JPS61215911A - Displacement detecting touch sensor - Google Patents

Displacement detecting touch sensor

Info

Publication number
JPS61215911A
JPS61215911A JP5797485A JP5797485A JPS61215911A JP S61215911 A JPS61215911 A JP S61215911A JP 5797485 A JP5797485 A JP 5797485A JP 5797485 A JP5797485 A JP 5797485A JP S61215911 A JPS61215911 A JP S61215911A
Authority
JP
Japan
Prior art keywords
displacement
shaft
guide shaft
displacement detection
finger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5797485A
Other languages
Japanese (ja)
Other versions
JPH0456925B2 (en
Inventor
Akira Matsuhashi
松橋 章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
METOROOLE KK
Original Assignee
METOROOLE KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by METOROOLE KK filed Critical METOROOLE KK
Priority to JP5797485A priority Critical patent/JPS61215911A/en
Publication of JPS61215911A publication Critical patent/JPS61215911A/en
Publication of JPH0456925B2 publication Critical patent/JPH0456925B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00Measuring arrangements characterised by the use of mechanical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

PURPOSE:To detect the highly accurate displacement for the three-dimensional direction by using plural touch sensors and regulating and operating in respective directions needed by a detecting finger. CONSTITUTION:When a detecting finger 2 receives the displacement in the Z direction, the rear edge part of a shaft 3 operates a sensor 5, a displacing signal is outputted to a control circuit, the displacement is removed, and then, the detecting finger 2 is returned to the original position by a return spring 4. Next, when the finger 2 receives the displacement in the Y direction, a guide shaft 6 rotates with the second pivots 8c and 8d as a center, operates a sensor 12a and outputs the displacing signal. When the external force due to displacement is removed, the force of a spring 10a is added through a roller guide 11a to the shaft 6, and the detecting finger 2 is returned to the original position in which the balance is kept with the facing spring 10b. In the same manner when the finger 2 receives the displacement in the X direction, the guide shaft 6 rotates with pivots 8a and 8b as a supporting point, operates a sensor 12c and outputs the displacing signal. Thus, by one finger 2, multi-dimensional and multi-directional displacement can be detected with a high accuracy.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は9寸法あるいは位置制御における変位検出タッ
チセンサに関する。特に、一つの検出フィンガで3次元
方向の変位を検出することができる変位検出タッチセン
サに関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a displacement detection touch sensor in nine dimensions or position control. In particular, the present invention relates to a displacement detection touch sensor that can detect displacement in three-dimensional directions with one detection finger.

(従来の技術) 従来の寸法あるいは位置制御に用いられている変位検出
タッチセンサには2本出願人が特願昭59−09353
3にて出願した三次元タッチセンサがある。
(Prior art) Two displacement detection touch sensors used for conventional dimension or position control are disclosed in Japanese Patent Application No. 59-09353.
There is a three-dimensional touch sensor filed under No. 3.

この三次元タッチセンサは、直角四辺形の頂点に配置さ
れた4個の円錐穴を有する本体と、この円錐穴にそれぞ
れ係合する球と、端面がこれらの球にそれぞれ接続する
足および外部へ凸出した検出フィンガとを有する主軸と
、この主軸に作用し上記の足を介して円錐穴に球を常に
圧接させるばねと、検出フィンガに変位が与えられたと
きに主軸が2個の球と2個の足との接触点を支点として
傾いたときに動作するタッチセンサと、ばねおよびタッ
チセンサを保持し1本体と接合締結するケースとによっ
て構成されている。
This three-dimensional touch sensor consists of a main body having four conical holes placed at the vertices of a right-angled quadrilateral, a sphere that engages with each of the conical holes, a leg and an external body whose end surfaces connect to these spheres, respectively. a main shaft having a protruding detection finger; a spring acting on the main shaft to constantly press the ball into contact with the conical hole through the foot; It is composed of a touch sensor that operates when the device is tilted using the points of contact with the two feet as fulcrums, and a case that holds the spring and the touch sensor and is joined and fastened to the main body.

