JPS6122000U - Electron beam irradiation device - Google Patents

Electron beam irradiation device

Info

Publication number
JPS6122000U
JPS6122000U JP10696484U JP10696484U JPS6122000U JP S6122000 U JPS6122000 U JP S6122000U JP 10696484 U JP10696484 U JP 10696484U JP 10696484 U JP10696484 U JP 10696484U JP S6122000 U JPS6122000 U JP S6122000U
Authority
JP
Japan
Prior art keywords
irradiation device
electron beam
beam irradiation
loading port
carrying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10696484U
Other languages
Japanese (ja)
Inventor
周一 谷口
隆裕 寺澤
勇 坂本
Original Assignee
日新ハイボルテ−ジ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社
Priority to JP10696484U priority Critical patent/JPS6122000U/en
Publication of JPS6122000U publication Critical patent/JPS6122000U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図はこの考案の一実施例を示す断面図である。 １・・・チャンバ、２・・・照射装置本体、３・・・ノ
ズル、５・・・被照射体、６・・・搬入口、７・・・搬
出口、８・・・ファン、９・・・照射部。The figure is a sectional view showing an embodiment of this invention. DESCRIPTION OF SYMBOLS 1... Chamber, 2... Irradiation device main body, 3... Nozzle, 5... Irradiated object, 6... Carrying inlet, 7... Carrying out outlet, 8... Fan, 9... ...Irradiation section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 被照射体を搬入する搬入口及び前記被照射体を搬出する
搬出口を有するチャンバの内部に、前記搬入口と搬出口
との間に照射装置本体を設け、前記被照射体に前記照射
装置本体からの電子線を照射するようにしてなる電子線
照射装置において、前記照射装置本体の下方の照射部を
よこぎって、前記搬出口側から前記搬入口側に向かう非
酸化性雰囲気の流れを生じさせるファンを設けてなる電
子線照射装置。An irradiation device body is provided between the loading port and the loading port inside a chamber having a loading port for carrying in the irradiated object and a loading port for carrying out the irradiated object, and the irradiating device main body is provided at the irradiated body. In an electron beam irradiation device configured to irradiate an electron beam from the irradiation device, a flow of non-oxidizing atmosphere is generated from the carry-out port side toward the carry-in port side, passing through the irradiation section below the irradiation device main body. An electron beam irradiation device equipped with a fan.
JP10696484U 1984-07-13 1984-07-13 Electron beam irradiation device Pending JPS6122000U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10696484U JPS6122000U (en) 1984-07-13 1984-07-13 Electron beam irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10696484U JPS6122000U (en) 1984-07-13 1984-07-13 Electron beam irradiation device

Publications (1)

Publication Number Publication Date
JPS6122000U true JPS6122000U (en) 1986-02-08

Family

ID=30666234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10696484U Pending JPS6122000U (en) 1984-07-13 1984-07-13 Electron beam irradiation device

Country Status (1)

Country Link
JP (1) JPS6122000U (en)

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