 24d, in the second photo sensor 26, light from the luminous element passes through the pore 24b and corrides with the collecting element, and the full opening position display lamp 26a is lighted ON.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an on-off valve that opens and closes a piping flow path through which gas (chlorine gas, fluorine gas, etc.) used in, for example, semiconductor manufacturing processes flows. The present invention relates to a system for detecting and adjusting the opening degree of this on-off valve.

Technical View and Four Points When manufacturing semiconductors, recording materials, electronic components, etc., corrosive gases that are harmful to the human body may be handled.

In particular, even the slightest leakage of chlorine gas or the like used in the semiconductor manufacturing process is not allowed, and the amount of gas flowing through the piping flow path must be strictly controlled.

Therefore, conventional on-off valves that control the opening and closing of this type of piping flow path have been equipped with an O-ring around the outer periphery of the valve body to ensure perfect sealing. Various improvements have been made, such as using a pulse motor that is easy to control as a drive source.

However, for on-off valves used under such severe conditions, it is important to measure the opening degree of the valve or to confirm the position of the valve body. In this valve opening measurement, measuring the fully open or fully open position is directly connected to the quality of the sealing performance of the valve body.
This is especially important.

The method conventionally employed for measuring and adjusting the valve opening is an electrical method.

In this electrical valve opening adjustment method, as shown in FIGS. 3 and 4, a rod 4 is connected to the valve shaft 2 of the on-off valve 1 via a screw 3.
The valve position is confirmed and adjusted by installing the limit switches 6 and 7, which are provided corresponding to the fully open position 0 and fully closed position S of the valve body 5, on and off using the rod 4. be.

However, this limit switch 6.7 not only requires adjustment of the installation position, but also has the problem that sufficient accuracy cannot be obtained in the case where strict accuracy as described above is required.

The present invention is an attempt to solve the problems associated with the above-mentioned conventional technology.The present invention optically detects the valve opening and adjusts the valve opening with extremely high precision. The purpose is to provide a system that can be easily implemented.

In order to achieve the above object, the present invention provides an on-off valve that opens and closes the flow path by rotating a valve shaft provided in the flow path to rotate a valve body provided in the flow path. A light-shielding disk that rotates as the valve stem rotates is attached to the shaft, and two or more small holes are formed in this light-shielding disk almost concentrically, and the position of the small holes is detected. Two or more photosensors are arranged around the light-shielding disk, and one of the small holes is
It is characterized in that it is provided at a position where it is detected by the first photosensor when the valve is fully open, and the other small hole is provided at a position where it is detected by the second photosensor when the valve is fully opened or close to it. That is.

With this configuration, when the valve body changes the valve opening from a fully open state to a fully open state or a predetermined opening, the signal output from the photosensor can easily and extremely change the valve opening. This allows for accurate measurements and adjustments.

1 plate and ordered An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a cross-sectional view of a main part showing an example of the valve opening adjustment system for an on-off valve according to the present invention, FIG. 2 is an explanatory diagram showing the relationship between a valve body and a light-shielding disk, and FIG. The same reference numerals are given to the same members.

First, the on-off valve 1 is connected to a gas pipe 11 in which a flow path 10 is formed.
12 through a valve seat 13, and a valve body 5 is provided within this valve seat 13.

A valve stem 2 is attached to the valve body 5 with screws 14. One end of the valve stem 2 is fitted into the recess 13a of the valve seat 13, and the other end of the valve stem 2 is inserted into the stepped portion. 15 is configured to be engaged and held by the valve seat 13 and extends to the outside of the valve seat 13.

A valve opening detecting section 16 is connected to the protruding end of the valve shaft 2, and a driving section 18 consisting of a stepping motor or the like is attached to the valve position detecting section 16 via a gear head 17.

This valve position detection section 16 is connected to the valve shaft 2 and the gear head 1.
A first member 21 constituting the joint 20 has a light-shielding disc 23 that rotates with the rotation of the valve shaft 2, which is attached to the first member 21 with a screw or the like. The first member 21 and the drive shaft 19 are connected by a Hero coupling 22.

As shown in FIG. 2, this light-shielding disc 23 has a small hole 24c formed at a position corresponding to the fully open position C of the valve body 5. A small hole 24b is provided in the valve body 5, and as the valve body 5 rotates, the small hole 24b is moved to a position where a second photosensor, which will be described later, is installed. Note that when the valve body is rotated by 90 degrees, it changes from the fully open position to the fully open position.

Roughly speaking, a first photosensor 25 and a second photosensor 26 are arranged around the light shielding disk 23, and the installation position of the first photosensor 25 corresponds to the fully open position of the valve body. The second photosensor 26 is provided on the opposite side of the first photosensor 25.