(発明が解決しようとする問題点) このタッチセンサは、一つの検出フィンガおよdセンサ
によって寸法あるいは位置制御に必要な三次元方向の変
位の検出ができ、悪環境下においても耐久性および信頼
性が高く、ローコストで製造できる優れたものをもち、
用途によっては充分にその機能をはだすことができるが
、三次元すべての方向に対して、より高い精度を要求さ
れた場合に、タッチセンサが1個であるために方向判別
ができない難点を有している。
(Problems to be Solved by the Invention) This touch sensor can detect displacement in three-dimensional directions necessary for dimension or position control using one detection finger and a d-sensor, and is durable and reliable even under adverse environments. We have excellent products that have high properties and can be manufactured at low cost.
Depending on the application, it can fully perform its functions, but when higher precision is required in all three dimensions, it has the disadvantage that it is unable to determine the direction because there is only one touch sensor. are doing.

(問題を解決するための手段) このような問題点を解決するために9本発明は。(Means to solve the problem) In order to solve these problems, the present invention has nine aspects.

すでに実願昭54−179088にて実用新案登録出願
したタッチセンサを複数個用い、検出フィンガが必要と
する各方向に規正されて動作する構成にしたものである
。これによって変位を受ける方向判別は確実となりどの
方向の変位も一様に高い精度で検知することができる。
This sensor uses a plurality of touch sensors, for which a utility model application has already been filed in Utility Model Application No. 54-179088, and has a configuration in which the detection fingers are regulated and operated in each required direction. As a result, the direction of displacement can be reliably determined, and displacement in any direction can be detected uniformly and with high accuracy.

すなわち1本発明は第1図〜第5図に示すように完全密
閉構造の本体1内に、検出フィンガ2を一端に有する軸
3が、後端部に戻しばね4を介在してセンサ5を内設し
たガイド軸6に挿通した状態で配置され、このガイド軸
6とその外周に設けられた軸受7には直角方向に二対の
ピボット8およびピボット軸受9が備えられている。
That is, in the present invention, as shown in FIGS. 1 to 5, a shaft 3 having a detection finger 2 at one end is inserted into a main body 1 having a completely sealed structure, and a sensor 5 is inserted into the rear end with a return spring 4 interposed therebetween. The guide shaft 6 is disposed so as to be inserted into the guide shaft 6, and two pairs of pivots 8 and pivot bearings 9 are provided at right angles to the guide shaft 6 and the bearing 7 provided on the outer periphery of the guide shaft 6.

また、その後列には本体1との間にばね10を介在して
二対のローラガイド11が上記ガイド軸6を4方向から
圧接し、さらにその後列には本体1に固定された二対の
センサ12がガイド軸6の4方向の回動によって各々動
作するように配置され、軸3の突出部分にはゴムブーツ
13が設けられて構成されている。
Further, in the rear row, two pairs of roller guides 11 press against the guide shaft 6 from four directions with a spring 10 interposed between them and the main body 1, and furthermore, in the rear row, two pairs of roller guides 11 fixed to the main body 1 are placed in pressure contact with the guide shaft 6 from four directions. The sensors 12 are arranged so as to be operated by the rotation of the guide shaft 6 in four directions, and a rubber boot 13 is provided on the protruding portion of the shaft 3.

(作用) 検出フィンガ2がZ方向に変位を受けると、軸3の後端
部がセンサ5を動作させ、変位信号を図外の制御回路に
出力し2変位が除去されると検出フィンガ2は戻しばね
4によって原位置に復帰するO 次に、検出フィンガ2がx、 x’、およびY、 Y’
Z方向各々変位を受けると、ピボット8およびピボット
軸受9を支点としてガイド軸6が各方向に回動し、相対
するセンサ12を動作させて変位信号を出力することが
できる。変位が取除かれると。
(Function) When the detection finger 2 is displaced in the Z direction, the rear end of the shaft 3 operates the sensor 5, outputs a displacement signal to a control circuit (not shown), and when the displacement is removed, the detection finger 2 O is returned to the original position by the return spring 4. Next, the detection finger 2 moves to x, x', and Y, Y'
When displaced in each of the Z directions, the guide shaft 6 rotates in each direction using the pivot 8 and the pivot bearing 9 as fulcrums, allowing the opposing sensor 12 to operate and output a displacement signal. Once the displacement is removed.

