JPS61226915A - Device for identifying wafer - Google Patents

Abstract

PURPOSE:To realize high-speed identification of wafer, by mounting resonators and a loop coil by corresponding to wafers, and composing an antenna which transmits a sweep frequency wave to it and a detecting part which separates an information signal from a reflected wave. CONSTITUTION:A sweep wave on a medium band, which is generated in a sweep oscillator 310, is amplified in an amplifier 320, reaching a transmitting antenna 210. When an ID card 100 comes close to the transmitting antenna 210, ceramic resonators, with the sweep wave taken by a loop coil nearly becoming the resonance frequency wave, enter a resonant state, reflecting energy at the peak of the resonant state at the resonant frequency, and a reflected wave is reflected at the loop coil. This reflected wave is detected by a receiving antenna 220, however, its amount being extremely slight. Hence, use of a ringing detection method causes the ceramic resonators to successively resonate to generate a ringing, and the ringing signal is synchronized and detected by a detector 250 so as to take effective information at an amplifying-shaping device 330 in which a matched filter is used.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a wafer identification device, and is particularly used in an automated line in a GJ for manufacturing semiconductor devices.

[Technical background of the invention]

In the manufacturing of semiconductor devices, wafers are placed in the middle and each
As the process is carried out, transportation of (1) to (3) is performed between the manufacturing equipment of each process. When transporting multiple pieces, store multiple pieces and transport them using several sides. Automatic transport installation 16'b III is required.

In this case, the transport object 1111 is
The identification of the car is installed in the vehicle, and identification signs such as bars and letters are installed on the transport platform on which it is loaded and moved (J). Detect J, sea urchin.

Figure 2 shows an overview of the identification mechanism of the famous 4-rack Parian phase wafer transfer system (partially cut away and shown in perspective). There is a figure C. According to this, when a plurality of wafers 6 are stored,
The transport trolley 4 on which the transport trolley 4 is mounted runs directly on the rails 3 Ex and 3b. A turntable 10 is installed which can be rotated by 90 degrees. These are covered with covers 1a and 1b to prevent dust, and the whole is supported above the floor by pedestals 2. On the side of the rail 3a near the turntable 10, an optical reading device 7 is installed to read the barcode 9 marked on the side of the conveyance table 4. In order to accurately perform this, a stop sensor 8 is provided adjacent to the reading device 7 to detect the end of the transport carriage 4 and stop the drive of the transport mechanism based on the detection signal.

In this conveyance system, when the conveyance cart 4 moves along the rails 3a and approaches a rail intersection, its drive is stopped by the stop sensor 8, so the barcode 9 is read at a predetermined reading position.
is read. Based on the read barcode information, a control device (not shown) determines to which destination the material is to be transported, and controls the drive mechanism and turntable 10.

[Problems with background technology]

However, in such a conveyance system, it is necessary to maintain the stop position or movement speed of identification marks such as barcodes with high precision for the reader, which is a detector, and the mechanism is complicated and expensive. However, there is a problem with 4T.

However, there is also the problem that the identification marks are subject to stains, fading, etc., and the reading accuracy deteriorates.

(Objective of the Invention) The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a wafer identification device that has a flexible structure and has high identification reliability.

[Summary of the invention]

In order to achieve the above object, in the present invention, a resonator having a resonant frequency determined in accordance with the identification information of the wafer, and a loop coil connected to the resonator are provided in the transport path of the wafer storage container. The antenna that was repaired and installed,
A sweep transmitting section supplies sweep electromagnetic waves to this antenna, and a detection section extracts wafer identification information by detecting the warped j-waves emitted when the resonator resonates with the sweep electromagnetic waves and detected by the antenna. I am trying to prepare for this. This enables fast and reliable wafer identification.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view, not showing the entire structure of the wafer identification device according to the present invention. A transport carriage 12 is mounted which can be freely moved by a transport mechanism or a transport mechanism. A wafer storage container 13 such as a wafer cassette 1- is placed on the carrier 12, and is moved for T seconds by the movement of the carrier. Further, a card guide 1 is provided on one side surface perpendicular to the traveling direction of the wafer storage container 13.
4, and an ID card 15 including a resonator such as a ceramic resonator and a loop coil connected in parallel to the resonator is inserted into and held in the card guide 14.

On the other hand, there is an I
The antenna 17 is attached to the support post 1 to match the height of the D card 15.
It is supported by 6. This antenna is used to spread a predetermined electromagnetic wave toward the approaching resonator and then detect the reflected wave from the pendulum. t11
′! It is connected to the A-zono 20, and the detection output is taken out from the control unit 20.

Figure 2 shows the configuration of this J, u<rtsu J-c identification device and f
[Explanation of use] This is a block diagram that matches the configuration of Figure 1! -UID card section 100, transmitter/receiver section 200
, and a control section 300.

2EzuII') The card section 100 includes a loop coil 101 and a plurality of ceramic resonators 102 connected in parallel to each other.
1.~102o, each of the pendulums 1021~102o has a unique Jt circular frequency 1~[n.

Next, the transmitting/receiving unit 200 sets the fundamental frequency f to the antenna 210 that transmits the sweep wave (described later) output from the control device 200, the receiving antenna 220 that receives the response signal from the ceramic resonator, and the receiving antenna. (1-71, especially for fault diagnosis) 230, the received signal is extracted from the ringing component by filter 2.
A detector 250 extracts the effective 401 signal component from the output of the sweep oscillator 310 and outputs the 401 filtered signal into the controller 300.