Therefore, when the small hole 24c is located above the first photosensor 25, the light receiving element senses the light output from the light emitting element, the closed position indicator lamp 25a lights up, and the one-way valve shaft rotates. When the light shielding disk rotates and the small hole 24b moves to the position shown at 24d above the second photosensor 26, the open position indicator lamp 26a lights up.

Next, the measurement and adjustment of the valve position of the on-off valve will be explained.

For example, in FIG. 2, it is assumed that the valve body 5, which was initially in the closed position shown by the solid line, is rotated 90'' counterclockwise and is now in the state shown by the two-dot chain line.

In this case, the small hole 24G of the light shielding disk 23 is 24b from the C position.
On the other hand, the small hole 24b moves to the D position shown in 24d.

Therefore, when the valve is in the fully open position, the light from the light emitting element passes through the small hole 24C and is sensed by the light receiving element in the first photosensor 25, causing the fully open position indicator lamp 25a to illuminate. In this case, in the second photosensor 26a,
Since the light is shielded by the light shielding disc 23, the fully open position indicator lamp 26a does not light up.

Also, when the valve is fully open, this first photosensor 2
In the light-transmitting state No. 5, light is blocked by the light-shielding disk 23,
The fully open position indicator lamp 25a will be turned off, but on the other hand, the small hole 24b will move to the position shown in 24d, so the light from the light emitting element will be transmitted to the second photosensor 26.
It passes through the small hole 24b and hits the light receiving element, causing the fully open position indicator lamp 26a to shine.

When displaying the valve position optically through the small hole 24 in this way, by selecting the size of this small hole,
The position of the valve can be detected with extremely high accuracy, and the opening degree of the valve can be precisely detected.

The same goes for changing the valve body 5 from fully open to fully open. When the small hole 24G, which was initially at position 24b, moves counterclockwise and reaches position C, the valve body 5 changes from fully open to fully open. The lamp will indicate what has happened.

Although the above-mentioned embodiment detects the fully open position and the fully open position of the valve body 5, the present invention is not limited to such a case. If the small hole 24e is opened at a position offset by 45 degrees counterclockwise from the position shown in FIG.
When the valve body 5 is rotated by 45 degrees, the position shown in 24d is reached, and the valve body 5 is rotated by 45 degrees.
The second sensor 26 detects that the opening is in the normal state. If it is detected that the valve body 5 is opened at 45 degrees in this way, it means that a substantially fully open state is detected. This is because if the valve body is opened 45 degrees, the resistance when fluid passes through the valve is approximately equal to that in the fully open state. The opening position of the small hole and the arrangement position of the photosensor can be freely changed.

Effects of the Invention As is clear from the above explanation, according to the present invention, a light-shielding disc that rotates as the valve shaft rotates is attached to the valve shaft of the on-off valve, and two or More small holes are opened almost concentrically, two or more photosensors are arranged around the light-shielding disk to detect the position of the small holes, and one of the small holes has a valve closed. The other small hole is located at a position where it is detected by the first photosensor when the valve is fully opened or close to it, so the valve opening degree can be adjusted. This can be detected by extremely accurate optical measurement, and in particular, if the valve position is detected when the valve is fully open, the sealing performance of the valve can be significantly improved. Furthermore, since light is used, no unnecessary load is placed on the valve drive system, which facilitates valve design or valve operation when performing precise valve opening/closing movements. Since the mechanism around the valve body can also be simplified, failures will be reduced and maintenance and inspection work will be advantageous in terms of costs.

[Brief explanation of drawings]

Fig. 1 is a schematic cross-sectional view showing an embodiment of the present invention, Fig. 2 is a schematic explanatory drawing showing the relationship among the valve body, light-shielding disk, and photosensor, and Fig. 3 is a conventional valve opening adjustment system. FIG. 4 is a cross-sectional view showing an example of this, and FIG. 4 is an explanatory view of the main part of FIG. 3. 1... Open/close valve, 2... Valve shaft, 5... Valve body, 23.
...shading disk, 24...small hole, 25.26...photo sensor. Agent Patent Attorney Shun Suzuki - Part No. 1

Claims (1)

[Claims] In the on-off valve (1) which opens and closes the flow path (10) by rotating the valve shaft (2) and rotating the valve body (5) provided in the flow path (10), the valve shaft ( 2), this valve stem (2)
) is attached, and two or more small holes (24) are opened in this light-shielding disk (23) almost concentrically, and the small holes are Two or more photosensors for position detection are arranged around the light-shielding disk, one of the small holes is provided at a position where it is detected by the first photosensor when the valve is fully closed, and the other small hole is provided at a position where it is detected by the first photosensor when the valve is fully closed. A valve opening adjustment system for an on-off valve, characterized in that the hole is provided at a position where it is detected by a second photosensor when the valve is fully opened or close to it.