ローラガイド11が作用し、検出フィンガ2は原位置に
復帰する。
The roller guide 11 acts and the detection finger 2 returns to its original position.

(実施例) 次に本発明実施例変位検出タッチセンサを図面に基づい
て詳しく説明−する。
(Embodiment) Next, a displacement detection touch sensor according to an embodiment of the present invention will be explained in detail based on the drawings.

第1図は本発明実施例変位検出タッチセンサの構成を示
す正面断面図、第2図はその左側面図。
FIG. 1 is a front sectional view showing the configuration of a displacement detection touch sensor according to an embodiment of the present invention, and FIG. 2 is a left side view thereof.

第3図は回動機構の構成を示す第1図↓こおけるA矢視
図、第4図はバランス機構の構成を示す第1図における
B矢視図、第5図は変位検出機構の構成を示す第1図に
おけるC矢視図である。
Figure 3 is a view from arrow A in Figure 1↓ showing the configuration of the rotation mechanism, Figure 4 is a view from arrow B in Figure 1 showing the configuration of the balance mechanism, and Figure 5 is the configuration of the displacement detection mechanism. FIG. 2 is a view taken along arrow C in FIG. 1.

本発明実施例変位検出タッチセンサは、密閉構造の本体
1の中心軸方向に検出フィンガ2を一端に有する軸3が
戻しばね4を介してセンサ5をその後端部に設けたガイ
ド軸6に直動自在に挿通して形成される変位検出軸機構
が配置され、四角状のガイド軸6の外側両面に埋設され
た一対の第一のピボット8αおよび8hを支持する一対
の第一のピボット軸受9αおよび9hを保持し、上記第
一のピボット8αおよび8bと直角方向に位置する一対
の第二のピボット8゜および8dを有する軸受7と2本
体11こ保持され上記第二のピボット8cおよび8dを
支持する一対の第二のピボット軸受9cおよび9dから
成る回動機構を備え、また、その後列には上記ガイド軸
6の外側面の四面にばね10α、 LOh  10cお
よび10dを介して転動自在に接触するローラガイド1
1α 11h11cおよびlidから成るバランス機構
が、さらにその後列には本体1の内面に固着され。
In the displacement detection touch sensor according to the embodiment of the present invention, a shaft 3 having a detection finger 2 at one end is connected directly to a guide shaft 6 having a sensor 5 at its rear end via a return spring 4 in the central axis direction of a body 1 having a sealed structure. A pair of first pivot bearings 9α support a pair of first pivots 8α and 8h embedded in both outer surfaces of the square guide shaft 6, in which a displacement detection shaft mechanism formed by movably inserted is disposed. and 9h, and a pair of second pivots 8° and 8d located perpendicular to the first pivots 8α and 8b. It is equipped with a rotating mechanism consisting of a pair of supporting second pivot bearings 9c and 9d, and in the rear row is provided with a rotatable mechanism on the four outer surfaces of the guide shaft 6 via springs 10α, LOh 10c and 10d. Contacting roller guide 1
A balance mechanism consisting of 1α 11h11c and a lid is further fixed to the inner surface of the main body 1 in the rear row.

ガイド軸6の外側四面に各々対向して設けられたセンサ
12α 12A  12cおよび12dから成る変位検
出機構が本体1から軸3が突出する部分にはゴムブーツ
13が備えられて構成されている。
A displacement detection mechanism consisting of sensors 12α, 12A, 12c and 12d provided on four outer sides of the guide shaft 6 facing each other is provided with a rubber boot 13 at a portion where the shaft 3 protrudes from the main body 1.

本発明は必ずしも三次元方向の変位検出に限定されるも
のではなく、不必要とする次元あるいは方向に対応する
センサを取りはずすことにより用途に応じた構成にする
ことができる。例えば、Y。
The present invention is not necessarily limited to displacement detection in three-dimensional directions, and can be configured to suit the purpose by removing sensors corresponding to unnecessary dimensions or directions. For example, Y.

y’、 x、 x’方向のみを必要とする場合は、セン
サ5を含むガイド軸6を取りはずせばよく、またZ。
If only the y', x, and x' directions are required, the guide shaft 6 containing the sensor 5 can be removed, and the Z direction can be removed.