Next, the control unit 300 includes an oscillator 310 that generates a sweep wave whose frequency changes over time, an amplifier 320 that amplifies the sweep signal with this output, and an amplifier that amplifies the output of the detector 250 and shapes the waveform. Shaping section 330, sweep oscillator 3
A three-stage input register 3 that is activated by the synchronization pulse generated from 10 and stores the final detection signal for the past three pulses.
-C has 40°350.360, and the contents of this input register are as follows:
0 extracts the information contained in the obtained signal,
It is sent to a computer that centrally manages each manufacturing device.

Next, the operation of the wafer identification device according to the present invention will be explained.
Ru.

The swept wave in the medium wave band generated by the sweep oscillator 310 is amplified by the amplifier 320 and sent to the transmission amplifier 210. When the ID card 100 comes close to this transmitting antenna 210, the ceramic resonator receives the signal with a loop of 1.
When the swept wave approaches its resonant frequency, it enters a resonant state, and at the peak of the resonant state at the J's circular frequency, it violates the -L channel. 'IJ, that is, the reflected wave is reflected from loop=1il. This reflected wave is detected by the receiving amplifier 220. However, this counter-wave is very weak. For this reason, it is necessary to perform special modulation on the reflected waves, and one of the most effective methods is a ringing detection method. This method uses a sufficiently fast sweeping wave of the cotton resonator as a transmission wave, causes the ceramic resonators to resonate one after another to cause ringing, and detects this ringing signal.
This is a method to To detect this ringing signal - (
1. It is effective to perform synchronous detection using the swept wave as the reference frequency for the received wave by the i-detector 250, and the difference between the emitted wave and the received wave is called ringing - 1. It is effective to use a Matsubuto filter for the amplification shaper 330 to extract valid information from this linking pin 1-1.In this way, the reflected wave from the ceramic resonator is filtered by the filter 240. , a detector 250, and an amplification shaper, the information pulse is extracted and sent to the registers 34o, 350, 360 and various verification units 370, 38.
Valid information can be obtained by passing 0.

In this type of wafer identification device, the number of objects to be identified is 100KI.
Even when moving at high speeds such as R/h, highly reliable reading is possible in 11 minutes.

It should be noted that although only one resonator may be used, the amount of information that can be expressed increases by combining a plurality of resonators. When identifying a wafer, it is most convenient to extract the lot I number, but other information may be expressed.

Furthermore, in the above embodiment, the ceramic resonator and loop coil are shaped like cards and removably attached to the wafer storage container, but they are embedded in the wafer cartridge itself and can be attached to the wafer container [button] depending on the product type. You may use them differently.

In addition, the resonator is an example (a dynamic resonator is used, and the swept wave also matches that! Although a medium wave is used, various other types of resonators and corresponding 1) are used. It is possible to use electromagnetic waves.Also, one transmitting antenna and one receiving antenna can be used separately, or the same antenna can be used for both purposes.

[Efficacy of invention]

As described above, according to the present invention, a resonator and a loop antenna are set up corresponding to the wafer to be identified, and a sweep frequency is transmitted to the antenna and a sweep LX (
Since the i'i part and the detection part which separates the information signal from the opposite wave emitted by the resonance of the resonator are installed, high-speed wafer identification with high reliability is possible. O
■It is Noh. Moreover, there is no need to stop the wafer during identification. In addition, the structure of the conveyance system is simple,
The key is to reduce equipment costs.

Furthermore, there are no reading errors due to dirt, etc., no power supply is required on the Jt swing side, and it has a long life.

[Brief explanation of the drawing]

Fig. 1 is a perspective view of the present invention (1-1 identification station iN) according to the present invention; 3 Figure 13L Conventional conveyance system
] - Partially cutaway oblique diagram explaining the identification device in the room - (') 11...transportation track, 12...inside the transport platform, 1:3...
・tsu■-ha storage container, 100... (D card. 17...) nonteno, 18.20 (')... sending and receiving activity department, 20°300... control device, 101...・Loop-1il, 102...1! 1 Tatsuko from Ramik, 2゛1
0... Transmission 1 C antenna, 220... Receiving non-nono, 240... Noirta, 25jO... Detector, 31
0: Sweep oscillator, △: Ukeichibe, 13: Processing unit. Applicant's agent Tsuke Inomata Figure 3 procedural amendment May 2, 1985

Claims (1)

[Claims] 1. A transport path of a wafer storage container equipped with one or more resonators having a resonant frequency determined in accordance with the identification information of the wafer to be transported and a loop coil connected to the resonators. an antenna provided along the antenna; a sweep transmitter that supplies a swept electromagnetic wave to the antenna; A wafer identification device comprising: a detection unit that separates a detected reflected wave and extracts identification information of the wafer. 2. The wafer identification device according to claim 1, wherein the resonator is a ceramic resonator and the resonant frequency is in a medium wave band. 3. The wafer identification device according to claim 1, wherein the resonator and the loop coil are formed in the form of a removable card and are adapted to be attached to a wafer storage container. 4. The wafer identification device according to claim 1, wherein the resonator and the loop coil are incorporated in a wafer storage container. 5. A wafer identification device according to any one of claims 1 to 4, wherein the detection device detects reflected waves due to resonance of a resonator using a matched filter.