JPS61206672U - - Google Patents

Info

Publication number

JPS61206672U

JPS61206672U JP8878885U JP8878885U JPS61206672U JP S61206672 U JPS61206672 U JP S61206672U JP 8878885 U JP8878885 U JP 8878885U JP 8878885 U JP8878885 U JP 8878885U JP S61206672 U JPS61206672 U JP S61206672U

Authority

JP

Japan

Prior art keywords

target

ferromagnetic material

targets

needle

processed

Prior art date

1985-06-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000003302 ferromagnetic material Substances 0.000 claims 2
• 238000000034 method Methods 0.000 claims 2
• 238000001755 magnetron sputter deposition Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 238000004544 sputter deposition Methods 0.000 claims 1

Cited By (1)