Y、Y’Z方向みを必要とする場合は、センサ12cお
よび12dを取りはずせばよい。
If only the Y, Y'Z directions are required, the sensors 12c and 12d may be removed.

このように構成された本発明実施例の動作について説明
する。先ず検出フィンガ2がZ方向に変位を受けた場合
、外力により軸3がガイド軸6内部を直動して、センサ
5を動作させ変位信号を図外の制御回路に出力す、る。
The operation of the embodiment of the present invention configured as described above will be explained. First, when the detection finger 2 is displaced in the Z direction, the shaft 3 moves linearly inside the guide shaft 6 due to an external force, operating the sensor 5 and outputting a displacement signal to a control circuit (not shown).

変位による外力が取除かれると、戻しばね4が作用して
検出フィンガ2は原位置に戻される。
When the external force due to displacement is removed, the return spring 4 acts to return the detection finger 2 to its original position.

次に9検出フインガ2がY方向に変位を受けると、第二
のピボット8cおよび8dを中心にガイド軸6が回動し
、センサ12αを動作させ、変位信号を出力する。変位
による外力が除去されると、ばね10zの力がローラガ
イド11αを経てガイド軸6に加わり。
Next, when the nine detection finger 2 is displaced in the Y direction, the guide shaft 6 rotates around the second pivots 8c and 8d, operating the sensor 12α and outputting a displacement signal. When the external force due to displacement is removed, the force of the spring 10z is applied to the guide shaft 6 via the roller guide 11α.

対向するばね10bと平衡が保たれる位置、すなわち原
位置に検出フィンガ2が復帰する。
The detection finger 2 returns to the position where equilibrium is maintained with the opposing spring 10b, that is, the original position.

ガイド軸6の回動あるいは復帰時には、他の一対のロー
ラガイド11cおよび11d、はこのガイド軸6の両側
面を転動し、ばね10cおよび10dを常に同一 −位
置に保たせる働きをする。
When the guide shaft 6 rotates or returns to its original position, the other pair of roller guides 11c and 11d roll on both sides of the guide shaft 6 to keep the springs 10c and 10d at the same position.

以下同様に、検出フィンガ2がY′方向に変位を受けた
ときは、ガイド軸6がピボット8cおよび8d。
Similarly, when the detection finger 2 is displaced in the Y' direction, the guide shaft 6 moves to the pivots 8c and 8d.

を支点として回動しセンサ12bを、X方向に受けたと
きはガイド軸6がピボット8αおよび8bを支点に回動
しセンサ12cを X/方向に受けたときには同様にセ
ンサ12dをそれぞれ動作させ変位信号を出力する。変
位による力が検出フィンガ2から取除かれると、ローラ
ガイド11α、11h、11cおよびlidがばね10
a10h10cおよび10d、の作用を受はガイド軸に
それぞれ働き、検出フィンガ2を原位置に復帰させる。
When the guide shaft 6 rotates about the pivots 8α and 8b and receives the sensor 12b in the X direction, the guide shaft 6 rotates about the pivots 8α and 8b, and when it receives the sensor 12c in the X/direction, the sensor 12d is similarly operated and displaced. Output a signal. When the force due to displacement is removed from the detection finger 2, the roller guides 11α, 11h, 11c and lid
The actions of a10h10c and 10d act on the guide shaft, respectively, to return the detection finger 2 to its original position.

この場合もピボット8α 8hおよび8゜8dとピボッ
ト軸9α 9bおよび9c  9d、によって上下左右
の回動が一定方向に規正されているために検出フィンガ
2に働く力の位置および角度の有無に関係なく方向の判
別が完全になされる。
In this case as well, the vertical and horizontal rotations are regulated in a fixed direction by the pivots 8α 8h and 8° 8d and the pivot axes 9α 9b and 9c 9d, regardless of the position and angle of the force acting on the detection finger 2. Direction is completely determined.

