JPS61207025U - - Google Patents
Info
- Publication number
- JPS61207025U JPS61207025U JP9019785U JP9019785U JPS61207025U JP S61207025 U JPS61207025 U JP S61207025U JP 9019785 U JP9019785 U JP 9019785U JP 9019785 U JP9019785 U JP 9019785U JP S61207025 U JPS61207025 U JP S61207025U
- Authority
- JP
- Japan
- Prior art keywords
- hood
- scavenger
- slide rail
- reaction tube
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002516 radical scavenger Substances 0.000 claims description 8
- 238000007599 discharging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9019785U JPS61207025U (enExample) | 1985-06-17 | 1985-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9019785U JPS61207025U (enExample) | 1985-06-17 | 1985-06-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61207025U true JPS61207025U (enExample) | 1986-12-27 |
Family
ID=30644978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9019785U Pending JPS61207025U (enExample) | 1985-06-17 | 1985-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61207025U (enExample) |
-
1985
- 1985-06-17 JP JP9019785U patent/JPS61207025U/ja active Pending