本発明の本体1は密閉構造であり、この本体1から軸3
が突出する回動部分、にはゴムブーツ13が設けられて
いるために防塵、防水は完全なものであり、悪環境下で
の使用にも充分耐えることができ、主要部分が強固な本
体1に内設されるために強度的にも充分なものを有して
いる。
The main body 1 of the present invention has a sealed structure, and from this main body 1 there is a shaft 3.
The protruding rotating part is equipped with a rubber boot 13, so it is completely dustproof and waterproof, and can withstand use in harsh environments. Since it is installed internally, it has sufficient strength.

(発明の効果) 以上述べたように本発明によれば、方向判別が確実であ
るために一つの検出フィンガで多次元。
(Effects of the Invention) As described above, according to the present invention, since direction discrimination is reliable, multi-dimensional detection can be performed with one detection finger.

多方向の変位を極めて高い精度で検出することができ、
検出フィンガが棒状であることから狭い個所での変位の
検出が可能であり、また変位検出において多次元、多方
向を要しない場合でもセンサを方向別に個々に設置する
ことができる構造であるために必要に応じてセンサの設
置ができ、従って必要とする変位検出の方向に応じた価
格が設定できるために不必要な出費をはふくことができ
る。
Displacement in multiple directions can be detected with extremely high accuracy.
Since the detection finger is rod-shaped, it is possible to detect displacement in a narrow place, and the structure allows sensors to be installed individually in each direction even when multidimensional and multidirectional displacement detection is not required. Sensors can be installed as needed, and therefore, the price can be set according to the direction of displacement detection required, so unnecessary expenses can be eliminated.

さらに、内設されているセンサは個別に着脱できること
から保守2点検が容易となり、維持費が少くてすみ2本
体は強固でかつ防塵、防水が容易にできるために悪環境
下での使用に充分耐え得るなどの多くの優れた効果を有
している。
In addition, the built-in sensors can be attached and detached individually, making maintenance and inspection easier, reducing maintenance costs.The body is strong, dust-proof, and waterproof, making it suitable for use in adverse environments. It has many excellent effects such as being durable.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明実施例変位検出タッチセンサの構成を示
す断面正面図。 第2図は本発明実施例変位検出タッチセンサの構成を示
す左側面図。 第3図は本発明実施例回動機構の構成を示す第1図にお
けるA矢視図。 第4図は本発明実施例バランス機構の構成を示す第1図
におけるB矢視図。 第5図は本発明実施例変位検出機構の構成を示す第1図
におけるC矢視図。 1・・・本体、2・・・検出フィンガ、3・・・軸、4
・・・戻しばね、  5.12α、 12h、 12c
、 12d、・・・センサ、  6・・・ガイド軸、7
・・・軸受、  8a、 8h、 8c、 8d・・・
ピボット9a、 9A、 9c= 9cf”ピボット軸
受、  10α、 IOb、 10cm10d・・・ば
ね、  ILz、 Ilb、 11(?、 1lcl”
ガイドローラ13・・・ゴムブーツ 特許出願人  株式会社 メトロール 斉1!!1 簿2芭
FIG. 1 is a sectional front view showing the configuration of a displacement detection touch sensor according to an embodiment of the present invention. FIG. 2 is a left side view showing the configuration of a displacement detection touch sensor according to an embodiment of the present invention. FIG. 3 is a view taken along arrow A in FIG. 1, showing the configuration of the rotating mechanism according to the embodiment of the present invention. FIG. 4 is a view taken along arrow B in FIG. 1, showing the configuration of the balance mechanism according to the embodiment of the present invention. FIG. 5 is a view taken along arrow C in FIG. 1, showing the configuration of the displacement detection mechanism according to the embodiment of the present invention. 1... Main body, 2... Detection finger, 3... Axis, 4
...Return spring, 5.12α, 12h, 12c
, 12d,...sensor, 6...guide shaft, 7
...Bearing, 8a, 8h, 8c, 8d...
Pivot 9a, 9A, 9c=9cf" Pivot bearing, 10α, IOb, 10cm10d...Spring, ILz, Ilb, 11(?, 1lcl"
Guide roller 13...Rubber boots patent applicant Metrol Co., Ltd. Qi 1! ! 1 book 2 pages

Claims (2)

【特許請求の範囲】[Claims] (1)密閉構造の本体と、 この本体に内設する検出フィンガを一端に有する軸と、
この軸を直動自在に挿通する四角状のガイド軸と、この
ガイド軸の後端に軸方向の変位を検出するセンサおよび
上記軸を原位置に復帰させる戻しばねとを含む変位検出
軸機構と、上記ガイド軸の外側両面に埋設された一対の
第一のピボットおよびこのピボットを回動自在に支持す
る一対の第一のピボット軸受と、このピボット軸受を保
持し、上記第一のピボットと直角方向に位置する外面に
埋設された一対の第二のピボットを有する軸受および上
記第二のピボットを回動自在に支持し、上記本体に保持
された一対の第二のピボット軸受より成り上記軸が4方
向に回動する回動機構と、 上記ガイド軸の外側四面にばねを介して接触し、その転
動により位置の規正と上記変位検出手段の回動規正およ
び原位置への復帰力を与える4個のローラガイドから成
るバランス機構と、上記本体に内設し、上記ガイド軸四
面に各々対向して設けられ、上記変位検出機構のガイド
軸の回動により変位を検知する4個のセンサを有する変
位検出機構と を備えたことを特徴とする変位検出タッチセンサ。
(1) A main body with a sealed structure, a shaft having a detection finger installed inside the main body at one end,
A displacement detection shaft mechanism including a rectangular guide shaft that is inserted through the shaft so as to be freely movable in a linear manner, a sensor at the rear end of the guide shaft that detects displacement in the axial direction, and a return spring that returns the shaft to its original position. , a pair of first pivots embedded in both outer sides of the guide shaft, a pair of first pivot bearings that rotatably support the pivots, and a pair of first pivot bearings that hold the pivot bearings and are perpendicular to the first pivots. a pair of second pivot bearings that rotatably support the second pivot and are held in the main body; A rotation mechanism that rotates in four directions contacts the four outer surfaces of the guide shaft via a spring, and its rolling provides position regulation, rotation regulation of the displacement detection means, and return force to the original position. A balance mechanism consisting of four roller guides, and four sensors installed inside the main body and facing each of the four sides of the guide shaft to detect displacement by rotation of the guide shaft of the displacement detection mechanism. A displacement detection touch sensor comprising a displacement detection mechanism.
(2)上記変位検出軸機構および変位検出機構のセンサ
が4個以下である特許請求の範囲第(1)項に記載の変
位検出タッチセンサ。
(2) The displacement detection touch sensor according to claim (1), wherein the displacement detection axis mechanism and the displacement detection mechanism have four or less sensors.
JP5797485A 1985-03-22 1985-03-22 Displacement detecting touch sensor Granted JPS61215911A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5797485A JPS61215911A (en) 1985-03-22 1985-03-22 Displacement detecting touch sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5797485A JPS61215911A (en) 1985-03-22 1985-03-22 Displacement detecting touch sensor

Publications (2)

Publication Number Publication Date
JPS61215911A true JPS61215911A (en) 1986-09-25
JPH0456925B2 JPH0456925B2 (en) 1992-09-10

Family

ID=13070977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5797485A Granted JPS61215911A (en) 1985-03-22 1985-03-22 Displacement detecting touch sensor

Country Status (1)

Country Link
JP (1) JPS61215911A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901841A1 (en) * 1989-01-23 1990-07-26 Int Fluggeraete Und Motoren Gm Device for generating a measured variable which depends on the deflection of a body
JP2016500823A (en) * 2012-11-23 2016-01-14 ポスコ Steel plate scale thickness measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3901841A1 (en) * 1989-01-23 1990-07-26 Int Fluggeraete Und Motoren Gm Device for generating a measured variable which depends on the deflection of a body
JP2016500823A (en) * 2012-11-23 2016-01-14 ポスコ Steel plate scale thickness measuring device

Also Published As

Publication number Publication date
JPH0456925B2 (en) 1992-09-10

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